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7 条记录 (耗时 0.016 秒)

    MULTI-ELECTRODE STACK ARRANGEMENT
    2.
    发明申请
    MULTI-ELECTRODE STACK ARRANGEMENT 有权
    多电极堆栈布置

    公开(公告)号：US20150137010A1

    公开(公告)日：2015-05-21

    申请号：US14541238

    申请日：2014-11-14

    申请人： MAPPER LITHOGRAPHY IP B.V.

    发明人： Willem Henk URBANUS ,  Marco Jan-Jaco WIELAND

    IPC分类号： H01J37/02 ,  H01J37/317 ,  H01J37/30 ,  H01J37/16

    CPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

    摘要： The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.

    摘要翻译： 本发明涉及一种电极堆叠（70），其包括用于沿光轴（A）操纵带电粒子束的堆叠电极（71-80）。 每个电极包括具有用于带电粒子束的孔的电极体。 电极体相互间隔开，并且电极孔沿光轴同轴对准。 电极堆叠包括在每对相邻电极之间的电绝缘间隔结构（89），用于将电极（71-80）沿着轴向方向（Z）定位在预定的相互距离处。 第一电极和第二电极各自包括具有一个或多个支撑部分（86）的电极主体，其中每个支撑部分构造成容纳至少一个间隔结构（89）。 电极堆叠具有至少一个构造成将第一和第二电极的支撑部分（86）以及中间间隔结构（89）保持在一起的夹紧构件（91-91c）。

    MULTI-ELECTRODE COOLING ARRANGEMENT
    3.
    发明申请
    MULTI-ELECTRODE COOLING ARRANGEMENT 有权
    多电极冷却装置

    公开(公告)号：US20150137009A1

    公开(公告)日：2015-05-21

    申请号：US14541236

    申请日：2014-11-14

    申请人： MAPPER LITHOGRAPHY IP B.V.

    发明人： Willem Henk URBANUS ,  Marco Jan-Jaco WIELAND

    IPC分类号： H01J37/30 ,  H01J37/24 ,  H01J37/317

    CPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

    摘要： The invention relates to a collimator electrode, comprising an electrode body (81) that is provided with a central electrode aperture (82), wherein the electrode body defines an electrode height between two opposite main surfaces, and wherein the electrode body accommodates a cooling conduit (105) inside the electrode body for transferring a cooling liquid (102). The electrode body preferably has a disk shape or an oblate ring shape.The invention further relates to a collimator electrode stack for use in a charged particle beam generator, comprising a first collimator electrode and a second collimator electrode that are each provided with a cooling conduit (105) for transferring the cooling liquid (102), and a connecting conduit (110) for a liquid connection between the cooling conduits of the first and second collimator electrodes.

    摘要翻译： 本发明涉及一种准直器电极，包括设置有中心电极孔（82）的电极体（81），其中电极体限定两个相对的主表面之间的电极高度，并且其中电极体容纳冷却导管 （105），用于传送冷却液（102）。 电极体优选具有盘状或扁圆形状。 本发明还涉及一种用于带电粒子束发生器的准直器电极叠层，其包括第一准直器电极和第二准直器电极，每个准直器电极和第二准直器电极都设置有用于传送冷却液体（102）的冷却导管（105） 连接导管（110）用于第一和第二准直仪电极的冷却管道之间的液体连接。

    MULTI-ELECTRODE ELECTRON OPTICS
    5.
    发明申请
    MULTI-ELECTRODE ELECTRON OPTICS 有权
    多电极电子光学

    公开(公告)号：US20150136995A1

    公开(公告)日：2015-05-21

    申请号：US14541233

    申请日：2014-11-14

    申请人： MAPPER LITHOGRAPHY IP B.V.

    发明人： Marco Jan-Jaco WIELAND ,  Willem Henk URBANUS

    IPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/30

    CPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

    摘要： The invention relates to a collimator electrode stack (70), comprising: at least three collimator electrodes (71-80) for collimating a charged particle beam along an optical axis (A), wherein each collimator electrode comprises an electrode body with an electrode aperture for allowing passage to the charged particle beam, wherein the electrode bodies are spaced along an axial direction (Z) which is substantially parallel with the optical axis, and wherein the electrode apertures are coaxially aligned along the optical axis; and a plurality of spacing structures (89) provided between each pair of adjacent collimator electrodes and made of an electrically insulating material, for positioning the collimator electrodes at predetermined distances along the axial direction. Each of the collimator electrodes (71-80) is electrically connected to a separate voltage output (151-160).The invention further relates to a method of operating a charged particle beam generator.

    摘要翻译： 本发明涉及一种准直电极堆叠（70），包括：用于沿着光轴（A）准直带电粒子束的至少三个准直器电极（71-80），其中每个准直器电极包括具有电极孔 允许通过所述带电粒子束，其中所述电极体沿着与所述光轴基本平行的轴向方向（Z）间隔开，并且其中所述电极孔沿着所述光轴同轴对准; 以及设置在每对相邻的准直器电极之间并由电绝缘材料制成的多个间隔结构（89），用于沿着轴向将准直器电极定位在预定距离。 每个准直器电极（71-80）电连接到单独的电压输出（151-160）。 本发明还涉及一种操作带电粒子束发生器的方法。

    VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
    6.
    发明申请
    VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR 审中-公开

    公开(公告)号：US20170221674A1

    公开(公告)日：2017-08-03

    申请号：US15493159

    申请日：2017-04-21

    申请人： MAPPER LITHOGRAPHY IP B.V.

    发明人： Alexander Hendrik Vincent VAN VEEN ,  Willem Henk URBANUS ,  Marco Jan-Jaco WIELAND

    IPC分类号： H01J37/18 ,  G21K1/02 ,  G21K5/04 ,  H01J37/30

    摘要： The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system comprising a collimator structure with a plurality of collimator electrodes for collimating the charged particle beam, a beam source vacuum chamber comprising the charged particle source, and a generator vacuum chamber comprising the collimator structure and the beam source vacuum chamber within a vacuum, wherein the collimator system is positioned outside the beam source vacuum chamber. Each of the beam source vacuum chamber and the generator vacuum chamber may be provided with a vacuum pump.