公开(公告)号：US20150371811A1

公开(公告)日：2015-12-24

申请号：US14696569

申请日：2015-04-27

Applicant: Korea Research Institute of Standards and Science

Inventor： Takashi OGAWA ,  Bok Lae CHO ,  Sang Jung AHN ,  In Yong PARK ,  Cheolsu HAN

IPC: H01J37/12 ,  G01N23/225 ,  H01J49/44 ,  H01J37/21 ,  H01J37/05

CPC classification number: H01J37/05 ,  G01N23/2251 ,  H01J37/12 ,  H01J37/21 ,  H01J49/44 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

Abstract translation: 本文公开了一种单色仪和包括该单色仪的带电粒子束装置。 单色仪可以包括第一静电透镜，其被配置为具有由入射在第一静电透镜上的发射体放电的带电粒子束，折射带电粒子束的射线，并且包括多个电极和与该第一静电透镜间隔开的第二静电透镜 第一静电透镜以特定间隔被配置为具有与第一静电透镜的中心轴线相同设置的中心轴，由入射在第二静电透镜上的第一静电透镜输出的带电粒子束折射带电的光线 粒子束，并且包括多个电极。 因此，具有即使在通过单色仪之后，带电粒子束也具有优异的特性的优点。

公开(公告)号：US20250046562A1

公开(公告)日：2025-02-06

申请号：US18519865

申请日：2023-11-27

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  In Yong PARK ,  Jeong Woong LEE

IPC: H01J37/12 ,  H01J37/244 ,  H01J37/28

Abstract: An objective lens for a charged particle beam apparatus that provides a charged particle beam to a sample, includes: a first electrode exposed to face a sample; a second electrode configured to focus a charged particle beam to the sample; a third electrode comprising a conical tip and a body extending from the tip; and a fourth electrode located in the body of the third electrode. Each of the first electrode, the second electrode, the third electrode, and the fourth electrode has a through-hole, and the charged particle beam is provided to the sample through the through-hole in response to a voltage applied.

公开(公告)号：US20190154502A1

公开(公告)日：2019-05-23

申请号：US15527588

申请日：2016-05-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  Ju Hwang KIM

IPC: G01J3/12 ,  H01J37/26 ,  H01J37/05 ,  G01N23/2251

Abstract: The present invention relates to an electron beam apparatus including a monochromator in which cylindrical electrostatic lenses for deflecting a path of an electron beam in the lenses are arranged symmetrically and an aperture including a plurality of selectable slits is disposed therebetween to be able to select an electron beam having a specified energy range. The electron beam apparatus has a monochromator having high resolution and excellent stability and maintainability by disposing slits and circular openings in one aperture part in parallel arrangement, thereby improving spatial resolution and energy resolution.

公开(公告)号：US20250046564A1

公开(公告)日：2025-02-06

申请号：US18519810

申请日：2023-11-27

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  In Yong PARK ,  Jeong Woong LEE

IPC: H01J37/147 ,  H01J37/08 ,  H01J37/20 ,  H01J37/22 ,  H01J37/24 ,  H01J37/244 ,  H01J37/28

Abstract: A charged particle beam apparatus includes: a stage on which a sample is placed; a first charged particle beam unit comprising a charged particle source, a detector, and a first objective lens configured to irradiate a sample with a charged particle beam of charged particles generated by the charged particle source and induce secondary electrons generated from the sample to the detector; and a second charged particle beam unit comprising a second objective lens. An incoming electric field is generated between the first objective lens and the sample to pull the secondary electrons into the first objective lens. An induced electric field is generated between the second objective lens and the sample to guide the secondary electrons to travel to the detector.

公开(公告)号：US20180114672A1

公开(公告)日：2018-04-26

申请号：US15527119

申请日：2016-03-24

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  Ju Hwang KIM ,  In Yong PARK

IPC: H01J37/30 ,  H01J37/305

CPC classification number: H01J37/3007 ,  H01J29/62 ,  H01J29/70 ,  H01J31/24 ,  H01J37/05 ,  H01J37/3005 ,  H01J37/3053 ,  H01J2237/03 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/103 ,  H01J2237/12 ,  H01J2237/2802

Abstract: The present invention relates to a charged particle beam apparatus enabling a selection of a charged particle beam in a specified energy range by symmetrically arranging cylindrical electrostatic lenses deflecting a path of the charged particle beam and disposing an energy selection aperture between the cylindrical electrostatic lenses. Since an integral structure in which a central electrode and a plurality of electrodes that are arranged at a front portion and a rear portion in relation to the central electrode of a monochromator are fixed to each other through insulator, is applied, a mechanism for adjusting an offset with respect to an optical axis is simplified as compared to the case of separately providing the lenses at the front portion and the rear portion, respectively, and a secondary aberration is canceled in an exit plane due to symmetry of an optical system.