公开(公告)号：US20190154502A1

公开(公告)日：2019-05-23

申请号：US15527588

申请日：2016-05-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  Ju Hwang KIM

IPC: G01J3/12 ,  H01J37/26 ,  H01J37/05 ,  G01N23/2251

Abstract: The present invention relates to an electron beam apparatus including a monochromator in which cylindrical electrostatic lenses for deflecting a path of an electron beam in the lenses are arranged symmetrically and an aperture including a plurality of selectable slits is disposed therebetween to be able to select an electron beam having a specified energy range. The electron beam apparatus has a monochromator having high resolution and excellent stability and maintainability by disposing slits and circular openings in one aperture part in parallel arrangement, thereby improving spatial resolution and energy resolution.

公开(公告)号：US20180114672A1

公开(公告)日：2018-04-26

申请号：US15527119

申请日：2016-03-24

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Takashi OGAWA ,  Ju Hwang KIM ,  In Yong PARK

IPC: H01J37/30 ,  H01J37/305

CPC classification number: H01J37/3007 ,  H01J29/62 ,  H01J29/70 ,  H01J31/24 ,  H01J37/05 ,  H01J37/3005 ,  H01J37/3053 ,  H01J2237/03 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/103 ,  H01J2237/12 ,  H01J2237/2802

Abstract: The present invention relates to a charged particle beam apparatus enabling a selection of a charged particle beam in a specified energy range by symmetrically arranging cylindrical electrostatic lenses deflecting a path of the charged particle beam and disposing an energy selection aperture between the cylindrical electrostatic lenses. Since an integral structure in which a central electrode and a plurality of electrodes that are arranged at a front portion and a rear portion in relation to the central electrode of a monochromator are fixed to each other through insulator, is applied, a mechanism for adjusting an offset with respect to an optical axis is simplified as compared to the case of separately providing the lenses at the front portion and the rear portion, respectively, and a secondary aberration is canceled in an exit plane due to symmetry of an optical system.