公开(公告)号：US09406496B2

公开(公告)日：2016-08-02

申请号：US13681245

申请日：2012-11-19

Applicant: Universitat de Barcelona ,  Nanomegas SPRL ,  AppFive LLC

Inventor： Sonia Estrade Albiol ,  Joaquin Portillo Serra ,  Francisca Peiró Martinez ,  José Manuel Rebled Corsellas ,  Lluís Yedra Cardona ,  Stavros Nicolopoulos ,  Steven Kim ,  Jon Karl Weiss

IPC: G01N23/225 ,  H01J49/44 ,  H01J37/28

CPC classification number: H01J49/44 ,  G01N23/2251 ,  G01N2223/051 ,  G01N2223/402 ,  H01J37/28 ,  H01J2237/1505 ,  H01J2237/1506 ,  H01J2237/1507 ,  H01J2237/2808

Abstract: A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.

Abstract translation: 公开了用于改善电子能量损失光谱（EELS）中的特征峰值信号和结晶材料的能量色散X射线光谱（EDS）测量的方法和系统。 应用波束扫描协议，其在获取光谱数据的同时改变入射光束的倾斜度，方位角或其组合。 该方法和系统可以应用于组合映射。

公开(公告)号：US20130341504A1

公开(公告)日：2013-12-26

申请号：US13913240

申请日：2013-06-07

Applicant: Mark Neill ,  Mehran Nasser-Ghodsi ,  Christopher Sears

Inventor： Mark Neill ,  Mehran Nasser-Ghodsi ,  Christopher Sears

IPC: H01J49/00 ,  H01J49/44

CPC classification number: H01J37/26 ,  G01N23/2276 ,  G01N2223/345 ,  G06K9/00563 ,  G06K9/6271 ,  H01J49/0036 ,  H01J49/44

Abstract: System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.

Abstract translation: 将俄歇电子谱分解为元素和化学成分的系统和方法包括调节和输入光谱以产生归一化输入光谱; 确定归一化输入光谱和存储的基本光谱特征之间的统计相关性; 以及从所述统计相关性表征所述输入光谱中的元素或化学物质，其中所述调节所述输入光谱包括估计所述输入光谱中的非俄歇电子的背景信号并从所述输入光谱中减去所估计的背景信号。

公开(公告)号：US06903549B2

公开(公告)日：2005-06-07

申请号：US10362181

申请日：2001-08-08

Applicant: Hans W. P. Koops ,  Alexander Kaya

Inventor： Hans W. P. Koops ,  Alexander Kaya

IPC: H01J49/06 ,  H01J49/44 ,  H01J49/48 ,  H01L29/06 ,  H01L29/76 ,  G01V3/00

CPC classification number: B82Y10/00 ,  H01J49/44 ,  H01L29/7613

Abstract: Inordinate localised systems are used at room temperature in a novel device in the form of an electron spectrometer for utilising single-electron electronic applications. Said electron spectrometer device consists of a nanocrystalline metal or a nanocrystalline semiconductor material used as conductor strip connection in the form of an inlet or an outlet for single-electron electronic components and circuits consisting of lithographically produced quantum dots. The resulting single-electron electronic device consisting of quantum dots is supplied with energetically very sharply defined electrons. Said device can thus be operated at room temperature, undisturbed by phonons.

Abstract translation: 在室温下使用过量的局部化系统以电子光谱仪形式用于利用单电子电子应用的新型器件。 所述电子分光计装置由纳米晶体金属或纳米晶体半导体材料组成，该材料用作单晶电子元件入口或出口形式的导体条连接，以及由光刻产生的量子点组成的电路。 所产生的由量子点组成的单电子电子器件被提供能量非常清晰的电子。 因此，所述装置可以在室温下操作，而不被声子干扰。

公开(公告)号：US4090076A

公开(公告)日：1978-05-16

申请号：US705982

申请日：1976-07-16

Applicant: Heinrich Erwin Hunziker ,  Robert Kenyon Nesbet

Inventor： Heinrich Erwin Hunziker ,  Robert Kenyon Nesbet

IPC: G01N23/227 ,  G01N23/225 ,  G21K1/10 ,  H01J49/44 ,  H01J39/00

CPC classification number: G21K1/10 ,  H01J49/44

Abstract: A device and method for obtaining high resolution of electron energy in an electron beam is described. The device has a resonance chamber containing a gas which exhibits a narrow scattering resonance at a specific electron energy value. The device utilizes the narrow resonance property of the gas to filter the electron energy spectrum at that energy value. A preferred embodiment is a spectrometer having an electron accelerator, an electromagnetic filter, a resonance chamber containing helium, and a trapped electron detector device. The electrons in the beam are accelerated and the beam is passed through an electromagnetic filter centered at approximately 20.614 eV. The filtered beam passes into a resonance chamber where the electrons have inelastic collisions with the helium atoms to produce the He2.sup.1 S excited state. The He2.sup.1 S scattering resonance has a narrow width of less than 0.001 eV at its energy threshold of 20.614 eV and serves as a filter. Due to the steepness of the initial rise of the resonance structure the resolution of the spectrometer is about 0.0001 eV. The trapped electron device then detects the flux density of the scattered electrons.

Abstract translation: 描述了一种用于在电子束中获得高分辨率的电子能量的装置和方法。 该装置具有包含在特定电子能量值下呈现窄散射共振的气体的共振室。 该装置利用气体的窄共振特性来以该能量值过滤电子能谱。 优选的实施例是具有电子加速器，电磁滤波器，含有氦的共振室和被俘获的电子检测器装置的光谱仪。 光束中的电子被加速并且光束通过以大约20.614eV为中心的电磁滤波器。 滤波的光束进入共振室，其中电子与氦原子具有非弹性碰撞以产生He21S激发态。 He21S散射谐振在20.614eV的能量阈值下具有小于0.001eV的窄宽度，并且用作滤光器。 由于共振结构的初始上升的陡峭度，光谱仪的分辨率约为0.0001eV。 然后，捕获的电子器件检测散射电子的通量密度。

公开(公告)号：US20170032952A1

公开(公告)日：2017-02-02

申请号：US15300998

申请日：2015-03-31

Applicant: LECO Corporation

Inventor： Anatoly N. Verenchikov

IPC: H01J49/40 ,  H01J49/00 ,  G01N30/72

CPC classification number: H01J49/403 ,  G01N30/72 ,  H01J49/0031 ,  H01J49/406 ,  H01J49/44

Abstract: Apparatuses (41, 91, 111, 115, 121, 151) and methods (31) for time-of-flight mass spectrometry providing effective pulsed conversion of continuous ion beams into pulsed ion packets is disclosed. Bunching of energetic continuous ion beams forms ion packets, which are filtered by a subsequent isochronous energy filter (49, 79, 81-84, 110). The bunching method is particularly suitable for ion sources with relatively large spatial emittance, otherwise unable to fir the acceptance of orthogonal accelerators. The method is particularly suitable for multi-reflecting TOF MS, which accommodates small size ion packets and where the duty cycle advantage of orthogonal accelerators is minor.

Abstract translation: 公开了用于飞行时间质谱的装置（41,91,111,115,121,151）和方法（31），其提供连续离子束到脉冲​​离子包的有效脉冲转换。 能量连续离子束的聚束形成离子包，其被随后的等时能量过滤器（49,79,81-84,110）过滤。 聚束法特别适用于具有较大空间发射度的离子源，否则不能使正交加速器的接受性降低。 该方法特别适用于容纳小尺寸离子包的多反射TOF MS，其中正交加速器的占空比优点较小。

公开(公告)号：US20040204640A1

公开(公告)日：2004-10-14

申请号：US10362181

申请日：2003-06-27

Inventor： Hans W P Koops ,  Alexander Kaya

IPC: A61B005/05

CPC classification number: B82Y10/00 ,  H01J49/44 ,  H01L29/7613

Abstract: Inordinate localised systems are used at room temperature in a novel device in the form of an electron spectrometer for utilising single-electron electronic applications. Said electron spectrometer device consists of a nanocrystalline metal or a nanocrystalline semiconductor material used as conductor strip connection in the form of an inlet or an outlet for single-electron electronic components and circuits consisting of lithographically produced quantum dots. The resulting single-electron electronic device consisting of quantum dots is supplied with energetically very sharply defined electrons. Said device can thus be operated at room temperature, undisturbed by phonons.

Abstract translation: 在室温下使用过量的局部化系统以电子光谱仪形式用于利用单电子电子应用的新型器件。 所述电子分光计装置由纳米晶体金属或纳米晶体半导体材料组成，该材料用作单晶电子元件入口或出口形式的导体条连接，以及由光刻产生的量子点组成的电路。 所产生的由量子点组成的单电子电子器件被提供能量非常清晰的电子。 因此，所述装置可以在室温下操作，而不被声子干扰。

公开(公告)号：US06797951B1

公开(公告)日：2004-09-28

申请号：US10291455

申请日：2002-11-12

Applicant: Carl L. Enloe

Inventor： Carl L. Enloe

IPC: H01J3712

CPC classification number: H01J49/44 ,  H01J2237/24485

Abstract: A charged particle analyzer electrode assembly of miniaturized physical size and photolithographic process element fabrication capability. The provided electrode assembly is made of conductive materials including semiconductor materials and metal materials. Individual electrodes in the assembly are made of for example plural layers of semiconductor or metal held in place by discrete insulator layers. Bandpass particle energy selection characteristics are achieved in the analyzer through a combination of analyzer particle path geometry configuration and the particle acceleration electrical potential selection. Selected particles are allowed to pass through the analyzer under these influences and non selected particles are excluded. Assembly of individual analyzer electrode assemblies into a multiple element analyzer array usable for example on an aircraft or spacecraft is included. Both millimeter sized and micrometer sized arrangements of the invention are contemplated.

Abstract translation: 一种小型物理尺寸和光刻工艺元件制造能力的带电粒子分析仪电极组件。 所提供的电极组件由包括半导体材料和金属材料的导电材料制成。 组件中的单个电极由例如由分立的绝缘体层保持就位的多层半导体或金属制成。 通过分析器粒子路径几何结构和粒子加速电位选择的组合，在分析仪中实现带通粒子能量选择特性。 在这些影响下允许选定的颗粒通过分析仪，并排除未选择的颗粒。 包括将各个分析器电极组件组装成可用于例如在飞机或航天器上的多元分析器阵列。 考虑了本发明的毫米尺寸和千分尺尺寸的布置。

公开(公告)号：US4710625A

公开(公告)日：1987-12-01

申请号：US787098

申请日：1985-10-15

Applicant: Michael A. Kelly

Inventor： Michael A. Kelly

IPC: G01Q70/00 ,  H01J37/244 ,  H01J49/44

CPC classification number: H01J37/244 ,  H01J49/44 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585

Abstract: Charged particles (ions or electrons) are directed into a drift tube closed off at the upstream and downstream ends by electrical grid members and having an axial magnetic field therein with a substantial radial component. The grids are pulsed to trap the charged particles in the drift tube where the radial magnetic field component mixes their axial and orbital momenta. The potential of the downstream grid is successively lowered for successively extracting particles having a successively lower energy. This analyzer is particularly useful for analyzing surface constitutents.

Abstract translation: 带电粒子（离子或电子）被引导到由电网构件在上游和下游端封闭的漂移管，并且其中具有基本径向分量的轴向磁场。 网格被脉冲以捕获漂移管中的带电粒子，其中径向磁场分量混合其轴向和轨道动量。 相继降低下游栅格的电位，连续提取具有连续较低能量的颗粒。 该分析仪特别适用于分析表面组分。

公开(公告)号：US4514682A

公开(公告)日：1985-04-30

申请号：US398542

申请日：1982-07-15

Applicant: Hans-Peter Feuerbaum

Inventor： Hans-Peter Feuerbaum

IPC: G01R31/26 ,  G01Q30/02 ,  G01R31/302 ,  H01J37/252 ,  H01J49/08 ,  H01J49/44 ,  H01L21/66 ,  G01N27/00

CPC classification number: H01J49/08 ,  H01J49/44

Abstract: An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.

Abstract translation: 用于测量在诸如集成电路芯片的样本上发生的电压的改进的二次电子光谱仪利用电子探针具有用于独立于测量点处的二次电子的角分布来测量二次电子的能量分布的光栅结构 在标本上。 如果二次电子光谱仪具有提取电极和减速电极，则光栅结构是球形对称的。

公开(公告)号：US09984863B2

公开(公告)日：2018-05-29

申请号：US15300998

申请日：2015-03-31

Applicant: LECO Corporation

Inventor： Anatoly N. Verenchikov

IPC: H01J49/40 ,  G01N30/72 ,  H01J49/00 ,  H01J49/44

CPC classification number: H01J49/403 ,  G01N30/72 ,  H01J49/0031 ,  H01J49/406 ,  H01J49/44

Abstract: Apparatuses and methods for time-of-flight mass spectrometry providing effective pulsed conversion of continuous ion beams into pulsed ion packets is disclosed. Bunching of energetic continuous ion beams forms ion packets, which are filtered by a subsequent isochronous energy filter. The bunching method is particularly suitable for ion sources with relatively large spatial emittance, otherwise unable to fir the acceptance of orthogonal accelerators. The method is particularly suitable for multi-reflecting TOF MS, which accommodates small size ion packets and where the duty cycle advantage of orthogonal accelerators is minor.