公开(公告)号：US09741532B1

公开(公告)日：2017-08-22

申请号：US15185920

申请日：2016-06-17

申请人： International Business Machines Corporation

发明人： Stephen W. Bedell ,  Kunal Mukherjee ,  John A. Ott ,  Devendra K. Sadana ,  Brent A. Wacaser

IPC分类号： H01J37/28 ,  H01J37/26 ,  H01J37/20 ,  H01J37/244 ,  H01J37/06 ,  H01J37/21

CPC分类号： H01J37/28 ,  H01J37/023 ,  H01J37/265 ,  H01J37/292 ,  H01J2237/0245 ,  H01J2237/20207 ,  H01J2237/24592 ,  H01J2237/2804

摘要： A multi-beam electron microscope for ECCI is provided. The electron microscope has a platform, on which a crystalline sample is placed. At least a first electron source and a second electron source of the electron microscope are mounted to a housing. The housing is tiltable with respect to a longitudinal direction through a pivot for forming a fulcrum, such that the first electron source and the second electron source are tilted simultaneously and are substantially equally distanced from the platform along a vertical axis when the housing is tilted. The electron microscope also has electron beam focusing assemblies for focusing the electron beams generated by the electron sources onto the crystalline sample to generate backscattered electrons. The electron microscope also has detectors for detecting the backscattered electrons.

公开(公告)号：US09613777B2

公开(公告)日：2017-04-04

申请号：US14484018

申请日：2014-09-11

申请人： Varian Semiconductor Equipment Associates, Inc.

发明人： Alexandre Likhanskii ,  Svetlana B. Radovanov

IPC分类号： H01J37/32 ,  H01J37/02 ,  H01J37/08

CPC分类号： H01J37/023 ,  H01J37/08 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32174 ,  H01J2237/061 ,  H01J2237/0817

摘要： A plasma chamber having improved plasma density is disclosed. The plasma chamber utilizes internal antennas. These internal antennas can be manipulated in a variety of ways to control the uniformity of the plasma density. In some embodiments, the conductive coil within the antenna is translated from a first location to a second location. For example, the entirety of the internal antennas may be translated within the plasma chamber. In another embodiment, the conductive coil disposed within the outer tube is translated relative to its outer tube. In another embodiment, the conductive coil within the outer tube may be bent and may be rotated within the outer tube. In another embodiment, the outer tube may also be bent and rotated. In other embodiments, ferromagnetic segments may be disposed in the outer tube to focus or block the electromagnetic energy emitted from the conductive coil.

公开(公告)号：US20170076902A1

公开(公告)日：2017-03-16

申请号：US15361642

申请日：2016-11-28

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Norihide SAHO ,  Masahiro YAMAOKA ,  Noriaki ARAI

IPC分类号： H01J27/26

CPC分类号： H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

摘要： An ion beam device according to the present invention includes a gas field ion source including an emitter tip supported by an emitter base mount, a ionization chamber including an extraction electrode and being configured to surround the emitter tip, and a gas supply tube. A center axis line of the extraction electrode overlaps or is parallel to a center axis line of the ion irradiation light system, and a center axis line passing the emitter tip and the emitter base mount is inclinable with respect to a center axis line of the ionization chamber. Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

摘要翻译： 根据本发明的离子束装置包括气体离子源，其包括由发射极基座支撑的发射极尖端，包括引出电极并被配置为围绕发射极尖端的电离室和气体供应管。 引出电极的中心轴线与离​​子照射光系统的中心轴线重叠或平行，并且通过发射极尖端和发射极基座的中心轴线相对于电离的中心轴线是可倾斜的 房间。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

公开(公告)号：US20160141144A1

公开(公告)日：2016-05-19

申请号：US15005348

申请日：2016-01-25

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Yu-Chi Chen

IPC分类号： H01J37/147 ,  H01J37/317

CPC分类号： H01J37/1472 ,  G06F17/5081 ,  H01J37/023 ,  H01J37/3174 ,  H01J2237/30455 ,  H01J2237/3174 ,  H01J2237/3175 ,  H01J2237/31762 ,  H01J2237/31774 ,  H01J2237/31789

摘要： Disclosed is an apparatus in a semiconductor lithography system. The apparatus comprises a multiplexer and a plurality of imaging elements. The plurality is configured into a shift chain and an output of the shift chain is coupled to a data input of the multiplexer.

摘要翻译： 公开了半导体光刻系统中的装置。 该装置包括多路复用器和多个成像元件。 多个配置为移位链，并且移位链的输出耦合到多路复用器的数据输入。

公开(公告)号：US20160104596A1

公开(公告)日：2016-04-14

申请号：US14878513

申请日：2015-10-08

申请人： FEI Company

发明人： Bart Buijsse ,  Gijs van Duinen

IPC分类号： H01J37/02 ,  H01J37/153 ,  H01J37/26

CPC分类号： H01J37/023 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/024 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

摘要： When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.

摘要翻译： 当准备无孔相板（HFPP）时，应该在TEM的衍射平面或与其共轭的平面上以高精度放置优选无特征薄膜。 描述了将薄膜准确地放置在所述平面中的两种方法。 当TEM处于成像模式时，一种方法使用薄膜的Ronchigram，并且调整Ronchigram的放大倍率，使得Ronchigram中间的放大倍率是无穷大的。 第二种方法是在TEM处于衍射模式时使用由薄膜散射的电子。 当薄膜与衍射平面不一致时，由薄膜散射的电子似乎源自与零光束交叉的另一位置。 这被观察为光环。 光晕的不存在证明薄膜与衍射平面重合。

公开(公告)号：US20160079042A1

公开(公告)日：2016-03-17

申请号：US14484018

申请日：2014-09-11

申请人： Varian Semiconductor Equipment Associates, Inc.

发明人： Alexandre Likhanskii ,  Svetlana B. Radovanov

IPC分类号： H01J37/32 ,  H01J37/02

CPC分类号： H01J37/023 ,  H01J37/08 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32174 ,  H01J2237/061 ,  H01J2237/0817

摘要： A plasma chamber having improved plasma density is disclosed. The plasma chamber utilizes internal antennas. These internal antennas can be manipulated in a variety of ways to control the uniformity of the plasma density. In some embodiments, the conductive coil within the antenna is translated from a first location to a second location. For example, the entirety of the internal antennas may be translated within the plasma chamber. In another embodiment, the conductive coil disposed within the outer tube is translated relative to its outer tube. In another embodiment, the conductive coil within the outer tube may be bent and may be rotated within the outer tube. In another embodiment, the outer tube may also be bent and rotated. In other embodiments, ferromagnetic segments may be disposed in the outer tube to focus or block the electromagnetic energy emitted from the conductive coil.

摘要翻译： 公开了一种具有改善的等离子体密度的等离子体室。 等离子体室采用内部天线。 可以以各种方式操纵这些内部天线以控制等离子体密度的均匀性。 在一些实施例中，天线内的导电线圈从第一位置转换到第二位置。 例如，整个内部天线可以在等离子体室内平移。 在另一个实施例中，设置在外管内的导电线圈相对于其外管平移。 在另一个实施例中，外管内的导电线圈可以被弯曲并且可以在外管内旋转。 在另一个实施例中，外管也可以被弯曲和旋转。 在其他实施例中，铁磁段可以设置在外管中以聚焦或阻挡从导电线圈发射的电磁能。

公开(公告)号：US09275823B2

公开(公告)日：2016-03-01

申请号：US13541391

申请日：2012-07-03

申请人： Jorgen Rasmussen ,  Kevin C. Malinak

发明人： Jorgen Rasmussen ,  Kevin C. Malinak

IPC分类号： B44C1/22 ,  H01J37/02 ,  H01J37/16 ,  F16K11/07

CPC分类号： H01J37/3002 ,  B05B1/005 ,  B05B1/30 ,  F16K11/0716 ,  H01J37/02 ,  H01J37/023 ,  H01J37/16 ,  H01J2237/006 ,  H01J2237/317

摘要： A multi-positional valve is used to control the destination of gas flows from multiple gas sources. In one valve position the gases flow to an isolated vacuum system where the flow rate and mixture can be adjusted prior to introduction into a sample vacuum chamber. In another valve position the pre-mixed gases flow from the isolated vacuum chamber and through a needle into the sample vacuum chamber.

摘要翻译： 多位置阀用于控制来自多个气源的气流的目的地。 在一个阀位置，气体流到隔离的真空系统，其中可以在引入样品真空室之前调节流速和混合物。 在另一个阀门位置，预混合气体从隔离的真空室流出并通过针头进入样品真空室。

公开(公告)号：US09245708B2

公开(公告)日：2016-01-26

申请号：US14618644

申请日：2015-02-10

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Yu-Chi Che

IPC分类号： G21K5/04 ,  H01J37/02 ,  G06F17/50 ,  H01J37/317 ,  H01J37/147

CPC分类号： H01J37/1472 ,  G06F17/5081 ,  H01J37/023 ,  H01J37/3174 ,  H01J2237/30455 ,  H01J2237/3174 ,  H01J2237/3175 ,  H01J2237/31762 ,  H01J2237/31774 ,  H01J2237/31789

摘要： A system using an energy beam to expose patterns on a wafer includes first mirror elements, a multiplexer element, and second mirror elements. The first and second mirror elements are dynamically controlled to reflect the energy beam to the wafer. The first mirror elements are configured in a first chain having a first data input and a first data output. The multiplexer element includes a second data input, a third data input, a select input, and a second data output. The third data input is coupled to the first data output. The second mirror elements are configured in a second chain having a fourth data input.

公开(公告)号：US09134261B2

公开(公告)日：2015-09-15

申请号：US14257071

申请日：2014-04-21

申请人： EBARA CORPORATION

发明人： Shoji Yoshikawa ,  Kiwamu Tsukamoto ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Tsutomu Karimata

IPC分类号： H01J37/26 ,  G01N23/22 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/285 ,  G01N21/95

CPC分类号： H01J37/023 ,  G01N21/9501 ,  G01N23/2204 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/022 ,  H01J2237/0264 ,  H01J2237/1501 ,  H01J2237/166 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/26

摘要： An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held on a movable stage in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The inspection apparatus further includes: a linear motor that drives the movable stage; and a Helmholtz coil that causes a magnetic field for canceling a magnetic field caused by the linear motor when the movable stage is driven.

摘要翻译： 提供了能够有助于降低设备成本的检查装置。 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 将光束引导到保持在工作室中的可移动台上的检查对象中并用该束照射检查对象的主光学系统; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 检查装置还包括：驱动可动台的直线电机; 以及亥姆霍兹线圈，其在驱动可动载物台时引起磁场消除由线性马达引起的磁场。

公开(公告)号：US08658974B2

公开(公告)日：2014-02-25

申请号：US13328745

申请日：2011-12-16

申请人： Bart Buijsse

发明人： Bart Buijsse

IPC分类号： G01N5/00

CPC分类号： H01J37/023 ,  H01J37/16 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2608 ,  H01J2237/31749

摘要： The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.

摘要翻译： 本发明涉及一种用于例如环境的环境细胞。 电子显微镜。 环境细胞显示用于将由电子显微镜产生的光束传递到放置在环境细胞内的样品（6）的孔（15）。 根据本发明的环境电池的特征在于，环境电池（14）的一部分对于二次辐射如背散电子或X射线是透明的。 这使得能够通过放置在环境单元外部的检测器来检测该辐射，从而使得单元的结构更简单。