公开(公告)号：US09123522B2

公开(公告)日：2015-09-01

申请号：US14357139

申请日：2012-11-02

Applicant: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT CO.,LTD.

Inventor： Libo Peng ,  Huiyue Long ,  Junyu Xie

IPC: H01J49/30 ,  H01J37/05 ,  H01J37/317

CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057

Abstract: A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprises an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1) and the lower magnetic pole (2) are both provided with a camber-shaped incident-end boundary (101) and a camber-shaped emergence side boundary (102). The camber radii (Rb) of the incident-end boundary (101) and of the emergence-end boundary (102) are equal to the deflection radius (R) of the required ions in the magnetic field. The required ions in the broadband ion beam are allowed to focus ideally at the mid-section of the magnetic field, to acquire an ideal focal spot having a size that equals to zero. This allows for acquisition of the optimal resolution by selecting an appropriate width for a minimal analysis gap (701), thus implementing complete isolation of the required ions from other ions in the broadband ion beam.

Abstract translation: 用于从宽带离子束分离所需离子的宽带离子束分析仪包括上磁极（1），下磁极（2），上激励线圈（3），下激励线圈（4） 分析光栅（7）和磁轭（5和6）。 上磁极（1）和下磁极（2）均设有弧形入射端边界（101）和弧形出射边界（102）。 入射端边界（101）和出射端边界（102）的弧度半径（Rb）等于磁场中所需离子的偏转半径（R）。 允许宽带离子束中所需的离子理想地聚焦在磁场的中间部分，以获得具有等于零的大小的理想焦斑。 这允许通过为最小分析间隙选择适当的宽度来获取最佳分辨率（701），从而实现所需离子与宽带离子束中的其它离子的完全隔离。

公开(公告)号：US20140312223A1

公开(公告)日：2014-10-23

申请号：US14357139

申请日：2012-11-02

Applicant: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT CO., LTD

Inventor： Libo Peng ,  Huiyue Long ,  Junyu Xie

IPC: H01J49/30

CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057

Abstract: A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprises an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1) and the lower magnetic pole (2) are both provided with a camber-shaped incident-end boundary (101) and a camber-shaped emergence side boundary (102). The camber radii (Rb) of the incident-end boundary (101) and of the emergence-end boundary (102) are equal to the deflection radius (R) of the required ions in the magnetic field. The required ions in the broadband ion beam are allowed to focus ideally at the mid-section of the magnetic field, to acquire an ideal focal spot having a size that equals to zero. This allows for acquisition of the optimal resolution by selecting an appropriate width for a minimal analysis gap (701), thus implementing complete isolation of the required ions from other ions in the broadband ion beam.

Abstract translation: 用于从宽带离子束分离所需离子的宽带离子束分析仪包括上磁极（1），下磁极（2），上激励线圈（3），下激励线圈（4） 分析光栅（7）和磁轭（5和6）。 上磁极（1）和下磁极（2）均设有弧形入射端边界（101）和弧形出射边界（102）。 入射端边界（101）和出射端边界（102）的弧度半径（Rb）等于磁场中所需离子的偏转半径（R）。 允许宽带离子束中所需的离子理想地聚焦在磁场的中间部分，以获得具有等于零的大小的理想焦斑。 这允许通过为最小分析间隙选择适当的宽度来获取最佳分辨率（701），从而实现所需离子与宽带离子束中的其它离子的完全隔离。