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公开(公告)号:CN102576684A
公开(公告)日:2012-07-11
申请号:CN201080045152.3
申请日:2010-10-07
申请人: 日亚化学工业株式会社
发明人: 濑野良太
CPC分类号: H01L24/85 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L25/0753 , H01L33/62 , H01L2224/05616 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/45169 , H01L2224/4809 , H01L2224/48137 , H01L2224/48139 , H01L2224/48465 , H01L2224/48479 , H01L2224/48599 , H01L2224/48669 , H01L2224/48699 , H01L2224/48769 , H01L2224/48869 , H01L2224/4911 , H01L2224/49426 , H01L2224/49429 , H01L2224/78301 , H01L2224/85051 , H01L2224/85181 , H01L2224/85186 , H01L2224/85191 , H01L2224/85203 , H01L2224/85205 , H01L2224/85469 , H01L2924/00014 , H01L2924/12041 , H01L2924/14 , H01L2924/181 , H01L2924/20751 , H01L2924/20753 , H01L2924/20754 , H01L2924/20752 , H01L2224/48471 , H01L2924/00 , H01L2224/4554
摘要: 本发明提供一种半导体装置及其制造方法,该半导体装置具备焊接有多个接合线的半导体元件,且接合线的接合强度高,并能够实现充分的接合可靠性。所述半导体装置,其特征在于,包括:第一接合线,其一端被焊接在电极上,另一端被焊接在所述电极外的第二焊接点;和第二接合线,其一端被焊接在所述电极上的所述第一接合线上,另一端被焊接在所述电极外的第三焊接点。并且,所述第二接合线的所述一端的焊接部,覆盖所述第一接合线的上面及侧面的至少一部分。
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公开(公告)号:CN100386857C
公开(公告)日:2008-05-07
申请号:CN01104679.1
申请日:2001-02-21
申请人: 国际商业机器公司
发明人: 卡洛斯·J·桑布塞蒂 , 丹尼尔·C·艾德尔斯坦 , 约翰·G·高德罗 , 朱迪思·M·鲁宾诺 , 乔治·沃克
CPC分类号: H01L24/48 , C23C18/1608 , C23C18/1651 , C23C18/1831 , C23C18/1844 , C23C18/34 , C23C18/36 , C23C18/54 , H01L23/53238 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/45 , H01L2224/0401 , H01L2224/04042 , H01L2224/04073 , H01L2224/05082 , H01L2224/05147 , H01L2224/05556 , H01L2224/05639 , H01L2224/05644 , H01L2224/05664 , H01L2224/05669 , H01L2224/13099 , H01L2224/13111 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/48639 , H01L2224/48644 , H01L2224/48664 , H01L2224/48669 , H01L2224/48739 , H01L2224/48764 , H01L2224/48769 , H01L2224/48799 , H01L2224/48839 , H01L2224/48844 , H01L2224/48864 , H01L2224/48869 , H01L2224/85205 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01032 , H01L2924/01044 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10253 , H01L2924/10271 , H01L2924/14 , H01L2924/181 , H01L2924/19043 , H05K3/244 , H05K13/06 , Y10S428/926 , Y10S428/936 , Y10T428/12493 , Y10T428/12646 , Y10T428/12674 , Y10T428/12771 , Y10T428/12778 , Y10T428/12875 , Y10T428/12889 , Y10T428/12896 , Y10T428/12903 , Y10T428/1291 , Y10T428/12944 , Y10T428/12986 , H01L2924/00014 , H01L2924/00 , H01L2224/48744 , H01L2924/00015
摘要: 提供一种制备用于电连接的具有优良的扩散阻挡层与附着性能的铜座表面的方法。首先提供经过酸溶液清洁的铜座表面,然后在铜座表面上沉积含磷或含硼合金的保护层,接着在保护层上面沉积稀有金属的附着层。或者,可在化学沉积保护层之前在铜导电表面与保护层之间沉积一层Pd形核层。或者,可通过无电镀Au沉积处理在附着层的上面沉积一层稀有金属层。本发明还公开一种电结构,它包括形成在附着层上并含有同附着层形成整体的电连接即引线键合或钎焊凸块的导电座。
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公开(公告)号:CN1311526A
公开(公告)日:2001-09-05
申请号:CN01104679.1
申请日:2001-02-21
申请人: 国际商业机器公司
发明人: 卡洛斯·J·桑布塞蒂 , 丹尼尔·C·艾德尔斯坦 , 约翰·G·高德罗 , 朱迪思·M·鲁宾诺 , 乔治·沃克
CPC分类号: H01L24/48 , C23C18/1608 , C23C18/1651 , C23C18/1831 , C23C18/1844 , C23C18/34 , C23C18/36 , C23C18/54 , H01L23/53238 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/45 , H01L2224/0401 , H01L2224/04042 , H01L2224/04073 , H01L2224/05082 , H01L2224/05147 , H01L2224/05556 , H01L2224/05639 , H01L2224/05644 , H01L2224/05664 , H01L2224/05669 , H01L2224/13099 , H01L2224/13111 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48463 , H01L2224/48639 , H01L2224/48644 , H01L2224/48664 , H01L2224/48669 , H01L2224/48739 , H01L2224/48764 , H01L2224/48769 , H01L2224/48799 , H01L2224/48839 , H01L2224/48844 , H01L2224/48864 , H01L2224/48869 , H01L2224/85205 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01032 , H01L2924/01044 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10253 , H01L2924/10271 , H01L2924/14 , H01L2924/181 , H01L2924/19043 , H05K3/244 , H05K13/06 , Y10S428/926 , Y10S428/936 , Y10T428/12493 , Y10T428/12646 , Y10T428/12674 , Y10T428/12771 , Y10T428/12778 , Y10T428/12875 , Y10T428/12889 , Y10T428/12896 , Y10T428/12903 , Y10T428/1291 , Y10T428/12944 , Y10T428/12986 , H01L2924/00014 , H01L2924/00 , H01L2224/48744 , H01L2924/00015
摘要: 提供一种制备用于电连接的具有优良的扩散阻挡层与附着性能的铜座表面的方法。首先提供经过酸溶液清洁的铜座表面,然后在铜座表面上沉积含磷或含硼合金的保护层,接着在保护层上面沉积稀有金属的附着层。或者,可在化学沉积保护层之前在铜导电表面与保护层之间沉积一层Pd形核层。或者,可通过无电镀Au沉积处理在附着层的上面沉积一层稀有金属层。本发明还公开一种电结构,它包括形成在附着层上并含有同附着层形成整体的电连接即引线键合或钎焊凸块的导电座。
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公开(公告)号:CN104380460B
公开(公告)日:2017-07-28
申请号:CN201380030921.6
申请日:2013-07-05
申请人: 先端光子公司
IPC分类号: H01L23/13 , H01L21/60 , H01L23/31 , H01L23/498 , H01L21/56 , H01L25/03 , H01L25/065
CPC分类号: H01L24/17 , H01L21/561 , H01L23/13 , H01L23/3114 , H01L23/3121 , H01L23/3135 , H01L23/49805 , H01L24/05 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/85 , H01L25/03 , H01L25/0655 , H01L25/0657 , H01L2224/03334 , H01L2224/0401 , H01L2224/04042 , H01L2224/05552 , H01L2224/05644 , H01L2224/05647 , H01L2224/05669 , H01L2224/06155 , H01L2224/13144 , H01L2224/16105 , H01L2224/16108 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/1714 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/45169 , H01L2224/48091 , H01L2224/48137 , H01L2224/48157 , H01L2224/48227 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48496 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/48666 , H01L2224/48669 , H01L2224/48739 , H01L2224/48744 , H01L2224/48747 , H01L2224/48755 , H01L2224/48764 , H01L2224/48766 , H01L2224/48769 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/48866 , H01L2224/48869 , H01L2224/48997 , H01L2224/4911 , H01L2224/49175 , H01L2224/73207 , H01L2224/73265 , H01L2224/81193 , H01L2224/85395 , H01L2224/85439 , H01L2224/85444 , H01L2224/85447 , H01L2224/85455 , H01L2224/85464 , H01L2224/85466 , H01L2224/8592 , H01L2224/94 , H01L2224/97 , H01L2225/0651 , H01L2225/06513 , H01L2225/06551 , H01L2225/06562 , H01L2225/06575 , H01L2924/00014 , H01L2924/01015 , H01L2924/01047 , H01L2924/01079 , H01L2924/12042 , H01L2924/14 , H01L2924/15153 , H01L2924/15159 , H01L2924/157 , H01L2924/15787 , H01L2924/15788 , H01L2924/181 , H01L2924/30107 , H01L2924/3011 , H01L2224/03 , H01L2224/85 , H01L2924/00 , H01L2224/48455 , H01L2924/00012 , H01L2224/4554
摘要: 本发明提供一种能容易与主基板上的IC连接的、具备半导体元件(104)的基台(100)。本发明的一个实施方式的基台(100)包括基板(101)、电极(102)、(103)、半导体元件(104)、Au引线(105)和金凸起(106)、(107)。电极(102)、(103)、半导体元件(104)、Au引线(105)和金凸起(106)、(107)由树脂(108)在基板(101)上密封。在电极(103)上并且在Au引线(105)上利用球焊形成金凸起(107)后,对其利用划片加以切断而露出侧面。露出了的面作为基台(100)的侧面电极发挥作用。
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公开(公告)号:CN104205315B
公开(公告)日:2017-05-17
申请号:CN201380015827.3
申请日:2013-03-12
申请人: 住友电木株式会社
发明人: 伊藤慎吾
IPC分类号: H01L21/60
CPC分类号: H01L23/49503 , H01L23/3107 , H01L23/3171 , H01L23/4952 , H01L24/05 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/85 , H01L2224/02166 , H01L2224/04042 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48463 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/48669 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/48869 , H01L2224/73265 , H01L2224/85051 , H01L2224/85186 , H01L2924/00014 , H01L2924/01047 , H01L2924/181 , H01L2924/00 , H01L2924/00012 , H01L2924/01204 , H01L2924/01205 , H01L2924/01203 , H01L2924/01056 , H01L2924/0102 , H01L2924/01038 , H01L2924/01004 , H01L2924/01013 , H01L2924/00015 , H01L2924/01016 , H01L2924/01017 , H01L2924/20752 , H01L2924/013 , H01L2924/20751 , H01L2924/20753 , H01L2224/4554
摘要: 本发明提供一种耐湿性和高温保存特性优异的半导体装置。半导体装置具有包括芯片焊盘部和内引线部的引线框作为基板,该半导体装置还具有:搭载于芯片焊盘部的半导体元件;设置于半导体元件的电极焊盘;将设置于基板的内引线部和电极焊盘连接的铜线;和封装半导体元件和铜线的封装树脂。在深度方向上距离与铜线的接合面至少3μm以下的范围内的电极焊盘的区域,含有离子化倾向比铝小的金属作为主要成分,铜线中的硫含量相对于铜线整体为15ppm以上100ppm以下。
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公开(公告)号:CN1885532A
公开(公告)日:2006-12-27
申请号:CN200610090122.X
申请日:2006-06-23
申请人: 米辑电子股份有限公司
IPC分类号: H01L23/52 , H01L23/482 , H01L21/768 , H01L21/60 , H01L21/28
CPC分类号: H01L23/5227 , H01L21/2885 , H01L21/563 , H01L21/76801 , H01L21/76885 , H01L23/3114 , H01L23/5223 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/45 , H01L24/48 , H01L24/83 , H01L2224/0347 , H01L2224/0401 , H01L2224/04042 , H01L2224/04073 , H01L2224/05173 , H01L2224/05176 , H01L2224/05183 , H01L2224/05548 , H01L2224/05571 , H01L2224/05572 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05664 , H01L2224/05669 , H01L2224/1147 , H01L2224/13022 , H01L2224/13099 , H01L2224/131 , H01L2224/16 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/45155 , H01L2224/45164 , H01L2224/45169 , H01L2224/45173 , H01L2224/45176 , H01L2224/45183 , H01L2224/48091 , H01L2224/48463 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48664 , H01L2224/48669 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48864 , H01L2224/83101 , H01L2224/83192 , H01L2924/00011 , H01L2924/00014 , H01L2924/0002 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/09701 , H01L2924/10329 , H01L2924/12044 , H01L2924/1305 , H01L2924/13091 , H01L2924/14 , H01L2924/15787 , H01L2924/15788 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H01L2924/351 , H01L2924/00 , H01L2224/48869 , H01L2224/83851 , H01L2224/05552 , H01L2224/05599
摘要: 本发明涉及一种线路组件结构制造方法及其结构,该方法包括提供一基板,在该基板上设置至少第一金属柱及第二金属柱,此第一金属柱的最大横向尺寸除以第一金属柱及第二金属柱高度的比值小于4,且第一金属柱的高度介于20微米至300微米之间,且第一金属柱的中心点至第二金属柱的中心点之间的距离介于10微米至250微米之间。本发明因可将金属柱体之间距缩小至250微米以下,且可达到针孔数目少于400个的目标。并能有效改善集成电路的性能,且可大幅降低低电源IC组件的IC金属连接线路的阻抗及荷载。
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公开(公告)号:CN1885524A
公开(公告)日:2006-12-27
申请号:CN200610090121.5
申请日:2006-06-23
申请人: 米辑电子股份有限公司
IPC分类号: H01L21/768 , H01L21/60 , H01L21/28
CPC分类号: H01L23/5227 , H01L21/2885 , H01L21/563 , H01L21/76801 , H01L21/76885 , H01L23/3114 , H01L23/5223 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/45 , H01L24/48 , H01L24/83 , H01L2224/0347 , H01L2224/0401 , H01L2224/04042 , H01L2224/04073 , H01L2224/05173 , H01L2224/05176 , H01L2224/05183 , H01L2224/05548 , H01L2224/05571 , H01L2224/05572 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05664 , H01L2224/05669 , H01L2224/1147 , H01L2224/13022 , H01L2224/13099 , H01L2224/131 , H01L2224/16 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/45155 , H01L2224/45164 , H01L2224/45169 , H01L2224/45173 , H01L2224/45176 , H01L2224/45183 , H01L2224/48091 , H01L2224/48463 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48664 , H01L2224/48669 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48864 , H01L2224/83101 , H01L2224/83192 , H01L2924/00011 , H01L2924/00014 , H01L2924/0002 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/09701 , H01L2924/10329 , H01L2924/12044 , H01L2924/1305 , H01L2924/13091 , H01L2924/14 , H01L2924/15787 , H01L2924/15788 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H01L2924/351 , H01L2924/00 , H01L2224/48869 , H01L2224/83851 , H01L2224/05552 , H01L2224/05599
摘要: 本发明涉及一种线路组件结构制造方法及其结构,该方法包括提供一基板,在该基板上设置至少第一金属柱及第二金属柱,此第一金属柱的最大横向尺寸除以第一金属柱及第二金属柱高度的比值小于4,且第一金属柱的高度介于20微米至300微米之间,且第一金属柱的中心点至第二金属柱的中心点之间的距离介于10微米至250微米之间。本发明因可将金属柱体之间距缩小至250微米以下,且可达到针孔数目少于400个的目标。并能有效改善集成电路的性能,且可大幅降低低电源IC组件的IC金属连接线路的阻抗及荷载。
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公开(公告)号:CN1104046C
公开(公告)日:2003-03-26
申请号:CN97111464.1
申请日:1997-05-30
申请人: 三菱电机株式会社
IPC分类号: H01L21/60
CPC分类号: H01L24/85 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/73 , H01L2224/04042 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05669 , H01L2224/32245 , H01L2224/45015 , H01L2224/45124 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/45169 , H01L2224/4554 , H01L2224/45669 , H01L2224/4807 , H01L2224/48091 , H01L2224/48247 , H01L2224/48451 , H01L2224/48453 , H01L2224/48465 , H01L2224/48505 , H01L2224/48507 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48669 , H01L2224/48724 , H01L2224/48739 , H01L2224/48744 , H01L2224/48747 , H01L2224/48769 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48869 , H01L2224/73265 , H01L2224/78301 , H01L2224/85099 , H01L2224/85181 , H01L2224/85203 , H01L2224/85205 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/12042 , H01L2924/15747 , H01L2924/20106 , H01L2924/20107 , H01L2924/20303 , H01L2924/20753 , Y10S228/904 , H01L2924/00012 , H01L2224/78 , H01L2924/00
摘要: 目的在于提高微小丝焊焊接部的可靠性。在金属球3b接触压焊区2后,将第1键合压力大幅度地提高到120gf,在金属丝3a与压焊区2的接合界面处使其相互迅速产生塑性流动。接着将第2键合压力控制为40gf的低值,以确保与焊接核6a有关的金属球3b与压焊区2的接触。其次,超声振动施加后,以10~20gf施加第3键合压力约10ms,能够均匀地生长出多个岛状焊接部6b。最后,以25~40gf施加第4键合压力约3~5ms,这样就能形成带状焊接部7。
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公开(公告)号:CN1355567A
公开(公告)日:2002-06-26
申请号:CN01135581.6
申请日:2001-10-15
申请人: 德克萨斯仪器股份有限公司
发明人: T·R·埃弗兰德
CPC分类号: H01L24/05 , H01L23/3171 , H01L23/50 , H01L23/5286 , H01L24/03 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L2224/04042 , H01L2224/05553 , H01L2224/05554 , H01L2224/05556 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05664 , H01L2224/05669 , H01L2224/45014 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48465 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48664 , H01L2224/48669 , H01L2224/48724 , H01L2224/48739 , H01L2224/48764 , H01L2224/48769 , H01L2224/48839 , H01L2224/48844 , H01L2224/48864 , H01L2224/49 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01031 , H01L2924/01032 , H01L2924/01042 , H01L2924/01043 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01083 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/10253 , H01L2924/10329 , H01L2924/12044 , H01L2924/14 , H01L2924/181 , H01L2924/20752 , H01L2924/00 , H01L2224/48824 , H01L2224/48869 , H01L2224/48744 , H01L2924/20753
摘要: 一种安装在引线框上的集成电路芯片,具有沉积在芯片表面上的功率分布线网络,使它们直接位于电路的有源元件之上;以及导电且垂直地连接到分布线之下的所选有源元件的分布线,还有连接到引线框的线段的导体,由此节省电路功率分布线和导体衬垫所消耗的硅地盘量,增加电路设计灵活性和组装制造能力,减少线段的输入/输出数目。
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公开(公告)号:CN1317389A
公开(公告)日:2001-10-17
申请号:CN01112135.1
申请日:2001-03-26
申请人: 德克萨斯仪器股份有限公司
CPC分类号: H01L23/53238 , H01L21/288 , H01L23/53233 , H01L24/03 , H01L24/05 , H01L24/45 , H01L24/48 , H01L24/85 , H01L2224/04042 , H01L2224/05082 , H01L2224/05111 , H01L2224/05147 , H01L2224/05155 , H01L2224/05157 , H01L2224/05164 , H01L2224/05166 , H01L2224/05171 , H01L2224/0518 , H01L2224/05184 , H01L2224/05556 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/0568 , H01L2224/45014 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/4845 , H01L2224/48463 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/48669 , H01L2224/4868 , H01L2224/48724 , H01L2224/48739 , H01L2224/48747 , H01L2224/48755 , H01L2224/48764 , H01L2224/48769 , H01L2224/4878 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/4888 , H01L2224/78252 , H01L2224/78253 , H01L2224/85013 , H01L2224/85201 , H01L2224/85203 , H01L2224/85205 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01042 , H01L2924/01047 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/10253 , H01L2924/14 , H01L2924/19043 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/3025 , H01L2924/01004 , H01L2224/78 , H01L2924/00 , H01L2224/48824 , H01L2224/48869 , H01L2224/48744
摘要: 实现集成电路的互连铜金属化的电气丝/带连接的坚固而可靠的低成本金属结构和工艺。该结构包括沉积在无氧化铜表面上阻止铜扩散的一层阻挡层金属(从镍、钴、铬、钼、钛、钨及其合金中选出),其厚度能把在250℃下铜的扩散比没有阻挡层金属时减少不止80%;以及最外可焊接层(最外可焊接金属层从金、铂和银中选出),它能把在250℃下阻挡层金属的扩散比没有可焊接金属时减少不止80%。最后,把一金属丝焊接到最外层以进行冶金连接。
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