Charged particle lithography system with a long shape illumination beam
    2.
    发明授权
    Charged particle lithography system with a long shape illumination beam 有权
    具有长形照明光束的带电粒子光刻系统

    公开(公告)号:US09202662B2

    公开(公告)日:2015-12-01

    申请号:US13756178

    申请日:2013-01-31

    摘要: A system includes an integrated circuit (IC) design data base having a feature, a source configured to generate a radiation beam, a pattern generator (PG) including a mirror array plate and an electrode plate disposed over the mirror array plate, wherein the electrode plate includes a lens let having a first dimension and a second dimension perpendicular to the first dimension with the first dimension larger than the second dimension so that the lens let modifies the radiation beam to form the long shaped radiation beam, and a stage configured secured the substrate. The system further includes an electric field generator connecting the mirror array plate. The mirror array plate includes a mirror. The mirror absorbs or reflects the radiation beam. The radiation beam includes electron beam or ion beam. The second dimension is equal to a minimum dimension of the feature.

    摘要翻译: 一种系统包括具有特征的集成电路(IC)设计数据库,被配置为产生辐射束的源,包括反射镜阵列板的图案发生器(PG)和设置在所述反射镜阵列板上的电极板,其中所述电极 板包括透镜,其具有垂直于第一尺寸的第一尺寸和第二尺寸,其第一尺寸大于第二尺寸,使得透镜使得辐射束修改以形成长形辐射束,并且被配置为将 基质。 该系统还包括连接镜阵列板的电场发生器。 镜阵列板包括镜子。 镜子吸收或反射辐射束。 辐射束包括电子束或离子束。 第二个维度等于该特征的最小尺寸。

    Streak tube and streak device including same
    3.
    发明授权
    Streak tube and streak device including same 有权
    条纹管和包括其的条纹装置

    公开(公告)号:US08952604B2

    公开(公告)日:2015-02-10

    申请号:US14354663

    申请日:2012-08-07

    摘要: A steak tube 1 has a container 2 with an entrance plate 2a and an output plate 2b; a photocathode 7 disposed in the container 2 and configured to emit electrons according to light to be measured, the light having been incident through the entrance plate 2a; a mesh electrode 3, a first focusing electrode 4, and an aperture electrode 5 forming an axially symmetric electron lens for focusing the electrons emitted from the photocathode 7, toward the output plate 2b; a sweep electrode 6 disposed in the container 2 and configured to sweep the electrons focused by the axially symmetric electron lens, in a sweep direction along the output plate 2b; and a second focusing electrode 9 disposed between the entrance plate 2a and the output plated 2b and forming a one-dimensional electron lens for focusing the electrons in the sweep direction.

    摘要翻译: 牛排管1具有带有入口板2a和输出板2b的容器2; 设置在容器2中并被配置为根据待测光发射电子的光电阴极7,该光已经通过入口板2a入射; 形成用于将从光电阴极7发射的电子聚焦到轴向对称电子透镜的网状电极3,第一聚焦电极4和孔径电极5朝向输出板2b; 设置在容器2中并构造成沿着输出板2b沿扫掠方向扫掠由轴对称电子透镜聚焦的电子的扫掠电极6; 以及设置在入口板2a和输出电镀层2b之间的第二聚焦电极9,并且形成用于在扫掠方向上聚焦电子的一维电子透镜。

    Color flat-panel display
    4.
    发明申请
    Color flat-panel display 失效
    彩色平板显示器

    公开(公告)号:US20030080675A1

    公开(公告)日:2003-05-01

    申请号:US10284368

    申请日:2002-10-31

    IPC分类号: H01J001/62

    摘要: Disclosed is a color flat-panel display, which includes a rear glass, a rear electrode, a filament cathode for emitting electrons, a control electrode, a signal modulation electrode, a focus electrode, a horizontal deflection electrode, a vertical deflection electrode, a front glass on which a phosphor screen is formed, and spacers for maintaining an interval between the electrodes. Each electrode member of the control electrode, the signal modulation electrode, the focus electrode, the horizontal deflection electrode and the vertical deflection electrode includes an insulator and a conductive layer formed on a surface of the insulator and acting as an electrode.

    摘要翻译: 公开了一种彩色平板显示器,其包括后玻璃,后电极,用于发射电子的灯丝阴极,控制电极,信号调制电极,聚焦电极,水平偏转电极,垂直偏转电极, 其上形成荧光屏的前玻璃和用于保持电极之间的间隔的间隔物。 控制电极,信号调制电极,聚焦电极,水平偏转电极和垂直偏转电极的每个电极构件包括形成在绝缘体的表面上并用作电极的绝缘体和导电层。

    Electron gun display device provided with an electron gun
    5.
    发明授权
    Electron gun display device provided with an electron gun 失效
    配有电子枪的电子枪显示装置

    公开(公告)号:US06509680B2

    公开(公告)日:2003-01-21

    申请号:US09464868

    申请日:1999-12-16

    IPC分类号: H01J2946

    摘要: The stray emission in an electron gun comprising a main lens system with one or more intermediate electrodes (42, 43, 44) between the focus electrode (41) and the anode electrode (45) is reduced if at least one of the apertures of the main lens system following the focus electrode has apertures which are smaller than those of the focus electrode. The optimal stray emission situation can be found by designing all the apertures of the main lens system. In order to manufacture an electron gun according to the invention, it is advantageous to have an outside reference system for gun mounting, because it will no longer be possible to center the electrodes on pins through the apertures.

    摘要翻译: 包括具有在聚焦电极(41)和阳极电极(45)之间的一个或多个中间电极(42,43,44)的主透镜系统的电子枪中的杂散发射减少,如果至少一个 跟随聚焦电极的主透镜系统具有小于聚焦电极的孔径。 通过设计主透镜系统的所有孔可以发现最佳的杂散发射情况。 为了制造根据本发明的电子枪,有利的是具有用于枪安装的外部参考系统,因为将不再能够通过孔将电极定位在销上。

    Color image display systems
    6.
    发明授权
    Color image display systems 失效
    彩色图像显示系统

    公开(公告)号:US4620133A

    公开(公告)日:1986-10-28

    申请号:US343734

    申请日:1982-01-29

    CPC分类号: H01J29/62 H01J29/51

    摘要: Compact deflection yoke in self-converging display system encircles adjoining segments of neck and funnel sectons of color picture tube having close beam spacing (200 mils) in electron gun to achieve low S-spacing dimension between converging beams in deflection center plane. Neck diameter is sufficiently large (1145 mils) to accommodate main focusing lens having major transverse dimension more than three and half times the beam spacing in the electron gun. Main focusing lens is formed between final focus electrodes having recessed apertures at juxtaposed ends. Walls of successive recesses have "racetrack"-like and "dogbone"-like contours. Asymmetric beam forming lenses provide each beam traversing the main focusing lens with asymmetric cross-section having relatively reduced vertical dimension.

    摘要翻译: 自会聚显示系统中的紧凑型偏转线圈围绕电子枪中具有近距离光束间隔(200密耳)的彩色显像管的颈部和漏斗形部分的相邻部分,以实现偏转中心平面中的会聚光束之间的低S间距尺寸。 颈部直径足够大(1145密耳)以适应具有大于电子枪中的光束间隔的三倍半倍的主聚焦透镜。 主聚焦透镜形成在具有并列端部的凹孔的最终焦点电极之间。 连续凹陷的墙壁具有“跑道”状和“狗骨状”状轮廓。 非对称光束形成透镜提供穿过主聚焦透镜的每个光束具有具有相对减小的垂直尺寸的不对称横截面。

    Cathode ray tube with an electron lens for deflection amplification
    7.
    发明授权
    Cathode ray tube with an electron lens for deflection amplification 失效
    阴极射线管用电子透镜进行偏转放大

    公开(公告)号:US4543508A

    公开(公告)日:1985-09-24

    申请号:US591515

    申请日:1984-03-20

    申请人: Kimiharu Saito

    发明人: Kimiharu Saito

    CPC分类号: H01J29/62 H01J29/80

    摘要: A generally box shaped, electronic lens system is incorporated in a cathode ray tube for amplification of both horizontal and vertical deflections of the electron beam. The lens system comprises two electrodes, one partly nested in the other with an insulating gap therebetween and both so disposed as to encompass the trajectories of the beam from the deflection system to the target of the CRT. A postaccelerating or other postdeflection electrode is provided to exert its field upon at least the target side end of the lens system. Upon application of prescribed potentials to the two lens electrodes and to the postdeflection electrode, the lens system provides a quadrupolar lens therein for deflection amplification in both directions. The lens system further coacts with the postdeflection electrode to create another electron lens adjacent its beam exit end for converging the beam in one of the orthogonal directions of beam deflection.

    摘要翻译: 通常将盒形的电子透镜系统并入阴极射线管中,用于放大电子束的水平和垂直偏转。 透镜系统包括两个电极,一个部分地嵌套在另一个之间,其间具有绝缘间隙,并且两个电极被设置成包围从偏转系统到CRT的目标的光束的轨迹。 提供后加速或其它后置反射电极以至少在透镜系统的目标侧端施加其场。 当对两个透镜电极和后置反射电极施加规定的电位时,透镜系统在其中在两个方向上提供用于偏转放大的四极透镜。 透镜系统还与后置反射电极共同作用,以产生邻近光束出射端的另一个电子透镜,用于在光束偏转的正交方向之一处会聚光束。

    Color picture tube having an improved expanded focus lens type inline
electron gun
    8.
    发明授权
    Color picture tube having an improved expanded focus lens type inline electron gun 失效
    彩色显像管具有改进的聚焦透镜型直列电子枪

    公开(公告)号:US4400649A

    公开(公告)日:1983-08-23

    申请号:US282231

    申请日:1981-07-10

    申请人: Hsing-Yao Chen

    发明人: Hsing-Yao Chen

    IPC分类号: H01J29/50 H01J29/62

    CPC分类号: H01J29/503 H01J29/62

    摘要: An improved color picture tube has an inline electron gun for generating and directing three electron beams, a center beam and two side beams, along coplanar paths toward a screen of the tube. The gun includes a main focus lens for focusing the electron beams. The main focus lens is formed by two spaced electrode members each having three separate inline apertures therein. Each electrode also includes a peripheral rim. The peripheral rims of the two electrodes face each other. The apertured portion of each electrode is within a recess set back from the rim. The width of the recess in at least one of the electrodes is wider at the center beam path than at the side beam paths, measured perpendicular to the plane containing the electron beam paths.

    摘要翻译: 一种改进的彩色显像管具有一个一字形电子枪,用于沿着朝向管的屏幕的共面路径产生和引导三束电子束,中心光束和两个侧光束。 枪包括用于聚焦电子束的主聚焦透镜。 主聚焦透镜由两个间隔开的电极构件形成,每个电极构件在其中具有三个单独的内联孔。 每个电极还包括外围边缘。 两个电极的外围边缘彼此面对。 每个电极的有孔部分在从边缘回退的凹部内。 至少一个电极中的凹槽的宽度在中心光束路径处比在垂直于包含电子束路径的平面测量的侧光束路径宽。

    Focusing means in a unitized bi-potential CRT electron gun assembly
    9.
    发明授权
    Focusing means in a unitized bi-potential CRT electron gun assembly 失效
    一体化双电位CRT电子枪组件中的聚焦装置

    公开(公告)号:US4374342A

    公开(公告)日:1983-02-15

    申请号:US197312

    申请日:1980-10-15

    申请人: Donald L. Say

    发明人: Donald L. Say

    IPC分类号: H01J29/50 H01J29/62 H01J29/56

    CPC分类号: H01J29/62 H01J29/503

    摘要: A structural beam focusing improvement is introduced into the main focusing electrode of at least one of the gun structures in a CRT plural beam bi-potential in-line electron gun assembly. This improvement, being in the form of a pair of sideboard elements, one of which is positioned on either side of a forward aperture in the unitized main focusing electrode, imparts correctional influences to asymmetries in the respective lensing field, thereby resulting in the achievement of a desired circular beam spot landing at the center of the screen.

    摘要翻译: 在CRT多光束双电位一字形电子枪组件中的至少一个枪结构的主聚焦电极中引入结构光束聚焦改进。 这种改进是一对侧板元件的形式,其中一个侧板元件位于组合主聚焦电极中的前孔的任一侧上,对各个透镜场中的不对称性施加了校正影响,从而实现 在屏幕中心的期望的圆形光束点着陆。