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公开(公告)号:CN101875158A
公开(公告)日:2010-11-03
申请号:CN201010171726.3
申请日:2010-04-28
申请人: 日立化成工业株式会社
IPC分类号: B23K35/22
CPC分类号: B22F1/0074 , C22C1/05 , H01B1/22 , H01L21/565 , H01L23/049 , H01L23/10 , H01L23/13 , H01L23/142 , H01L23/15 , H01L23/24 , H01L23/3107 , H01L23/3121 , H01L23/34 , H01L23/3735 , H01L23/488 , H01L23/492 , H01L23/49513 , H01L23/49562 , H01L23/498 , H01L24/29 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/83 , H01L25/072 , H01L2224/05147 , H01L2224/05639 , H01L2224/05655 , H01L2224/27334 , H01L2224/29005 , H01L2224/2901 , H01L2224/29078 , H01L2224/29101 , H01L2224/29109 , H01L2224/29111 , H01L2224/29118 , H01L2224/29124 , H01L2224/29138 , H01L2224/29139 , H01L2224/29155 , H01L2224/29157 , H01L2224/2916 , H01L2224/29163 , H01L2224/29164 , H01L2224/29166 , H01L2224/29169 , H01L2224/29171 , H01L2224/29173 , H01L2224/29176 , H01L2224/29178 , H01L2224/29181 , H01L2224/29184 , H01L2224/2919 , H01L2224/2929 , H01L2224/29294 , H01L2224/29309 , H01L2224/29311 , H01L2224/29318 , H01L2224/29324 , H01L2224/29338 , H01L2224/29339 , H01L2224/29355 , H01L2224/29357 , H01L2224/2936 , H01L2224/29363 , H01L2224/29364 , H01L2224/29366 , H01L2224/29369 , H01L2224/29371 , H01L2224/29373 , H01L2224/29376 , H01L2224/29378 , H01L2224/29381 , H01L2224/29384 , H01L2224/29387 , H01L2224/29893 , H01L2224/32225 , H01L2224/32245 , H01L2224/32505 , H01L2224/45015 , H01L2224/45124 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48472 , H01L2224/48739 , H01L2224/48755 , H01L2224/48839 , H01L2224/48855 , H01L2224/49111 , H01L2224/49175 , H01L2224/73265 , H01L2224/83065 , H01L2224/83075 , H01L2224/832 , H01L2224/8384 , H01L2224/85205 , H01L2924/00011 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/014 , H01L2924/0665 , H01L2924/09701 , H01L2924/10253 , H01L2924/12041 , H01L2924/12044 , H01L2924/13091 , H01L2924/15153 , H01L2924/15787 , H01L2924/181 , H01L2924/19041 , H01L2924/19043 , H01L2924/19105 , H01L2924/19107 , H01L2924/3511 , H01L2924/0541 , H01L2924/0501 , H01L2924/00014 , H01L2924/01001 , H01L2924/01018 , H01L2924/01007 , H01L2924/00012 , H01L2924/00 , H01L2924/3512 , H01L2924/2076 , H01L2924/01202 , H01L2224/83205
摘要: 本发明提供导电性接合材料、采用它的接合方法、以及由其接合的半导体装置,与采用平均粒径100nm以下的金属粒子的接合用材料相比,提供在接合界面通过金属结合加以接合,在较低温、不加压下实现接合强度提高的接合用材料、接合方法。以(A)银粒子、(B)氧化银、(C)包含以碳原子数30以下构成的有机物的分散剂作为必须成分的全导电性接合材料中,(A)银粉与(B)氧化银粉与(C)包含以碳原子数30以下构成的有机物的分散剂的合计达到99.0~100重量%。即,不含作为粘接剂的树脂。
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公开(公告)号:CN104425055B
公开(公告)日:2017-08-15
申请号:CN201410452753.6
申请日:2014-09-05
申请人: 株式会社东芝
CPC分类号: B23K35/025 , B22F1/0003 , B22F1/0018 , B22F1/0074 , B22F2999/00 , B23K35/24 , B23K35/262 , B23K35/264 , B23K35/282 , B23K35/286 , B23K35/30 , B23K35/3006 , B23K35/3013 , B23K35/302 , B23K35/3033 , B23K35/32 , B23K35/322 , B23K35/325 , B23K35/3601 , B23K35/362 , C22C1/0491 , C22C5/06 , H01L21/4867 , H01L23/3737 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/0381 , H01L2224/04026 , H01L2224/05611 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/27003 , H01L2224/271 , H01L2224/2732 , H01L2224/2741 , H01L2224/2744 , H01L2224/29006 , H01L2224/29294 , H01L2224/29313 , H01L2224/29318 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/2936 , H01L2224/29364 , H01L2224/29369 , H01L2224/29371 , H01L2224/29372 , H01L2224/29373 , H01L2224/29376 , H01L2224/29378 , H01L2224/2938 , H01L2224/2949 , H01L2224/32225 , H01L2224/32245 , H01L2224/325 , H01L2224/32503 , H01L2224/32507 , H01L2224/83075 , H01L2224/83192 , H01L2224/832 , H01L2224/83203 , H01L2224/83205 , H01L2224/8322 , H01L2224/83411 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83455 , H01L2224/83464 , H01L2224/83469 , H01L2224/8384 , H01L2924/01102 , H01L2924/10253 , H01L2924/10254 , H01L2924/10272 , H01L2924/1033 , H01L2924/1067 , H01L2924/12044 , H01L2924/15787 , H01L2924/0543 , H01L2924/01031 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , B22F1/0022
摘要: 根据本发明,可提供含有极性溶剂、和分散在上述极性溶剂中且包含第一金属的粒子的金属粒子膏糊。在上述极性溶剂中,溶解有与上述第一金属不同的第二金属。本发明还提供了使用了该金属粒子膏糊的固化物及半导体装置。
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公开(公告)号:CN107262958A
公开(公告)日:2017-10-20
申请号:CN201710589627.9
申请日:2014-09-05
申请人: 株式会社东芝
IPC分类号: B23K35/26 , B23K35/28 , B23K35/30 , B23K35/32 , B23K35/36 , B23K35/362 , B23K35/24 , B22F1/00 , C22C1/04 , H01L23/373 , H01L21/48 , H01L23/488
CPC分类号: B23K35/025 , B22F1/0003 , B22F1/0018 , B22F1/0074 , B22F2999/00 , B23K35/24 , B23K35/262 , B23K35/264 , B23K35/282 , B23K35/286 , B23K35/30 , B23K35/3006 , B23K35/3013 , B23K35/302 , B23K35/3033 , B23K35/32 , B23K35/322 , B23K35/325 , B23K35/3601 , B23K35/362 , C22C1/0491 , C22C5/06 , H01L21/4867 , H01L23/3737 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/0381 , H01L2224/04026 , H01L2224/05611 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/27003 , H01L2224/271 , H01L2224/2732 , H01L2224/2741 , H01L2224/2744 , H01L2224/29006 , H01L2224/29294 , H01L2224/29313 , H01L2224/29318 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/2936 , H01L2224/29364 , H01L2224/29369 , H01L2224/29371 , H01L2224/29372 , H01L2224/29373 , H01L2224/29376 , H01L2224/29378 , H01L2224/2938 , H01L2224/2949 , H01L2224/32225 , H01L2224/32245 , H01L2224/325 , H01L2224/32503 , H01L2224/32507 , H01L2224/83075 , H01L2224/83192 , H01L2224/832 , H01L2224/83203 , H01L2224/83205 , H01L2224/8322 , H01L2224/83411 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83455 , H01L2224/83464 , H01L2224/83469 , H01L2224/8384 , H01L2924/01102 , H01L2924/10253 , H01L2924/10254 , H01L2924/10272 , H01L2924/1033 , H01L2924/1067 , H01L2924/12044 , H01L2924/15787 , H01L2924/0543 , H01L2924/01031 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , B22F1/0022
摘要: 本发明提供了包含极性溶剂、分散在所述极性溶剂中且包含第一金属的粒子、和溶解在所述极性溶剂中且与所述第一金属不同的第二金属的金属粒子膏糊,所述极性溶剂选自由醇、二醇醚、酯、氨基化合物、脂肪族烃、和芳香族烃组成的组中,所述第二金属以有机金属化合物或盐的形式添加。本发明还提供了使用了该金属粒子膏糊的固化物及半导体装置。
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公开(公告)号:CN105845586A
公开(公告)日:2016-08-10
申请号:CN201510770793.X
申请日:2015-11-12
申请人: 英飞凌科技股份有限公司
CPC分类号: H01L24/27 , B23K1/0016 , B23K1/018 , B23K35/0244 , B23K35/025 , B23K35/3006 , H01L23/3735 , H01L24/29 , H01L24/743 , H01L24/75 , H01L24/83 , H01L2224/27332 , H01L2224/27442 , H01L2224/27831 , H01L2224/27848 , H01L2224/29294 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29364 , H01L2224/29369 , H01L2224/29373 , H01L2224/32225 , H01L2224/32245 , H01L2224/743 , H01L2224/75252 , H01L2224/75315 , H01L2224/75343 , H01L2224/75745 , H01L2224/83191 , H01L2224/83207 , H01L2224/8384 , H01L2924/13055 , H01L2924/13091 , H01L2924/00 , H01L2924/00014 , H01L2924/00012 , H01L23/50 , H01L24/80 , H01L2224/80
摘要: 本发明涉及一种用于在接合件(1)上生成具有粘结剂(3)的层(31)的方法。为此提供载体(30),在其上涂有粘结剂(3)。该粘结剂(3)包含以大量金属颗粒的形式构成的金属。接合件(1)被放置到位于载体(30)上的粘结剂(3)上并且按压位于载体上的粘结剂(3),从而由粘结剂(3)形成的层(31)粘附在接合件(1)上。该接合件(1)与粘附在其上的层(31)一起从载体(30)取下。通过气流(50)除去层(31)的边缘(32),在边缘处,层(31)从接合件(1)的侧面突出,从而留下粘附在接合件(1)上的层(31)的层剩余。
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公开(公告)号:CN104425055A
公开(公告)日:2015-03-18
申请号:CN201410452753.6
申请日:2014-09-05
申请人: 株式会社东芝
CPC分类号: B23K35/025 , B22F1/0003 , B22F1/0018 , B22F1/0074 , B22F2999/00 , B23K35/24 , B23K35/262 , B23K35/264 , B23K35/282 , B23K35/286 , B23K35/30 , B23K35/3006 , B23K35/3013 , B23K35/302 , B23K35/3033 , B23K35/32 , B23K35/322 , B23K35/325 , B23K35/3601 , B23K35/362 , C22C1/0491 , C22C5/06 , H01L21/4867 , H01L23/3737 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/0381 , H01L2224/04026 , H01L2224/05611 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/27003 , H01L2224/271 , H01L2224/2732 , H01L2224/2741 , H01L2224/2744 , H01L2224/29006 , H01L2224/29294 , H01L2224/29313 , H01L2224/29318 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/2936 , H01L2224/29364 , H01L2224/29369 , H01L2224/29371 , H01L2224/29372 , H01L2224/29373 , H01L2224/29376 , H01L2224/29378 , H01L2224/2938 , H01L2224/2949 , H01L2224/32225 , H01L2224/32245 , H01L2224/325 , H01L2224/32503 , H01L2224/32507 , H01L2224/83075 , H01L2224/83192 , H01L2224/832 , H01L2224/83203 , H01L2224/83205 , H01L2224/8322 , H01L2224/83411 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83455 , H01L2224/83464 , H01L2224/83469 , H01L2224/8384 , H01L2924/01102 , H01L2924/10253 , H01L2924/10254 , H01L2924/10272 , H01L2924/1033 , H01L2924/1067 , H01L2924/12044 , H01L2924/15787 , H01L2924/0543 , H01L2924/01031 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , B22F1/0022
摘要: 根据本发明,可提供含有极性溶剂、和分散在上述极性溶剂中且包含第一金属的粒子的金属粒子膏糊。在上述极性溶剂中,溶解有与上述第一金属不同的第二金属。本发明还提供了使用了该金属粒子膏糊的固化物及半导体装置。
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公开(公告)号:CN105632954B
公开(公告)日:2018-07-13
申请号:CN201510690155.7
申请日:2015-10-22
申请人: 英飞凌科技股份有限公司
IPC分类号: H01L21/603
CPC分类号: H01L21/4825 , H01L21/4842 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/75 , H01L24/83 , H01L2224/27003 , H01L2224/27005 , H01L2224/2732 , H01L2224/2744 , H01L2224/27442 , H01L2224/27848 , H01L2224/29294 , H01L2224/29295 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29364 , H01L2224/29369 , H01L2224/29373 , H01L2224/2939 , H01L2224/32227 , H01L2224/32245 , H01L2224/75252 , H01L2224/75315 , H01L2224/75343 , H01L2224/75745 , H01L2224/83048 , H01L2224/83191 , H01L2224/83192 , H01L2224/832 , H01L2224/83203 , H01L2224/83207 , H01L2224/83208 , H01L2224/8322 , H01L2224/83424 , H01L2224/83447 , H01L2224/8384 , H01L2224/83986 , H01L2924/3512 , H01L2924/00014 , H01L2924/00012
摘要: 本发明涉及一种用于制造半导体芯片(1)和金属层(21)之间的材料配合的连接的方法。对此提供半导体芯片(1)、具有芯片装配部段(21c)的金属层(21)以及包含金属粉的连接剂(3)。金属粉在烧结过程中进行烧结。在此,在预定的烧结持续时间期间不间断地满足的要求是,连接剂(3)布置在半导体芯片(1)和金属层(21)之间并且连续地从半导体芯片(1)延伸直到金属化层(21),半导体芯片(1)和金属层(21)在处在高于最小压力的压力区域中相互挤压,连接剂(3)保持在处在高于最小温度的温度区域中,并且声学信号(SUS)耦合到连接剂(3)。
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公开(公告)号:CN107828351A
公开(公告)日:2018-03-23
申请号:CN201710821431.8
申请日:2017-09-13
申请人: E·I·内穆尔杜邦公司
发明人: 松浦有美
IPC分类号: C09J9/02 , C09J101/28 , C09J11/06 , H01B1/22
CPC分类号: C09J9/02 , B23K35/025 , C08K2003/0806 , C08K2201/001 , C08L1/28 , C09J5/06 , C09J11/04 , C09J11/06 , C09J101/28 , C09J2401/00 , C09J2433/00 , H01L24/05 , H01L24/29 , H01L24/83 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/2732 , H01L2224/27332 , H01L2224/2747 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29364 , H01L2224/29369 , H01L2224/29373 , H01L2224/32151 , H01L2224/32227 , H01L2224/83048 , H01L2224/83097 , H01L2224/83191 , H01L2224/83208 , H01L2224/83851 , H01L2924/1205 , H01L2924/1206 , H01L2924/1207 , H01L2924/13072 , H01L2924/14 , C08L1/284 , H01L2924/00014 , H01L2924/013 , H01L2924/06 , C08K7/00 , C08K7/18 , C08K2201/003 , C08L5/12 , C08L2205/025 , H01B1/22 , C08K3/08
摘要: 本发明涉及一种用于粘合的导电糊料,该导电糊料包含100重量份的金属粉末、5至20重量份的溶剂和0.05至3重量份的聚合物,其中该聚合物包含第一聚合物和第二聚合物,其中该第一聚合物的分子量(Mw)为5,000至95,000,并且该第二聚合物的分子量(Mw)为100,000至300,000。
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公开(公告)号:CN105632954A
公开(公告)日:2016-06-01
申请号:CN201510690155.7
申请日:2015-10-22
申请人: 英飞凌科技股份有限公司
IPC分类号: H01L21/603
CPC分类号: H01L21/4825 , H01L21/4842 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/75 , H01L24/83 , H01L2224/27003 , H01L2224/27005 , H01L2224/2732 , H01L2224/2744 , H01L2224/27442 , H01L2224/27848 , H01L2224/29294 , H01L2224/29295 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29364 , H01L2224/29369 , H01L2224/29373 , H01L2224/2939 , H01L2224/32227 , H01L2224/32245 , H01L2224/75252 , H01L2224/75315 , H01L2224/75343 , H01L2224/75745 , H01L2224/83048 , H01L2224/83191 , H01L2224/83192 , H01L2224/832 , H01L2224/83203 , H01L2224/83207 , H01L2224/83208 , H01L2224/8322 , H01L2224/83424 , H01L2224/83447 , H01L2224/8384 , H01L2224/83986 , H01L2924/3512 , H01L2924/00014 , H01L2924/00012 , H01L2224/27505 , H01L2924/201 , H01L2924/3701
摘要: 本发明涉及一种用于制造半导体芯片(1)和金属层(21)之间的材料配合的连接的方法。对此提供半导体芯片(1)、具有芯片装配部段(21c)的金属层(21)以及包含金属粉的连接剂(3)。金属粉在烧结过程中进行烧结。在此,在预定的烧结持续时间期间不间断地满足的要求是,连接剂(3)布置在半导体芯片(1)和金属层(21)之间并且连续地从半导体芯片(1)延伸直到金属化层(21),半导体芯片(1)和金属层(21)在处在高于最小压力的压力区域中相互挤压,连接剂(3)保持在处在高于最小温度的温度区域中,并且声学信号(SUS)耦合到连接剂(3)。
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