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公开(公告)号：US09653260B2
公开(公告)日：2017-05-16
申请号：US13691270
申请日：2012-11-30
Applicant: FEI Company
Inventor： Paul Keady , Brennan Peterson , Guus Das , Craig Henry , Larry Dworkin , Jeff Blackwood , Stacey Stone , Michael Schmidt
IPC: G01N1/32 , H01J37/305 , C23C14/58 , H01J37/28 , H01J37/30
CPC classification number: H01J37/3056 , C23C14/5833 , G01N1/32 , H01J37/20 , H01J37/28 , H01J37/3005 , H01J2237/024 , H01J2237/20207 , H01J2237/31745 , H01J2237/31749
Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.
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公开(公告)号：US10283317B2
公开(公告)日：2019-05-07
申请号：US15595773
申请日：2017-05-15
Applicant: FEI Company
Inventor： Paul Keady , Brennan Peterson , Guus Das , Craig Matthew Henry , Larry Dworkin , Jeff Blackwood , Stacey Stone , Michael Schmidt
Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.
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3.发明申请High Throughput TEM Preparation Processes and Hardware for Backside Thinning of Cross-Sectional View Lamella 有权高通量TEM制备过程和硬件的背面薄化横截面视图薄层公开(公告)号：US20130248354A1
公开(公告)日：2013-09-26
申请号：US13691270
申请日：2012-11-30
Applicant: FEI Company
Inventor： Paul Keady , Brennan Peterson , Guus Das , Craig Henry , Larry Dworkin , Jeff Blackwood , Stacey Stone , Michael Schmidt
IPC: H01J37/305 , H01J37/30
CPC classification number: H01J37/3056 , C23C14/5833 , G01N1/32 , H01J37/20 , H01J37/28 , H01J37/3005 , H01J2237/024 , H01J2237/20207 , H01J2237/31745 , H01J2237/31749
Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.
Abstract translation: 可用于FIB-SEM系统中的TEM样品制备和分析方法，无需重新焊接，卸载，用户处理薄片或电动翻转阶段。 该方法允许使用具有典型倾斜台的双光束FIB-SEM系统将样品从基底提取，将样品安装到能够倾斜的TEM样品保持器上，使用FIB研磨使样品变薄，并旋转样品 使得样品面垂直于用于STEM成像的电子柱。
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4.发明申请公开(公告)号：US20170250055A1
公开(公告)日：2017-08-31
申请号：US15595773
申请日：2017-05-15
Applicant: FEI Company
Inventor： Paul Keady , Brennan Peterson , Guus Das , Craig Matthew Henry , Larry Dworkin , Jeff Blackwood , Stacey Stone , Michael Schmidt
IPC: H01J37/305 , H01J37/20 , H01J37/28
CPC classification number: H01J37/3056 , C23C14/5833 , C23F1/02 , G01N1/32 , H01J37/20 , H01J37/28 , H01J37/3005 , H01J2237/024 , H01J2237/20207 , H01J2237/31745 , H01J2237/31749
Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.
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