公开(公告)号：US09911573B2

公开(公告)日：2018-03-06

申请号：US14642138

申请日：2015-03-09

Applicant: Dimitry Boguslavsky ,  Mark Kovler

Inventor： Dimitry Boguslavsky ,  Mark Kovler

IPC: C23C16/50 ,  H01J37/305 ,  G01N1/32 ,  H01J37/147 ,  H01J37/20

CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/147 ,  H01J37/20 ,  H01J2237/0245 ,  H01J2237/0827 ,  H01J2237/1505 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Methods, apparatuses, systems and software for ion beam milling or machining are disclosed. The apparatus includes a specimen holder, a table, one or more ion sources, rotatable ion optics, and an imaging device. The specimen holder is configured to hold a specimen in a stationary position during milling or machining. The table is configured to change the stationary position of the specimen holder in any of three orthogonal linear directions and an angular direction. The rotatable ion optics are configured to emit an ion beam towards a predetermined location on the specimen from any of the one or more ion sources at any angle around an axis that is orthogonal to a horizontal surface of the table when the angular direction of the table is 0°. The imaging device is configured to generate an image of the specimen including the predetermined location, thereby enabling real-time monitoring of the milling or machining process.

公开(公告)号：US20180040452A1

公开(公告)日：2018-02-08

申请号：US15667040

申请日：2017-08-02

Applicant: EBARA CORPORATION

Inventor： Masahiro HATAKEYAMA ,  Ryo TAJIMA ,  Kenichi SUEMATSU ,  Kenji WATANABE ,  Yasushi TOMA ,  Kenji TERAO ,  Takeshi MURAKAMI

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/141

CPC classification number: H01J37/05 ,  H01J37/141 ,  H01J37/147 ,  H01J37/244 ,  H01J37/26 ,  H01J37/29

Abstract: An electron beam inspection device includes: a primary electron optical system that irradiates the surface of a sample with an electron beam; and a secondary electron optical system that gathers secondary electrons emitted from the sample and forms an image on the sensor surface of a detector. An electron image of the surface of the sample is obtained from a signal detected by the detector, and the sample is inspected. A cylindrical member that is formed with conductors stacked as an inner layer and an outer layer, and an insulator stacked as an intermediate layer is provided inside a lens tube into which the secondary electron optical system is incorporated. An electron orbital path is formed inside the cylindrical member, and the members constituting the secondary electron optical system are arranged outside the cylindrical member.

公开(公告)号：US09818574B2

公开(公告)日：2017-11-14

申请号：US15150090

申请日：2016-05-09

Applicant: Kingstone Semiconductor Limited Company

Inventor： Jiong Chen ,  Junhua Hong ,  Jin Zhang ,  Jeff Boeker

IPC: H01J49/00 ,  H01J37/147 ,  H01J49/06 ,  H01J37/317 ,  H01J37/30

CPC classification number: H01J37/147 ,  H01J37/3007 ,  H01J37/3171 ,  H01J49/06 ,  H01J2237/10 ,  H01J2237/15

Abstract: A beam current transmission system and method are disclosed. The beam current transmission system comprises an extraction device, a mass analyzer, a divergent element, a collimation element and a speed change and turning element, wherein an analysis plane of the mass analyzer is perpendicular to a convergent plane of the extracted beam, and after entering an entrance, the beam is converged on a convergent point in a plane perpendicular to the analysis plane, and then is diverged from the convergent point and transmitted to the divergent element from an exit; the collimation element is used for parallelizing the beam in a transmission plane of the beam; and the speed change and turning element is used for enabling the beam to change speed so as to achieve a target energy while the beam is deflected so that the transmission direction of the beam changes by a first pre-set angle. Through the coordinated cooperation among a plurality of beam current optical elements, a relatively wider distribution can be formed in a vertical plane, so the invention is suitable to the processing of a wafer with a large size and also ensure better injection uniformity on the premise of avoiding energy contamination.

公开(公告)号：US20170323760A1

公开(公告)日：2017-11-09

申请号：US15461829

申请日：2017-03-17

Applicant: ADVANTEST CORPORATION

Inventor： Masaki Kurokawa ,  Takamasa Sato ,  Shinichi Kojima ,  Akio Yamada

IPC: H01J37/147 ,  H01J37/317

CPC classification number: H01J37/147 ,  H01J37/241 ,  H01J37/3177 ,  H01J2237/141 ,  H01J2237/1504 ,  H01J2237/152 ,  H01J2237/1526 ,  H01J2237/20285

Abstract: A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.

公开(公告)号：US09801594B2

公开(公告)日：2017-10-31

申请号：US14288021

申请日：2014-05-27

Applicant: Imatrex Inc.

Inventor： Douglas P. Boyd ,  Samuel M. Song ,  Roy E. Rand ,  Larry Partain ,  Junghyun Kwon

IPC: A61N5/10 ,  A61B6/03 ,  H01J35/14 ,  H01J35/30 ,  H05G1/52 ,  A61B6/00 ,  H01J37/147 ,  A61B6/02 ,  A61N5/06

CPC classification number: A61B6/405 ,  A61B6/025 ,  A61B6/541 ,  A61B6/542 ,  A61N5/1048 ,  A61N5/1049 ,  A61N2005/0632 ,  A61N2005/1061 ,  H01J35/14 ,  H01J35/30 ,  H01J37/147 ,  H05G1/52

Abstract: A system for tracking tumors during radiotherapy by interleaving treatment pulses with imaging pulses is disclosed. The system includes a multisource scanning eBeam X-ray tube having a plurality of focal spots. The X-ray tube is configured to emit X-rays to a plurality of different locations on a target by sequentially emitting the X-rays to the focal spots in the plurality of focal spots. This is done such that the X-rays can be emitted to the plurality of different locations on the target without substantially moving the X-ray tube or the target. The system further includes an imager panel configured to act as the target and configured to receive the X-rays from the focal spots of the X-ray tube. The system further includes a tomosynthesis reconstruction module configured to process output from the imager panel to construct an image.

公开(公告)号：US09679738B2

公开(公告)日：2017-06-13

申请号：US14916529

申请日：2014-05-16

Applicant: Hitachi High-Technologies Corporation

Inventor： Hiroaki Matsumoto ,  Takeshi Sato ,  Yoshifumi Taniguchi ,  Ken Harada

IPC: H01J47/00 ,  H01J37/10 ,  H01J37/295 ,  H01J37/04 ,  H01J37/26 ,  G01N23/20 ,  H01J37/09 ,  H01J37/147 ,  H01J37/153 ,  H01J37/24 ,  H01J37/244 ,  H01J37/28 ,  H01J37/05 ,  H01J37/285

CPC classification number: H01J37/10 ,  G01N23/20058 ,  G01N2223/418 ,  H01J37/04 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/24 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J37/285 ,  H01J37/295 ,  H01J2237/21 ,  H01J2237/2614

Abstract: The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam crossover (11, 13) is matched with a selected area aperture (65), and the focal distance of a first imaging lens (61) can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector (81) is disposed in a stage following the first imaging lens (61), and conditions for an irradiating optical system (4) can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.

公开(公告)号：US09589763B1

公开(公告)日：2017-03-07

申请号：US14932443

申请日：2015-11-04

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

Inventor： Jürgen Frosien

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/147 ,  H01J37/244 ,  H01J37/261 ,  H01J37/285 ,  H01J2237/057 ,  H01J2237/153 ,  H01J2237/24485 ,  H01J2237/2857

Abstract: The present disclosure provides a method for detecting signal charged particles in a charged particle beam device. The method includes emitting a primary charged particle beam, illuminating a specimen with the primary charged particle beam, wherein the primary charged particle beam has a landing energy on the specimen of less than 40 keV, wherein signal charged particles with a first energy spectrum are generated, energy filtering the signal charged particles such that signal charged particles in an energy range from an energy of 85% of the landing energy to 100% propagate for subsequent detection, and detecting the signal charged particles within the energy range using at least one detector.

Abstract translation: 本公开提供了一种用于检测带电粒子束装置中的信号带电粒子的方法。 该方法包括发射初级带电粒子束，用初级带电粒子束照射样本，其中初级带电粒子束在样本上具有小于40keV的着陆能，其中产生具有第一能谱的信号带电粒子 对信号带电粒子进行能量过滤，使得能量范围内的信号带电粒子从着陆能量的85％的能量传播到100％，用于随后的检测，并且使用至少一个检测器检测能量范围内的信号带电粒子。

公开(公告)号：US09589762B2

公开(公告)日：2017-03-07

申请号：US14402352

申请日：2012-06-01

Applicant: Peter Simon Aptaker ,  Paul Beasley ,  Oliver Heid

Inventor： Peter Simon Aptaker ,  Paul Beasley ,  Oliver Heid

IPC: G21K5/04 ,  H01J37/147 ,  G21K1/087 ,  H05H7/00 ,  H05H9/00

CPC classification number: H01J37/147 ,  G21K1/087 ,  H01J2235/166 ,  H01J2237/15 ,  H05H7/00 ,  H05H9/00 ,  H05H2007/002

Abstract: A deflection plate for deflecting charged particles, the plate comprising a recess is provided.

Abstract translation: 提供用于使带电粒子偏转的偏转板，所述板包括凹部。

公开(公告)号：US09524851B2

公开(公告)日：2016-12-20

申请号：US14844778

申请日：2015-09-03

Applicant: FEI Company

Inventor： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/20 ,  H01J37/147

CPC classification number: H01J37/226 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/2007 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2802

Abstract: A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising: a specimen holder; a source, for producing a beam of charged particles; an illuminator, for directing said beam so as to irradiate the specimen; an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams, the method comprising: using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array; providing; using a radiation sensor in said flux upstream of said aperture device to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector; using a sensing result from said sensor to adjust a detection result from said detector.

公开(公告)号：US09383208B2

公开(公告)日：2016-07-05

申请号：US13650442

申请日：2012-10-12

Applicant: Analog Devices, Inc.

Inventor： Pritiraj Mohanty

IPC: G04C3/10 ,  G01C21/16 ,  H03B5/30 ,  G01R33/028 ,  G01P15/097 ,  H01J37/24 ,  H01J37/147 ,  G01R33/07 ,  G01C17/28

CPC classification number: G01C21/165 ,  G01C17/28 ,  G01P15/097 ,  G01R33/0286 ,  G01R33/072 ,  H01J37/147 ,  H01J37/243 ,  H03B5/30

Abstract: A system that incorporates the subject disclosure may include, for example, a method for producing an electrical signal from an apparatus comprising an induction coil coupled to a mechanical resonator, wherein the electrical signal has an operating frequency proportional to a mechanical resonating frequency of the mechanical resonator and proportional to a change in a magnetic flux resulting from a change in orientation in the apparatus, detecting with a detection circuit a change in the electrical signal resulting from a change in the magnetic flux caused by the change in orientation in the apparatus, and determining a direction of the apparatus according to the change in the electrical signal. Other embodiments are disclosed.

Abstract translation: 结合本公开的系统可以包括例如从包括耦合到机械谐振器的感应线圈的装置产生电信号的方法，其中电信号具有与机械谐振频率成比例的工作频率 谐振器，并且与装置中的取向变化产生的磁通量的变化成比例，用检测电路检测由于装置中的取向的变化引起的磁通量的变化而导致的电信号的变化，以及 根据电信号的变化确定装置的方向。 公开了其他实施例。