Abstract:
A piezoelectric device (an actuator unit) includes the following: a first substrate (a pressure chamber forming substrate, a diaphragm) having a piezoelectric layer and a first wiring conductor (a top electrode layer) that is at least partially stacked on the piezoelectric layer; and a second substrate (a sealing substrate) having a second wiring conductor (a bottom wiring conductor) that faces and is separated from the first wiring conductor (a top electrode layer) and to which an electrical signal different from an electrical signal that is applied to the first wiring conductor (a top electrode layer) is applied. At least one of the first wiring conductor (a top electrode layer) and the second wiring conductor (a bottom wiring conductor) is at least partially covered with an electrically insulating protective layer.
Abstract:
A piezoelectric driving device includes a vibrating plate, and a piezoelectric vibrating body including a substrate, and piezoelectric elements provided on the substrate. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric body, and the first electrode, the piezoelectric body, and the second electrode are laminated in this order on the substrate. The piezoelectric vibrating body is installed on the vibrating plate so that the piezoelectric element is interposed between the substrate and the vibrating plate. A wiring pattern including a first wiring corresponding to the first electrode and a second wiring corresponding to the second electrode is formed on the vibrating plate, the first electrode and the first wiring are connected to each other through a first laminated conducting portion, and the second electrode and the second wiring are connected to each other through a second laminated conducting portion.
Abstract:
A vibrational wave driving apparatus in the present invention includes an elastic member attached to an electromechanical energy transducing member, a pair of electrodes provided on the electromechanical energy transducing member, a wiring unit connecting the pair of electrodes and a voltage applying unit, and a driven body configured to be pressure contacted with the elastic member. The driven body is relatively driven by mechanical vibration of the elastic member generated when an alternating voltage is applied to the pair of electrodes. The wiring unit includes a pair of wiring portions connected to the pair of electrodes, respectively. The pair of wiring portions includes a pair of film-like bases and a pair of conductors formed on surfaces of the pair of film-like bases. The pair of wiring portions is arranged such that the pair of conductors overlaps each other through insulating layers.
Abstract:
This invention prevents a load from being applied to a piezoelectric element due to a flection deformation of a flexible substrate along with a movement of a driving device and a driving efficiency from lowering. The flexible substrate of the driving device includes a first fixing portion fixed to the piezoelectric element, a second fixing portion fixed to a second holding member, and a bending portion configured to make a flection deformation along with a movement of a vibrating plate. The second fixing portion is provided between the first fixing portion and the bending portion.
Abstract:
In the present invention, a half-value width of a rocking curve, an average roughness of a surface, and an average grain diameter are all specified at one time with respect to a Pt layer that constitutes a lower electrode for a piezoelectric element, thereby stably film-forming the Pt layer having excellent characteristics, and stably forming, on the Pt layer, a piezoelectric thin film having excellent characteristics.
Abstract:
A stator includes first and second piezoelectric elements, a flexible aluminum-based connective arrangement and upper and lower aluminum-based metal blocks. The flexible aluminum-based connective arrangement includes first to fourth aluminum-based electrodes, which apply a voltage to the piezoelectric elements to generate a vibration. Each aluminum-based electrode is made of one of aluminum and an aluminum alloy and directly contacts a corresponding one of axial ends of the piezoelectric elements. Each aluminum-based metal block is made of one of aluminum and an aluminum alloy. The piezoelectric elements and the aluminum-based electrodes are interposed between the aluminum-based metal blocks.
Abstract:
A vibration actuator includes a vibration member; and a plurality of electromechanical energy conversion elements for vibrating the vibration member. The electromechanical energy conversion elements include a plurality of first energy conversion elements each having at least four divided electrodes. The first energy conversion elements are stacked, and electrodes, which are in phase with each other, of each energy conversion element are connected in respective regions of the energy conversion element to attain electrical connections.
Abstract:
An ultrasonic motor has a vibrating body 3 and a moving body 11 supported by a supporting component 7. A rounded lower end of the supporting component is supported in a tapered dent of a supporting base 10, and therefore when a side pressure is applied, it inclines to the supporting base so as to keep the contact between the vibrating body and moving body stable. As a result, a stable motor rotation is always obtained regardless of side pressure. A lead wire 8 is held between a metal elastic element 1 and supporting component, and is pressed against the elastic element. Hence, the lead wire, through contact with the elastic element, is electrically coupled to the common electrode on the upper surface of a piezoelectric element without soldering and without use of conductive resin.
Abstract:
The present invention discloses an ultrasonic oscillator including: a plurality of resonators; and an electricity-to-mechanical energy conversion element disposed among a plurality of the resonators and pressed by a fastening member, wherein the ultrasonic oscillator bends and/or oscillates when alternating voltage is applied to the electricity-to-mechanical energy conversion element, and the resonators do not come in contact with the fastening member in a portion adjacent to the end surface of the ultrasonic oscillator.
Abstract:
The harvester comprises a pendular unit comprising a beam that is elastically deformable in bending, a mount clamping a proximal end of the beam, and an inertial mass mounted at a free, distal end of the beam. The beam converts into an oscillating electric signal a mechanical energy produced by pendular unit oscillations. The beam comprises a flexible structure including a central core, a piezoelectric layer on at least one face of the central core, and at least one surface electrode on an external face of the piezoelectric layer. The central core of the flexible structure is made of a semiconductor material adapted to form an integrated circuit substrate. The substrate made of a semiconductor material of the central core includes monolithic integrated structures, and the arrangement, over the extend of the central core substrate, of said integrated structures forms in the longitudinal direction a plurality of successive areas having different bending stiffness coefficients from an area to another.