公开(公告)号：US09406480B2

公开(公告)日：2016-08-02

申请号：US14596447

申请日：2015-01-14

Applicant: EBARA CORPORATION

Inventor： Nobuharu Noji ,  Tohru Satake ,  Hirosi Sobukawa ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Kenichi Suematsu ,  Yutaka Tabe ,  Ryo Tajima ,  Keiichi Tohyama

IPC: H01J37/28 ,  G01N23/22 ,  G01N23/225 ,  H01J37/20 ,  H01J37/05 ,  H01L21/683

CPC classification number: H01J37/20 ,  G01N23/2204 ,  G01N23/225 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/202 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2801 ,  H01J2237/2817 ,  H01L21/6833 ,  H01L2223/54466

Abstract: A substrate is irradiated by primary electrons and secondary electrons generated from the substrate are detected by a detector. A reference die is placed on the stage to obtain a pattern matching template image including feature coordinates of the reference die. A pattern matching is performed with an arbitrary die in a row or column including the reference die using the template image to obtain feature coordinates of the arbitrary die. An angle of misalignment is calculated between the direction of the row or column including the reference die and one of the directions of movement of the substrate on the basis of the feature coordinates of the arbitrary die and those of the reference die. The stage is rotated to correct the angle of misalignment to conform the direction of the row or column including the reference die with the one of the directions of movement of the substrate.

公开(公告)号：US09387454B2

公开(公告)日：2016-07-12

申请号：US13434701

申请日：2012-03-29

Applicant: Marshall Medoff

Inventor： Marshall Medoff

IPC: B01J19/12 ,  B01J19/10 ,  H01J37/04 ,  H01J37/05 ,  B01J19/08 ,  C10L9/00 ,  C10L5/44

CPC classification number: B01J19/081 ,  B01J19/085 ,  B01J19/10 ,  B01J19/12 ,  B01J2219/0879 ,  B01J2219/12 ,  C10L1/02 ,  C10L5/44 ,  C10L9/00 ,  C10L2200/0469 ,  C10L2290/26 ,  C10L2290/36 ,  C12P3/00 ,  C12P7/02 ,  H01J37/04 ,  H01J37/05 ,  Y02E50/30

Abstract: Materials such as biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) and hydrocarbon-containing materials are processed to produce useful products, such as fuels. For example, systems are described that can use feedstock materials, such as cellulosic and/or lignocellulosic materials and/or starchy materials, or oil sands, oil shale, tar sands, bitumen, and coal to produce altered materials such as fuels (e.g., ethanol and/or butanol). The processing includes exposing the materials to an ion beam.

Abstract translation: 诸如生物质（例如，植物生物量，动物生物质和城市废物生物质）和含烃材料的材料被加工以产生有用的产品，例如燃料。 例如，描述了可以使用诸如纤维素和/或木质纤维素材料和/或淀粉质材料或油砂，油页岩，焦油砂，沥青和煤的原料的材料来生产改变的材料例如燃料（例如， 乙醇和/或丁醇）。 该处理包括将材料暴露于离子束。

公开(公告)号：US20160189912A1

公开(公告)日：2016-06-30

申请号：US14978089

申请日：2015-12-22

Applicant: Axcelis Technologies, Inc.

Inventor： Edward C. Eisner ,  Bo H. Vanderberg

IPC: H01J37/12 ,  H01J37/20 ,  H01J37/05 ,  H01J37/30 ,  H01J37/147

CPC classification number: H01J37/12 ,  H01J37/05 ,  H01J37/1472 ,  H01J37/20 ,  H01J37/30 ,  H01J37/3171 ,  H01J2237/31705

Abstract: A system and method are provided for implanting ions at low energies into a workpiece. An ion source configured to generate an ion beam is provided, wherein a mass resolving magnet is configured to mass resolve the ion beam. The ion beam may be a ribbon beam or a scanned spot ion beam. A mass resolving aperture positioned downstream of the mass resolving magnet filters undesirable species from the ion beam. A combined electrostatic lens system is positioned downstream of the mass analyzer, wherein a path of the ion beam is deflected and contaminants are generally filtered out of the ion beam, while concurrently decelerating and parallelizing the ion beam. A workpiece scanning system is further positioned downstream of the combined electrostatic lens system, and is configured to selectively translate a workpiece in one or more directions through the ion beam, therein implanting ions into the workpiece.

Abstract translation: 提供了一种用于将低能量离子注入工件的系统和方法。 提供了一种被配置为产生离子束的离子源，其中质量分辨磁体构造成质量分辨离子束。 离子束可以是带状束或扫描的点离子束。 位于质量分辨磁体下游的质量分辨孔径从离子束过滤不期望的物质。 组合的静电透镜系统位于质量分析器的下游，其中离子束的路径被偏转并且污染物通常从离子束过滤掉，同时使离子束同时减速和平行化。 工件扫描系统还位于组合的静电透镜系统的下游，并且被配置为在一个或多个方向上选择性地平移通过离子束的工件，其中将离子注入到工件中。

公开(公告)号：US20160111247A1

公开(公告)日：2016-04-21

申请号：US14884520

申请日：2015-10-15

Applicant: FEI Company

Inventor： Pavel Potocek ,  Franciscus Martinus Henricus Maria van Laarhoven ,  Faysal Boughorbel ,  Remco Schoenmakers ,  Peter Christiaan Tiemeijer

IPC: H01J37/21 ,  H01J37/05 ,  H01J37/28

CPC classification number: H01J37/21 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/216 ,  H01J2237/2802

Abstract: A Charged Particle Microscope, comprising: includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; and A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation. The illuminator includes: An aperture plate comprising an aperture region in a path of said beam, for defining a geometry of the beam prior to its impingement upon said specimen. The aperture region includes a distribution of multiple holes, each of which is smaller than a diameter of the beam incident on the aperture plate.

Abstract translation: 带电粒子显微镜，包括：包括用于保持样本的样本保持器; 用于生产带电粒子束的源头; 用于引导所述光束以照射所述样本的照明器; 和A检测器，用于响应于所述照射来检测从样品发出的辐射通量。 照明器包括：孔板，其包括在所述梁的路径中的孔区域，用于在其撞击到所述样本之前限定所述梁的几何形状。 开口区域包括多个孔的分布，每个孔小于入射在孔板上的束的直径。

公开(公告)号：US09315798B2

公开(公告)日：2016-04-19

申请号：US14238774

申请日：2012-08-22

Applicant: Joseph Khoury ,  Laurence B. Tarrant ,  Sean R. Kirkpatrick ,  Richard C. Svrluga

Inventor： Joseph Khoury ,  Laurence B. Tarrant ,  Sean R. Kirkpatrick ,  Richard C. Svrluga

IPC: A61F2/02 ,  H01J37/317 ,  H01J37/05 ,  A61L27/14 ,  C12N13/00 ,  A61L27/06 ,  A61L27/16 ,  A61L27/38 ,  A61L27/50

CPC classification number: A61L27/38 ,  A61L27/06 ,  A61L27/16 ,  A61L27/18 ,  A61L27/50 ,  A61L2300/64 ,  A61L2400/18 ,  C12N13/00 ,  C08L27/18

Abstract: A method for improving bioactivity of a surface of an implantable object comprising titania, titanium, an alloy of titanium, and/or polytetrafluoroethylene (PTFE) and implantable objects prepared thereby provides forming an accelerated neutral beam derived from an accelerated gas-cluster ion-beam (GCIB) in a reduced-pressure chamber, introducing an implantable object into the reduced-pressure chamber, and irradiating at least a first portion of the surface of said implantable object with a GCIB-derived neutral beam.

Abstract translation: 包括二氧化钛，钛，钛合金和/或聚四氟乙烯（PTFE）的可植入物体的表面的生物活性的改善方法和由此制备的可植入物体形成加速的中性束，其由加速的气体 - 团簇离子束 （GCIB）在减压室中，将可植入物体引入减压室中，以及用GCIB衍生的中性光束照射所述可植入物体的表面的至少第一部分。

公开(公告)号：US09305745B2

公开(公告)日：2016-04-05

申请号：US14379733

申请日：2013-02-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Wataru Mori ,  Hiroyuki Ito ,  Yuko Sasaki ,  Hiromi Inada

IPC: H01J37/00 ,  H01J37/28 ,  H01J37/05 ,  H01J37/244 ,  H01J37/09

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: The purpose of the present invention is to provide a scanning electron microscope that achieves an increase in both resolution and pattern recognition capability. In order to achieve the purpose, the present invention proposes a scanning electron microscope provided with a monochromator that makes an electron beam monochromatic, the monochromator including a magnetic field generator that deflects the electron beam, and an energy selection aperture that passes a part of the electron beam deflected by the magnetic field generator. An aperture that passes some of electrons emitted from the sample and a detector that detects the electrons that have passed through the aperture are disposed on a trajectory to which the electrons emitted from the sample are deflected by a magnetic field generated by the magnetic field generator.

Abstract translation: 本发明的目的是提供一种扫描电子显微镜，其实现分辨率和图案识别能力的增加。 为了实现该目的，本发明提出了一种具有单色仪的扫描电子显微镜，其使电子束单色，单色器包括使电子束偏转的磁场发生器，以及通过一部分能量选择孔 由磁场发生器偏转的电子束。 通过从样品发射的一些电子的孔和检测已经通过孔的电子的检测器设置在由样品发射的电子被磁场发生器产生的磁场偏转的轨迹上。

公开(公告)号：US20160071683A1

公开(公告)日：2016-03-10

申请号：US14823222

申请日：2015-08-11

Applicant: JEOL Ltd.

Inventor： Masaki Mukai

IPC: H01J37/05 ,  H01J37/12 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/265 ,  H01J2237/057

Abstract: An electron microscope is offered which can adjust an energy-selecting slit in a short time by smoothly moving the slit. The electron microscope (100) includes an electron beam source (10) emitting an electron beam (EB), an energy filter (22) producing a deflecting field in the path of the electron beam (EB) to disperse the beam (EB) according to energy, a slit plate (24) disposed on an energy dispersive plane and provided with at least one energy-selecting slit (25), a current measuring section (50) for measuring the electrical current of the beam (EB) absorbed into the slit plate (24), and an energy filter controller (60) for controlling the intensity of the deflecting field of the energy filter (22) on the basis of results of measurements made by the current measuring section (50).

Abstract translation: 提供一种电子显微镜，其可以通过平滑地移动狭缝来在短时间内调节能量选择缝。 电子显微镜（100）包括发射电子束（EB）的电子束源（10），在电子束（EB）的路径中产生偏转场的能量过滤器（22），以使光束（EB）分散 设置在能量分散平面上并且设置有至少一个能量选择狭缝（25）的狭缝板（24），用于测量吸收到所述光束中的所述光束（EB）的电流的电流测量部分（50） 狭缝板（24）和能量过滤器控制器（60），用于根据由电流测量部件（50）进行的测量结果控制能量过滤器（22）的偏转场强度。

公开(公告)号：US20160035533A1

公开(公告)日：2016-02-04

申请号：US14800098

申请日：2015-07-15

Applicant: Hermes Microvision Inc.

Inventor： Weiming Ren ,  Joe Wang ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/05 ,  H01J37/28 ,  H01J37/10

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.

Abstract translation: 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。

公开(公告)号：US20160027607A1

公开(公告)日：2016-01-28

申请号：US14804148

申请日：2015-07-20

Applicant: FEI Company

Inventor： Anthony Graupera ,  Charles Otis

IPC: H01J37/05 ,  H01J37/317 ,  H01J37/08

CPC classification number: H01J37/05 ,  H01J37/08 ,  H01J37/317 ,  H01J2237/006 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/08 ,  H01J2237/0817 ,  H01J2237/0827 ,  H01J2237/303 ,  H01J2237/31749

Abstract: An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species and rapid changing from one species to another.

公开(公告)号：US09123522B2

公开(公告)日：2015-09-01

申请号：US14357139

申请日：2012-11-02

Applicant: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT CO.,LTD.

Inventor： Libo Peng ,  Huiyue Long ,  Junyu Xie

IPC: H01J49/30 ,  H01J37/05 ,  H01J37/317

CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057

Abstract: A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprises an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1) and the lower magnetic pole (2) are both provided with a camber-shaped incident-end boundary (101) and a camber-shaped emergence side boundary (102). The camber radii (Rb) of the incident-end boundary (101) and of the emergence-end boundary (102) are equal to the deflection radius (R) of the required ions in the magnetic field. The required ions in the broadband ion beam are allowed to focus ideally at the mid-section of the magnetic field, to acquire an ideal focal spot having a size that equals to zero. This allows for acquisition of the optimal resolution by selecting an appropriate width for a minimal analysis gap (701), thus implementing complete isolation of the required ions from other ions in the broadband ion beam.

Abstract translation: 用于从宽带离子束分离所需离子的宽带离子束分析仪包括上磁极（1），下磁极（2），上激励线圈（3），下激励线圈（4） 分析光栅（7）和磁轭（5和6）。 上磁极（1）和下磁极（2）均设有弧形入射端边界（101）和弧形出射边界（102）。 入射端边界（101）和出射端边界（102）的弧度半径（Rb）等于磁场中所需离子的偏转半径（R）。 允许宽带离子束中所需的离子理想地聚焦在磁场的中间部分，以获得具有等于零的大小的理想焦斑。 这允许通过为最小分析间隙选择适当的宽度来获取最佳分辨率（701），从而实现所需离子与宽带离子束中的其它离子的完全隔离。