Piezoelectric device and MEMS device

    公开(公告)号:US11910720B2

    公开(公告)日:2024-02-20

    申请号:US17135257

    申请日:2020-12-28

    摘要: Provided is a piezoelectric device and an MEMS device whose size can be reduced. The piezoelectric device includes: a first substrate that includes a first surface on which a piezoelectric element and a first electrode coupled to the piezoelectric element are disposed; a second substrate that includes a second surface on which a second electrode configured to be coupled to a control circuit is disposed; and a third substrate that is disposed between the first substrate and the second substrate, and includes a third surface bonded to the first surface and a fourth surface facing the second surface, in which the third substrate has a through hole passing through from the third surface to the fourth surface, and a third electrode provided in the through hole and coupled to the first electrode, and the second electrode is coupled to the third electrode and is electrically coupled to the first electrode via the third electrode.

    ENERGY RECOVERY DRIVER FOR PZT ACTUATORS
    2.
    发明公开

    公开(公告)号:US20240049603A1

    公开(公告)日:2024-02-08

    申请号:US17879066

    申请日:2022-08-02

    IPC分类号: H01L41/04 H02N2/06 H02M3/158

    CPC分类号: H01L41/042 H02N2/06 H02M3/158

    摘要: A differential piezoelectric actuator-system includes an inductor and driver-circuit having switches for transferring energy between first and second actuators and the inductor, and between a voltage-supply node and the inductor. Control circuitry determines whether a next phase in which to operate the driver-circuit is a first charging-phase or a first recovery-phase. The first charging-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the voltage supply node to the inductor; and a third sub-phase to transfer energy from the inductor to the second actuator. The first recovery-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the inductor to the second actuator; and a third sub-phase to transfer energy from the inductor to the voltage supply node.

    Ultrasound apparatus and control method thereof

    公开(公告)号:US11619729B2

    公开(公告)日:2023-04-04

    申请号:US16178472

    申请日:2018-11-01

    发明人: Yong-Cheol Hyeon

    摘要: Provided is an ultrasound apparatus including: a transmitter configured to generate and output a transmission signal; an ultrasound probe configured to convert the transmission signal output from the transmitter into an ultrasound signal and transmit the ultrasound signal to a target object, and receive an echo signal reflected from the target object and output a reception signal on the basis of the echo-signal; a transmission/reception switch configured to attenuate the transmission signal output from the transmitter and output the attenuated transmission signal, and output the reception signal output from the ultrasound probe; and a receiver configured to receive the attenuated and output transmission signal and the output reception signal, and detect transmission waveform information on the basis of the attenuated transmission signal.

    Pressure detection sensor and electronic device

    公开(公告)号:US11619555B2

    公开(公告)日:2023-04-04

    申请号:US16593015

    申请日:2019-10-04

    发明人: Shiori Nagamori

    摘要: A pressure detection sensor having a piezoelectric film with a first region and a second region located outside the first region, the piezoelectric film being deformable by a pressing operation, a first electrode pair disposed on a first main surface and a second main surface in the first region of the piezoelectric film, and a second electrode pair formed on a first main surface and a second main surface in the second region of the piezoelectric film. When the piezoelectric film receives a pressing operation, the first electrode pair outputs a voltage having a polarity different from that of the second electrode pair.

    Piezoelectric jetting system and method

    公开(公告)号:US11611033B2

    公开(公告)日:2023-03-21

    申请号:US16115889

    申请日:2018-08-29

    IPC分类号: B05C5/02 H01L41/04

    摘要: A system and method for jetting a viscous material includes an electronic controller and a jetting dispenser operatively coupled with the electronic controller. The jetting dispenser includes an outlet orifice and a piezoelectric actuator operatively coupled with a movable shaft. The jetting dispenser is under control of the electronic controller for causing said piezoelectric actuator to move the shaft and jet an amount of the viscous material from the outlet orifice. The electronic controller sends a waveform to the piezoelectric actuator to optimize control of the jetting operation.

    Piezoelectric element drive circuit

    公开(公告)号:US11592017B2

    公开(公告)日:2023-02-28

    申请号:US17376553

    申请日:2021-07-15

    发明人: Kenjiro Okaguchi

    摘要: A piezoelectric element drive circuit includes a piezoelectric element driven at a predetermined frequency and having a resonant frequency of (2n+1) times the predetermined frequency (n is a predetermined natural number), and a drive voltage generator that has a first output terminal connected to a first terminal of the piezoelectric element and a second output terminal connected to a second terminal of the piezoelectric element. When the piezoelectric element is driven, a waveform of potential difference between the first output terminal and the second output terminal is a step wave which transitions while taking an intermediate potential. A time length for which the potential difference is the intermediate potential is around (t2−t1)/(2n+1) in a period of time from time t1 at which the potential difference falls to the intermediate potential to time t2 at which the potential difference falls to the intermediate potential subsequently.