Normally-closed flow rate control valve

    公开(公告)号:US11867317B1

    公开(公告)日:2024-01-09

    申请号:US18547602

    申请日:2021-10-26

    CPC classification number: F16K7/14 F16K31/004 H10N30/02 H10N30/88

    Abstract: A flow rate control valve includes a base block and a valve opening/closing mechanism. The base block is provided with a valve chamber in which a valve seat through which a liquid raw material L flows, and a diaphragm that is brought into contact with or separated from the valve seat so as to close/open the valve seat are installed. The valve opening/closing mechanism includes a slide bearing part, a support post part, a piezoelectric actuator part, and a valve-actuating part. The slide bearing part is installed on the base block 1 and is provided with a bearing. The support post part includes a support post that is inserted slidably in the bearing and that moves upward and downward in a diaphragm direction.

    Method For Manufacturing Device
    6.
    发明公开

    公开(公告)号:US20240107887A1

    公开(公告)日:2024-03-28

    申请号:US18473362

    申请日:2023-09-25

    CPC classification number: H10N30/06 H10N30/02

    Abstract: A method for manufacturing a device including an active layer and a support substrate bonded to the active layer on one surface side, the active layer including an element, an electrode configured to drive the element, a frame portion disposed around the element, and an electrode pad disposed in the frame portion and coupled to the electrode, the method including: forming a protective film at the other surface side of the frame portion and the other surface side of the element, the protective film being resistant to an etchant and including a first opening portion formed between an outer shape of the element and the frame portion and a second opening portion formed on the electrode pad; and forming a space between the element and the support substrate by etching the support substrate with the etchant passing through the first opening portion.

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