Vibration device
    15.
    发明授权

    公开(公告)号:US11818958B2

    公开(公告)日:2023-11-14

    申请号:US17034110

    申请日:2020-09-28

    发明人: Koichi Mizugaki

    摘要: A vibration device includes a semiconductor substrate having a first surface and a second surface, an integrated circuit disposed on the first surface, a first terminal which is disposed on the second surface and to which a substrate potential is applied, a second terminal which is disposed on the second surface and to which a potential different from the substrate potential is applied, a first through electrode which is configured to electrically couple the first terminal and the integrated circuit to each other, a second through electrode which is configured to electrically couple the second terminal and the integrated circuit to each other, a frame which has an insulating property, a vibration element disposed on the first surface, and a lid bonded to the first surface, wherein the first through electrode is located outside the frame, and the second through electrode is located inside the frame.

    Method for Producing Load-Indicating Connection Components, and Corresponding Load-Indicating Connection Component

    公开(公告)号:US20230330767A1

    公开(公告)日:2023-10-19

    申请号:US18028810

    申请日:2021-09-28

    申请人: intellifast GmbH

    发明人: Gert Höring

    IPC分类号: B23K20/16 B23K1/00 G01L5/24

    摘要: The disclosure relates to a method for producing load-indicating connection components. A connection element (10) and a piezoelectric ultrasonic transducer (20) are provided and interconnected. The method comprises forming a layer structure on the surface (14) of the connection element (10). The layer structure comprises, in this order, proceeding from the surface (14) of the connection element (10): a first solder layer (16); a reactive layer (30); a second solder layer (22); and the piezoelectric ultrasonic transducer (20). The reactive layer (30) is designed for an exothermic reaction by activation with heat, with electromagnetic radiation or with electric current. Subsequently, the piezoelectric ultrasonic transducer (20) is pressed toward the connection element (10) in order to produce a specified contact pressure, and the reactive layer (30) is activated. The disclosure also relates to a load-indicating connection component of this type.

    SURFACE ACOUSTIC WAVE DEVICE AND ASSOCIATED PRODUCTION METHOD

    公开(公告)号:US20230253949A1

    公开(公告)日:2023-08-10

    申请号:US18302878

    申请日:2023-04-19

    申请人: Soitec

    摘要: A production method for a surface acoustic wave device comprises the following steps: a step of providing a piezoelectric substrate comprising a transducer arranged on the main front face; a step of depositing a dielectric encapsulation layer on the main front face of the piezoelectric substrate and on the transducer; and a step of assembling the dielectric encapsulation layer with the main front face of a support substrate having a coefficient of thermal expansion less than that of the piezoelectric substrate. In additional embodiments, a surface acoustic wave device comprises a layer of piezoelectric material equipped with a transducer on a main front face, arranged on a substrate support of which the coefficient of thermal expansion is less than that of the piezoelectric material. The transducer is arranged in a dielectric encapsulation layer, between the layer of piezoelectric material and the support substrate.