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    Apparatus and method to control ion beam current
    92.
    发明授权
    Apparatus and method to control ion beam current 有权
    控制离子束电流的装置和方法

    公开(公告)号：US09396903B1

    公开(公告)日：2016-07-19

    申请号：US14615602

    申请日：2015-02-06

    Applicant: Varian Semiconductor Equipment Associates, Inc.

    Inventor： Shengwu Chang ,  Kristen S. Rounds ,  William Leavitt ,  Michael St. Peter

    IPC: C23C14/48 ,  G21K1/08 ,  H01J37/317 ,  H01J37/08 ,  H01J37/10

    CPC classification number: H01J37/08 ,  H01J37/3171 ,  H01J2237/024 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/04924

    Abstract: An apparatus to control an ion beam for treating a substrate. The apparatus may include a fixed electrode configured to conduct the ion beam through a fixed electrode aperture and to apply a fixed electrode potential to the ion beam, a ground electrode assembly disposed downstream of the fixed electrode. The ground electrode assembly may include a base and a ground electrode disposed adjacent the fixed electrode and configured to conduct the ion beam through a ground electrode aperture, the ground electrode being reversibly movable along a first axis with respect to the fixed electrode between a first position and a second position, wherein a beam current of the ion beam at the substrate varies when the ground electrode moves between the first position and second position.

    Abstract translation: 控制用于处理基板的离子束的装置。 该装置可以包括固定电极，其被配置为使离子束通过固定电极孔并且将固定电极电位施加到离子束，设置在固定电极下游的接地电极组件。 接地电极组件可以包括基部和邻近固定电极设置的接地电极，并且被配置为使离子束通过接地电极孔，接地电极可相对于固定电极的第一轴线在第一位置 以及第二位置，其中当所述接地电极在所述第一位置和所述第二位置之间移动时，所述衬底处的离子束的束电流变化。

    Integrated extraction electrode manipulator for ion source
    93.
    发明授权
    Integrated extraction electrode manipulator for ion source 有权
    用于离子源的集成提取电极操纵器

    公开(公告)号：US09318302B1

    公开(公告)日：2016-04-19

    申请号：US14674694

    申请日：2015-03-31

    Applicant: Axcelis Technologies, Inc.

    Inventor： Bo Vanderberg ,  Joseph Valinski ,  Michael Cristoforo

    IPC: H01J27/02 ,  H01J37/08 ,  H01J37/30 ,  H01J37/317

    CPC classification number: H01J37/3171 ,  H01J27/024 ,  H01J37/08 ,  H01J2237/024 ,  H01J2237/061

    Abstract: A modular ion source and extraction apparatus comprises an ion source chamber selectively electrically coupled to a voltage potential, wherein the ion source chamber comprises an extraction aperture. An extraction electrode is positioned proximate to the extraction aperture of the ion source chamber, wherein the extraction electrode is electrically grounded and configured to extract ions from the ion source chamber. One or more linkages operably couple to the ion source chamber, and one or more insulators couple the extraction electrode to the respective one or more linkages, wherein the one or more insulators electrically insulate the respective one or more linkages from the extraction electrode, therein electrically insulating the extraction electrode from the ion source chamber. One or more actuators operably couple the one or more linkages to the ion source chamber, wherein the one or more actuators are configured to translate the one or more linkages with respect to the ion source chamber, therein translating the extraction electrode in one or more axes.

    Abstract translation: 模块化离子源和提取装置包括选择性地电耦合到电压电位的离子源室，其中离子源室包括提取孔。 提取电极位于靠近离子源室的提取孔的位置，其中提取电极被电接地并被配置为从离子源室提取离子。 一个或多个键可操作地耦合到离子源室，并且一个或多个绝缘体将引出电极耦合到相应的一个或多个键，其中一个或多个绝缘体将相应的一个或多个键与引出电极电绝缘，其中电 将引出电极与离子源室绝缘。 一个或多个致动器可操作地将所述一个或多个连杆耦合到所述离子源室，其中所述一个或多个致动器被配置成相对于所述离子源室平移所述一个或多个连杆，其中在所述离心源室中平移所述引出电极 。

    MULTI-ELECTRODE STACK ARRANGEMENT
    95.
    发明申请
    MULTI-ELECTRODE STACK ARRANGEMENT 有权
    多电极堆栈布置

    公开(公告)号：US20150137010A1

    公开(公告)日：2015-05-21

    申请号：US14541238

    申请日：2014-11-14

    Applicant: MAPPER LITHOGRAPHY IP B.V.

    Inventor： Willem Henk URBANUS ,  Marco Jan-Jaco WIELAND

    IPC: H01J37/02 ,  H01J37/317 ,  H01J37/30 ,  H01J37/16

    CPC classification number: G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

    Abstract: The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.

    Abstract translation: 本发明涉及一种电极堆叠（70），其包括用于沿光轴（A）操纵带电粒子束的堆叠电极（71-80）。 每个电极包括具有用于带电粒子束的孔的电极体。 电极体相互间隔开，并且电极孔沿光轴同轴对准。 电极堆叠包括在每对相邻电极之间的电绝缘间隔结构（89），用于将电极（71-80）沿着轴向方向（Z）定位在预定的相互距离处。 第一电极和第二电极各自包括具有一个或多个支撑部分（86）的电极主体，其中每个支撑部分构造成容纳至少一个间隔结构（89）。 电极堆叠具有至少一个构造成将第一和第二电极的支撑部分（86）以及中间间隔结构（89）保持在一起的夹紧构件（91-91c）。

    MULTI-ELECTRODE COOLING ARRANGEMENT
    96.
    发明申请
    MULTI-ELECTRODE COOLING ARRANGEMENT 有权
    多电极冷却装置

    公开(公告)号：US20150137009A1

    公开(公告)日：2015-05-21

    申请号：US14541236

    申请日：2014-11-14

    Applicant: MAPPER LITHOGRAPHY IP B.V.

    Inventor： Willem Henk URBANUS ,  Marco Jan-Jaco WIELAND

    IPC: H01J37/30 ,  H01J37/24 ,  H01J37/317

    CPC classification number: G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

    Abstract: The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape.The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.

    Abstract translation: 本发明涉及一种准直器电极，包括设置有中心电极孔（82）的电极体（81），其中电极体限定两个相对的主表面之间的电极高度，并且其中电极体容纳冷却导管 （105），用于传送冷却液（102）。 电极体优选具有盘状或扁圆形状。 本发明还涉及一种用于带电粒子束发生器的准直器电极叠层，其包括第一准直器电极和第二准直器电极，每个准直器电极和第二准直器电极都设置有用于传送冷却液体（102）的冷却导管（105） 连接导管（110）用于第一和第二准直仪电极的冷却管道之间的液体连接。

    ARC CHAMBER WITH MULTIPLE CATHODES FOR AN ION SOURCE
    97.
    发明申请
    ARC CHAMBER WITH MULTIPLE CATHODES FOR AN ION SOURCE 审中-公开
    具有多个阴极的电弧室用于离子源

    公开(公告)号：US20150130353A1

    公开(公告)日：2015-05-14

    申请号：US14578575

    申请日：2014-12-22

    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

    Inventor： Chin-Tsung LIN ,  Hsiao-Yin HSIEH ,  Chi-Hao HUANG ,  Hong-Shing CHOU ,  Yeh-Chieh WANG

    IPC: H01J37/08 ,  H01J37/244 ,  H01J37/317

    CPC classification number: H01J37/08 ,  H01J37/244 ,  H01J37/3171 ,  H01J2237/0203 ,  H01J2237/024 ,  H01J2237/026 ,  H01J2237/08 ,  H01J2237/303 ,  H01J2237/30405

    Abstract: An apparatus for extending the useful life of an ion source, comprising an arc chamber containing a plurality of cathodes to be used sequentially and a plurality of repellers to protect cathodes when not in use. The arc chamber includes an arc chamber housing defining a reaction cavity, gas injection openings, a plurality of cathodes, and at least one repeller element. A method for extending the useful life of an ion source includes providing power to a first cathode of an arc chamber in an ion source, operating the first cathode, detecting a failure or degradation in performance of the first cathode, energizing a second cathode, and continuing operation of the arc chamber with the second cathode.

    Abstract translation: 一种用于延长离子源的使用寿命的装置，包括电弧室，其包含要顺序使用的多个阴极，以及多个防水剂，以在不使用时保护阴极。 电弧室包括限定反应腔的电弧室壳体，气体注入开口，多个阴极和至少一个排斥元件。 用于延长离子源的使用寿命的方法包括向离子源中的电弧室的第一阴极提供电力，操作第一阴极，检测第一阴极的故障或性能下降，激励第二阴极，以及 与第二阴极连续操作电弧室。

    SUBSTRATE PROCESSING APPARATUS
    98.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 审中-公开
    基板加工设备

    公开(公告)号：US20140352890A1

    公开(公告)日：2014-12-04

    申请号：US14462657

    申请日：2014-08-19

    Applicant: Tokyo Electron Limited

    Inventor： Daisuke Hayashi

    IPC: H01J37/32 ,  H01L21/67

    CPC classification number: H01J37/32568 ,  H01J37/32018 ,  H01J37/32458 ,  H01J37/32577 ,  H01J37/32908 ,  H01J2237/024 ,  H01J2237/1502 ,  H01J2237/327 ,  H01J2237/334 ,  H01L21/67069

    Abstract: A substrate processing apparatus includes: a cylindrical shaped chamber configured to accommodate a substrate; a movable electrode capable of moving along a central axis of the cylindrical shaped chamber within the cylindrical shaped chamber; a facing electrode facing the movable electrode within the cylindrical shaped chamber; and an expansible/contractible partition wall connecting the movable electrode with an end wall on one side of the cylindrical shaped chamber. A high frequency power is applied to a first space between the movable electrode and the facing electrode, a processing gas is introduced thereto, and the movable electrode is not in contact with a sidewall of the cylindrical shaped chamber, a first dielectric member is provided at the cylindrical shaped chamber's sidewall facing the movable electrode, and an overlap area between the first dielectric member and a side surface of the movable electrode is changed according to movement of the movable electrode.

    Abstract translation: 一种基板处理装置，包括：圆筒形室，其构造成容纳基板; 可移动电极，其能够沿着圆柱形腔室的中心轴线移动; 在圆柱形腔室内面向可动电极的面对电极; 以及将可动电极与圆筒形室的一侧上的端壁连接的可膨胀/收缩的分隔壁。 高频功率被施加到可动电极和面对电极之间的第一空间，处理气体被引入其中，可动电极不与圆柱形腔室的侧壁接触，第一介电构件设置在 圆筒形腔的侧壁面向可动电极，第一电介质构件与可动电极的侧面之间的重叠区域根据活动电极的移动而改变。

    Charged particle beam device and sample observation method using a rotating detector
    99.
    发明授权
    Charged particle beam device and sample observation method using a rotating detector 有权
    使用旋转探测器的带电粒子束装置和样品观察方法

    公开(公告)号：US08791413B2

    公开(公告)日：2014-07-29

    申请号：US13817644

    申请日：2011-08-02

    Applicant: Shinya Kitayama ,  Wataru Suzuki ,  Satoshi Tomimatsu

    Inventor： Shinya Kitayama ,  Wataru Suzuki ,  Satoshi Tomimatsu

    IPC: G01N23/00

    CPC classification number: H01J37/261 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/184 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: Provided is a charged particle beam device that outputs both an ion beam and an electron beam at a sample, has a common detector for both the ion beam and the electron beam in the charged particle beam device that processes and observes the sample, and is able to provide a detection unit to an appropriate position corresponding to the process details and observation technique of the sample. Provided are an electron beam optical column in which an electron beam for observing the observation surface of a sample is generated, an ion beam optical column in which an ion beam that processes the sample is generated, a detection device that detects a secondary signal generated from the sample or transmitted electrons, and a sample stage that is capable of mounting the detection device thereon; is rotatable in a horizontal plane that includes the optical axis of the electron beam and the optical axis of the ion beam about a cross point where both optical axes intersect; and is able to change the distance between the observation surface of the sample and the cross point.

    Abstract translation: 提供了一种在样品输出离子束和电子束的带电粒子束装置，在处理和观察样品的带电粒子束装置中具有用于离子束和电子束两者的公共检测器，并且能够 以将检测单元提供到对应于样品的处理细节和观察技术的适当位置。 提供了一种电子束光学柱，其中产生用于观察样品观察表面的电子束，产生处理样品的离子束的离子束光学柱，检测装置，其检测从 样品或透射电子，以及能够在其上安装检测装置的样品台; 可以在包括电子束的光轴和离子束的光轴的水平面中绕两个光轴相交的交叉点旋转; 并且能够改变样品的观察表面与交叉点之间的距离。

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