公开(公告)号：US20170323760A1

公开(公告)日：2017-11-09

申请号：US15461829

申请日：2017-03-17

Applicant: ADVANTEST CORPORATION

Inventor： Masaki Kurokawa ,  Takamasa Sato ,  Shinichi Kojima ,  Akio Yamada

IPC: H01J37/147 ,  H01J37/317

CPC classification number: H01J37/147 ,  H01J37/241 ,  H01J37/3177 ,  H01J2237/141 ,  H01J2237/1504 ,  H01J2237/152 ,  H01J2237/1526 ,  H01J2237/20285

Abstract: A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.

公开(公告)号：US08618970B2

公开(公告)日：2013-12-31

申请号：US13682311

申请日：2012-11-20

Applicant: Advantest Corporation ,  Hitachi Information & Communication Engineering, Ltd.

Inventor： Takamasa Sato ,  Ryozo Yoshino ,  Atsushi Higashino

IPC: H03M1/66 ,  H03K19/0175

CPC classification number: H03M1/66 ,  H01J3/26 ,  H01J37/24 ,  H01J37/3174 ,  H01J2237/1504

Abstract: A DA conversion device includes a current output type DA converter, a high-speed operational amplifier operating at a low voltage and configured to generate a voltage corresponding to an output current from the DA converter, and a buffer amplifier connected to an output terminal of the high-speed operational amplifier and operating at a high voltage. The device also includes positive and negative floating power supplies separated from a power supply system and provided as power supplies for driving the DA converter and the high-speed operational amplifier. A midpoint between potentials at the floating power supplies is connected to an output terminal of the buffer amplifier to cause the DA converter and the high-speed operational amplifier to operate mainly based on an output voltage from the buffer amplifier.

Abstract translation: DA转换装置包括电流输出型DA转换器，低电压运行的高速运算放大器，其被配置为产生与来自DA转换器的输出电流相对应的电压;以及缓冲放大器，连接到所述DA转换器的输出端子 高速运算放大器，工作在高电压。 该装置还包括与电源系统分离的正和负浮动电源，并且作为用于驱动DA转换器和高速运算放大器的电源提供。 浮动电源的电位之间的中点连接到缓冲放大器的输出端子，使得DA转换器和高速运算放大器主要基于来自缓冲放大器的输出电压来运行。

公开(公告)号：US20130270449A1

公开(公告)日：2013-10-17

申请号：US13682311

申请日：2012-11-20

Applicant: Hitachi Information & Communication Engineering, Ltd. ,  ADVANTEST CORPORATION

Inventor： Takamasa Sato ,  Ryozo Yoshino ,  Atsushi Higashino

IPC: H03M1/66 ,  H01J3/26

CPC classification number: H03M1/66 ,  H01J3/26 ,  H01J37/24 ,  H01J37/3174 ,  H01J2237/1504

Abstract: A DA conversion device includes a current output type DA converter, a high-speed operational amplifier operating at a low voltage and configured to generate a voltage corresponding to an output current from the DA converter, and a buffer amplifier connected to an output terminal of the high-speed operational amplifier and operating at a high voltage. The device also includes positive and negative floating power supplies separated from a power supply system and provided as power supplies for driving the DA converter and the high-speed operational amplifier. A midpoint between potentials at the floating power supplies is connected to an output terminal of the buffer amplifier to cause the DA converter and the high-speed operational amplifier to operate mainly based on an output voltage from the buffer amplifier.

Abstract translation: DA转换装置包括电流输出型DA转换器，低电压运行的高速运算放大器，其被配置为产生与来自DA转换器的输出电流相对应的电压;以及缓冲放大器，连接到所述DA转换器的输出端子 高速运算放大器，工作在高电压。 该装置还包括与电源系统分离的正和负浮动电源，并且作为用于驱动DA转换器和高速运算放大器的电源提供。 浮动电源的电位之间的中点连接到缓冲放大器的输出端子，使得DA转换器和高速运算放大器主要基于来自缓冲放大器的输出电压来运行。