公开(公告)号：US20180321583A1

公开(公告)日：2018-11-08

申请号：US16040385

申请日：2018-07-19

Applicant: Laurence B. Tarrant ,  Richard C. Svrluga ,  Sean R. Kirkpatrick

Inventor： Laurence B. Tarrant ,  Richard C. Svrluga ,  Sean R. Kirkpatrick

IPC: G03F1/80 ,  H01L21/265 ,  G03F1/82 ,  H01J37/05 ,  H01J37/147 ,  H01J37/317 ,  H01L21/02 ,  H05H3/02 ,  H01L21/311 ,  B24B37/04 ,  H01L29/36

CPC classification number: G03F1/80 ,  B24B37/04 ,  G03F1/82 ,  H01J37/05 ,  H01J37/147 ,  H01J37/317 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  H01L21/02115 ,  H01L21/02274 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/26566 ,  H01L21/31105 ,  H01L21/31111 ,  H01L29/36 ,  H05H3/02 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/30

Abstract: A bone implantable medical device made from a biocompatible material, preferably comprising titania or zirconia, has at least a portion of its surface modified to facilitate improved integration with bone. The implantable device may incorporate a surface infused with osteoinductive agent and/or may incorporate holes loaded with a therapeutic agent. The infused surface and/or the holes may be patterned to determine the distribution of and amount of osteoinductive agent and/or therapeutic agent incorporated. The rate of release or elation profile of the therapeutic agent may be controlled. Methods for producing such a bone implantable medical device are also disclosed and employ the use of accelerated Neutral Beam irradiation, wherein the Neutral Beam is derived from an accelerated gas cluster ion beam irradiation for improving bone integration.

公开(公告)号：US20180301314A1

公开(公告)日：2018-10-18

申请号：US15890585

申请日：2018-02-07

Applicant: JEOL Ltd.

Inventor： Kazuya Omoto

IPC: H01J37/05 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/05 ,  H01J37/1472 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/24485 ,  H01J2237/2802

Abstract: There is provided an energy filter capable of being simplified in structure and of achieving low aberrations. The energy filter (100) includes a first sector magnet (10) and a second sector magnet (20). The first and second magnets (10, 20) are configured mirror-symmetrically with respect to a symmetry plane (M). There are one focal point of crossover in the X direction and one focal point of crossover in the Y direction. The focal point of crossover in the X direction and the focal point of crossover in the Y direction are at an energy dispersive plane (S2). There are two focal points of image in the X direction and two focal points of image in the Y direction. The focal points of image in the X direction and the focal points of image in the Y direction are at the symmetry plane (M) and at an achromatic plane (A2).

公开(公告)号：US20180269054A1

公开(公告)日：2018-09-20

申请号：US15981795

申请日：2018-05-16

Applicant: SCIENTA OMICRON AB

Inventor： Björn WANNBERG

IPC: H01J49/48 ,  H01J49/06 ,  H01J37/05 ,  H01J49/00

CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

公开(公告)号：US20180254169A1

公开(公告)日：2018-09-06

申请号：US15971896

申请日：2018-05-04

Applicant: FEI Company

Inventor： Alexander Henstra ,  Peter Christiaan Tiemeijer

IPC: H01J37/28 ,  H01J37/26 ,  H01J37/14 ,  H01J37/22 ,  H01J37/05

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/14 ,  H01J37/22 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2802

Abstract: A method of operating a Post Column Filter (PCF) in a Scanning/Transmission Electron Microscope, and a Post Column Filter configured to operate according to the method. In an embodiment, the method includes receiving, at an entrance plane, an incoming beam of electrons; dispersing, by an energy dispersive element, the incoming beam of electrons into an energy dispersed beam of electrons; disposing a first plurality of quadrupoles between the entrance plane and a slit plane; operating the PCF in an EELS mode; and operating the PCF in an EFTEM mode. Operating the PCF in an EELS mode includes exciting one or more quadrupoles of the first plurality of quadrupoles at a first excitation level, wherein the first excitation level does not enlarge the energy dispersion of the energy dispersed beam of electrons; and forming an image of the energy dispersed beam of electrons on the image plane, the image being an EELS spectrum. Operating the PCF in the EFTEM mode includes including a slit at the slit plane in an optical path; exciting one or more quadrupoles of the first plurality of quadrupoles at a second excitation level, the second excitation level different from the first excitation level; forming an energy dispersed focus of the energy dispersed beam of electrons on the slit at the slit plane; and enlarging the energy dispersion of the energy dispersed beam of electrons caused by the energy dispersive element based on the one or more first plurality quadrupoles excited at the second excitation level.

公开(公告)号：US10037862B2

公开(公告)日：2018-07-31

申请号：US15163401

申请日：2016-05-24

Applicant: Carl Zeiss Microscopy, LLC

Inventor： Sybren J. Sijbrandij ,  John A. Notte, IV ,  Raymond Hill

IPC: H01J37/05 ,  H01J37/244

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/24564

Abstract: A charged particle detecting device includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure; a second charged particle detector at the terminal portion of the holding structure; a detector head at the terminal portion of the holding structure; and a first electrode which is transmissive for the first and second species of charged particles covering an entrance opening of the detector head.

公开(公告)号：US20180211813A1

公开(公告)日：2018-07-26

申请号：US15933121

申请日：2018-03-22

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Richard C. Svrluga

IPC: H01J37/05 ,  H05H3/02 ,  H01J37/317 ,  H01J37/147

CPC classification number: H01J37/05 ,  A61F2/82 ,  A61F2/90 ,  A61F2240/001 ,  A61F2250/0068 ,  H01J37/147 ,  H01J37/317 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  H05H3/02 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/30

Abstract: A medical device for surgical implantation adapted to serve as a drug delivery system has one or more drug loaded holes with barrier layers to control release or elution of the drug from the holes or to control inward diffusion of fluids into the holes. The barrier layers are non-polymers and are formed from the drug material itself by beam processing. The holes may be in patterns to spatially control drug delivery. Flexible options permit combinations of drugs, variable drug dose per hole, multiple drugs per hole, temporal control of drug release sequence and profile. Methods for forming such a drug delivery system are also disclosed. Gas cluster ion beam and/or accelerated Neutral Beam derived from an accelerated gas cluster ion beam may be employed.

公开(公告)号：US10002740B2

公开(公告)日：2018-06-19

申请号：US15667040

申请日：2017-08-02

Applicant: EBARA CORPORATION

Inventor： Masahiro Hatakeyama ,  Ryo Tajima ,  Kenichi Suematsu ,  Kenji Watanabe ,  Yasushi Toma ,  Kenji Terao ,  Takeshi Murakami

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/141 ,  H01J37/26 ,  H01J37/244

CPC classification number: H01J37/05 ,  H01J37/12 ,  H01J37/141 ,  H01J37/147 ,  H01J37/244 ,  H01J37/26 ,  H01J37/29 ,  H01J2237/0268 ,  H01J2237/16 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2817

Abstract: An electron beam inspection device includes: a primary electron optical system that irradiates the surface of a sample with an electron beam; and a secondary electron optical system that gathers secondary electrons emitted from the sample and forms an image on the sensor surface of a detector. An electron image of the surface of the sample is obtained from a signal detected by the detector, and the sample is inspected. A cylindrical member that is formed with conductors stacked as an inner layer and an outer layer, and an insulator stacked as an intermediate layer is provided inside a lens tube into which the secondary electron optical system is incorporated. An electron orbital path is formed inside the cylindrical member, and the members constituting the secondary electron optical system are arranged outside the cylindrical member.

公开(公告)号：US20180151329A1

公开(公告)日：2018-05-31

申请号：US15364145

申请日：2016-11-29

Applicant: FEI Company

Inventor： Otger Jom Luiten ,  Petrus Henricus Antonius Mutsaers ,  Jasper F.M. van Rens ,  Wouter Verhoeven ,  Erik René Kieft

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/05 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/0437 ,  H01J2237/2442 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/2626 ,  H01J2237/2802

Abstract: An apparatus for performing charged particle spectroscopy, comprising: A source, for producing a pulsed beam of charged particles that propagate along a beam path; A specimen holder, for holding a specimen at an irradiation position in said beam path; A detector arrangement, for performing energy-differentiated detection of charged particles that traverse said specimen, wherein, between said source and said detector arrangement, said beam path successively traverses: An energizing cavity, for applying a time-dependent accelerating field to said beam; A primary drift space; Said irradiation position; A temporal focusing cavity, for converting an energy differential in said beam into a time-of-flight differential; A secondary drift space.

公开(公告)号：US20180114672A1

公开(公告)日：2018-04-26

申请号：US15527119

申请日：2016-03-24

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  Ju Hwang KIM ,  In Yong PARK

IPC: H01J37/30 ,  H01J37/305

CPC classification number: H01J37/3007 ,  H01J29/62 ,  H01J29/70 ,  H01J31/24 ,  H01J37/05 ,  H01J37/3005 ,  H01J37/3053 ,  H01J2237/03 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/103 ,  H01J2237/12 ,  H01J2237/2802

Abstract: The present invention relates to a charged particle beam apparatus enabling a selection of a charged particle beam in a specified energy range by symmetrically arranging cylindrical electrostatic lenses deflecting a path of the charged particle beam and disposing an energy selection aperture between the cylindrical electrostatic lenses. Since an integral structure in which a central electrode and a plurality of electrodes that are arranged at a front portion and a rear portion in relation to the central electrode of a monochromator are fixed to each other through insulator, is applied, a mechanism for adjusting an offset with respect to an optical axis is simplified as compared to the case of separately providing the lenses at the front portion and the rear portion, respectively, and a secondary aberration is canceled in an exit plane due to symmetry of an optical system.

公开(公告)号：US09905391B2

公开(公告)日：2018-02-27

申请号：US14826007

申请日：2015-08-13

Applicant: KLA-Tencor Corporation

Inventor： Xinrong Jiang

IPC: H01J1/50 ,  H01J37/05

CPC classification number: H01J37/05 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: A selectively configurable system for directing an electron beam with a limited energy spread to a sample includes an electron source to generate an electron beam having an energy spread including one or more energies, an aperture having an on-axis opening and an off-axis opening, a first assembly of one or more electron lenses with selectively configurable focal powers positioned to collect the beam from the source and direct the beam to the aperture, a second assembly of one or more selectively configurable electron lenses positioned to collect the beam, a sample stage, and an electron inspection sub-system including electron optics positioned to direct the beam onto one or more samples. The first assembly includes an off-axis electron lens for interacting with the beam at an off-axis position and introducing spatial dispersion to the beam when configured with a nonzero focal power, thus filtering the energy spread.