公开(公告)号：US20150371813A1

公开(公告)日：2015-12-24

申请号：US14747488

申请日：2015-06-23

Applicant: EBARA CORPORATION

Inventor： Masahiro HATAKEYAMA ,  Kenichi SUEMATSU ,  Ryo TAJIMA ,  Kiwamu TSUKAMOTO ,  Kenji TERAO ,  Shoji YOSHIKAWA

IPC: H01J37/20 ,  H01J37/305 ,  H01J37/22 ,  H01J37/073 ,  H01J37/10

CPC classification number: H01J37/20 ,  H01J37/226 ,  H01J37/3005 ,  H01J37/3023 ,  H01J37/3056 ,  H01J37/3177 ,  H01J2237/24535

Abstract: A surface processing apparatus is an apparatus which performs surface processing on an inspection object 20 by irradiating the inspection object with an electron beam. A surface processing apparatus includes: an electron source 10 (including lens system that controls beam shape of electron beam) which generates an electron beam; a stage 30 on which an inspection object 20 to be irradiated with the electron beam is set; and an optical microscope 110 for checking a position to be irradiated with the electron beam. The current value of the electron beam which irradiates the inspection object 20 is set at 10 nA to 100 A.

Abstract translation: 表面处理装置是通过用电子束照射检查对象对检查对象物20进行表面处理的装置。 表面处理装置包括：产生电子束的电子源10（包括控制电子束的光束形状的透镜系统）; 设置有用电子束照射的检查对象物20的台架30; 以及用于检查用电子束照射的位置的光学显微镜110。 将检查对象物20照射的电子束的当前值设定为10nA〜100A。

公开(公告)号：US09196456B2

公开(公告)日：2015-11-24

申请号：US14509402

申请日：2014-10-08

Applicant: JEOL Ltd.

Inventor： Hirofumi Iijima

IPC: H01J37/21 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/21 ,  H01J37/226 ,  H01J37/26 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/0492 ,  H01J2237/10 ,  H01J2237/1534 ,  H01J2237/2007 ,  H01J2237/21 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: An image acquisition method and system for use in transmission electron microscopy and capable of providing information about a wide range of frequency range. The method is initiated with setting at least one of the spherical aberration coefficient and chromatic aberration coefficient of the imaging system of the microscope to suppress attenuation of a contrast transfer function due to an envelope function. Then, an image is obtained by the imaging system placed in defocus conditions.

Abstract translation: 一种用于透射电子显微镜的图像采集方法和系统，能够提供有关宽范围频率范围的信息。 通过设置显微镜的成像系统的球面像差系数和色差系数中的至少一个来开始该方法，以抑制由于包络函数引起的对比度传递函数的衰减。 然后，通过放置在散焦条件下的成像系统获得图像。

公开(公告)号：US20150279616A1

公开(公告)日：2015-10-01

申请号：US14667292

申请日：2015-03-24

Applicant: TESCAN ORSAY HOLDING, a.s. ,  WITec GmbH

Inventor： Jaroslav Jiruse ,  Olaf Hollricher ,  Martin Hanicinec

IPC: H01J37/28 ,  G01Q30/02 ,  H01J37/18 ,  G01N21/65 ,  H01J37/20

CPC classification number: H01J37/28 ,  G01J3/44 ,  G01N21/65 ,  G01N2201/061 ,  G01N2201/068 ,  G01Q30/025 ,  H01J37/18 ,  H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J37/26 ,  H01J2237/024 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2583 ,  H01J2237/2801 ,  H01J2237/2802

Abstract: A system uses number of analytical devices such as an electron microscope a Raman microscope, an ion beam column and a scanning probe microscope for sample analysis concurrent, consecutive or with the mutual correlation of the analysis performed by the different devices in the same sample area using the connection of the Raman microscope optical objective lens and objective manipulator, that significantly reduces time needed for analyzing by Raman microscope together with other devices and maintains high quality of the sensed signals comparable to stand alone analytical devices.

Abstract translation: 系统使用电子显微镜，拉曼显微镜，离子束柱和扫描探针显微镜等分析装置的数量，并行，连续或与相同样品区域中的不同装置进行的分析的相互关联，使用 拉曼显微镜光学物镜和物镜操纵器的连接，显着缩短了拉曼显微镜与其他设备一起分析所需的时间，并保持与独立分析设备相当的感测信号的高质量。

公开(公告)号：US08975582B2

公开(公告)日：2015-03-10

申请号：US13311734

申请日：2011-12-06

Applicant: Hidetoshi Nishiyama ,  Toshifumi Honda ,  Sachio Uto

Inventor： Hidetoshi Nishiyama ,  Toshifumi Honda ,  Sachio Uto

IPC: G01N23/225 ,  G02B15/14 ,  G02B21/00 ,  H01J37/22 ,  H01J37/28 ,  H01K3/02

CPC classification number: G01N23/225 ,  G02B15/14 ,  G02B21/0016 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2482 ,  H01J2237/2817 ,  H01K3/02

Abstract: A method of inspecting defects of a sample on a movable table includes a first step for, on a basis of position information of the defects which is previously detected by an other inspection system, driving the table so that the defects come into a viewing field of an optical microscope having a focus which is adjusted, a second step for re-detecting the defects to obtain a first detection result, a third step for correcting the position information of defects on a basis of position information of the re-detected defects, and a fourth step for reviewing the defects whose position information is corrected to obtain a second detection result. At the second step, re-detecting is performed using reflection light or scattered light from the sample which passes an optical filter which includes a light shielding portion and a light transmitting portion.

Abstract translation: 一种在可移动台上检查样本的缺陷的方法包括：第一步骤，用于基于先前由另一检查系统检测到的缺陷的位置信息来驱动该表，使得缺陷进入到 具有调整焦点的光学显微镜，用于重新检测缺陷以获得第一检测结果的第二步骤，基于重新检测到的缺陷的位置信息来校正缺陷的位置信息的第三步骤，以及 检查位置信息被校正以获得第二检测结果的缺陷的第四步骤。 在第二步骤中，使用来自通过包括遮光部分和透光部分的滤光器的样品的反射光或散射光进行再检测。

公开(公告)号：US08933400B2

公开(公告)日：2015-01-13

申请号：US14349630

申请日：2012-09-03

Applicant: Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

Inventor： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

IPC: H01J37/30 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

Abstract: Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.

Abstract translation: 提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。 具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间， 能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴， 粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。

公开(公告)号：US08872105B2

公开(公告)日：2014-10-28

申请号：US13770765

申请日：2013-02-19

Applicant: FEI Company

Inventor： Aurélien Philippe Jean Maclou Botman ,  Cameron James Zachreson

IPC: G01N21/64 ,  H01J37/30 ,  H01J37/26 ,  G01N23/225 ,  H01J37/22

CPC classification number: H01J37/226 ,  G01N21/64 ,  G01N21/6458 ,  G01N2021/6439 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/006

Abstract: Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.

Abstract translation: 在样品表面局部提供蒸气，以允许荧光标记在真空室中的荧光。 例如，纳米毛细管可以分配感兴趣区域附近的液体，液体蒸发以增加荧光标记附近的蒸气压。 荧光标记物上的蒸气压的增加优选足够大，以防止失活或重新激活荧光标记物，而真空室中的总体压力优选足够低以允许带电粒子束操作很少或不需要额外的抽真空泵送。

公开(公告)号：US08766213B2

公开(公告)日：2014-07-01

申请号：US13607329

申请日：2012-09-07

Applicant: Marcus Straw ,  Mark Emerson

Inventor： Marcus Straw ,  Mark Emerson

IPC: H01J37/00

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

Abstract translation: 用于对准与带电粒子束一致的激光束的方法和装置。 所描述的本发明提供了一种通过物镜的中心对准激光束并最终瞄准多光束系统的中心点的方法。 该装置利用激光束对准系统的部件位于带电粒子系统的真空室内和外部。

公开(公告)号：US08648301B2

公开(公告)日：2014-02-11

申请号：US13623829

申请日：2012-09-20

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Stewart Bean ,  Michael Robert Astley

IPC: H01J37/28

CPC classification number: H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.

Abstract translation: 一种系统包括粒子光学系统和光敏检测器。 粒子光学系统包括带电粒子束源和物镜。 带电粒子束源被配置为产生沿着粒子束路径行进的带电粒子束，并且物镜被配置为将粒子束聚焦到粒子光学系统的物平面上。 该系统被配置为使得系统的光束路径从物平面延伸到光敏检测器。

公开(公告)号：US08618479B2

公开(公告)日：2013-12-31

申请号：US13152331

申请日：2011-06-03

Applicant: Mitsuhiro Kashihara

Inventor： Mitsuhiro Kashihara

IPC: G01N23/00

CPC classification number: H01J37/28 ,  G02B21/0004 ,  G02B21/26 ,  H01J37/023 ,  H01J37/16 ,  H01J37/226 ,  H01J37/228 ,  H01J2237/20235

Abstract: Observation fields of an electron microscope image and an optical magnifying observation image are smoothly switched. A magnifying observation apparatus includes: a pair of end-face plates closes end faces of a body portion; an electron beam imaging device mounted on a first position of a cylindrical shaped outer surface of the body portion; an optical imaging device mounted on a second position being different from the first position in the outer surface; a rotating device that rotates the both imaging devices along the outer surface such that a distance from each of the both imaging devices to a common rotation axis of the both imaging devices is kept constant and optical axes of the both imaging devices are oriented toward the rotation axis; a specimen stage that is disposed in the chamber, and arranged to a position that is substantially the same to a height of the rotation axis.

Abstract translation: 平滑地切换电子显微镜图像和光学放大观察图像的观察场。 放大观察装置包括：一对端面板封闭主体部分的端面; 安装在所述主体部分的圆柱形外表面的第一位置上的电子束成像装置; 安装在与外表面中的第一位置不同的第二位置的光学成像装置; 旋转装置，其使两个成像装置沿着外表面旋转，使得从两个成像装置中的每一个到两个成像装置的公共旋转轴线的距离保持恒定，并且两个成像装置的光轴朝向旋转 轴; 所述试样台设置在所述室内，并配置在与所述旋转轴的高度大致相同的位置。

公开(公告)号：US08513604B2

公开(公告)日：2013-08-20

申请号：US12925704

申请日：2010-10-27

Applicant: Christian Thomas ,  Lucian Stefan

Inventor： Christian Thomas ,  Lucian Stefan

IPC: G01J1/00

CPC classification number: H01J37/244 ,  G01N23/2254 ,  G01N2223/612 ,  H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A detection device and a particle beam device having a detection device ensure a good efficiency in detecting interaction particles and electromagnetic radiation. The detection device has a detector for detecting electromagnetic radiation and/or interaction particles and a filter element through which the electromagnetic radiation is transmitted. The filter element prevents the interaction particles from striking the detector such that the filter element is situated to move between a first position and a second position, the filter element in the first position being situated in relation to the detector in such a way that the filter element prevents the interaction particles from striking the detector. The filter element in the second position is situated in relation to the detector in such a way that the filter element allows the interaction particles to strike the detector. As an alternative, the filter element may be an object holder.

Abstract translation: 具有检测装置的检测装置和粒子束装置确保检测相互作用粒子和电磁辐射的良好效率。 检测装置具有用于检测电磁辐射和/或相互作用颗粒的检测器和通过其传送电磁辐射的过滤元件。 过滤器元件防止相互作用的颗粒撞击检测器，使得过滤元件位于第一位置和第二位置之间，第一位置中的过滤元件相对于检测器位于与检测器相关的位置，使得过滤器 元件防止相互作用的颗粒撞击检测器。 处于第二位置的过滤元件以与检测器相关的方式定位，使得过滤元件允许相互作用的颗粒撞击检测器。 作为替代，过滤元件可以是物体保持器。