Quartz MEMS piezoelectric resonator for chipscale RF antennae

    公开(公告)号:US12166471B2

    公开(公告)日:2024-12-10

    申请号:US17574200

    申请日:2022-01-12

    Abstract: A RF antenna having a magnetostrictive film may be made by patterning selected portions of a top surface of the quartz wafer for deposition of electrode metal and deposition of the magnetostrictive film and depositing the electrode metal and the magnetostrictive film; temporarily bonding the quartz wafer to a handle wafer; thinning the quartz wafer to a desired thickness; etching the quartz wafer to define the outlines of at least one quartz resonator bearing the electrode metal and the magnetostrictive film; patterning selected portions of a bottom surface the at least one quartz resonator for deposition of electrode metal and at least one bond pad and depositing the electrode metal and the at least one bond pad; bonding the at least one quartz resonator to a substrate wafer; and releasing the at least one quartz resonator from the handle wafer.

    Sensor package and sensor package module including the same

    公开(公告)号:US12104964B2

    公开(公告)日:2024-10-01

    申请号:US17531570

    申请日:2021-11-19

    Inventor: Jin Woo Lee

    CPC classification number: G01K11/265 G01K1/08 H01L23/48 H10N30/8542

    Abstract: Provided are a sensor package and a sensor package module. The sensor package includes: a substrate including a sensing area; a terminal portion disposed on a side of the sensing area of the substrate and including at least one terminal connected to the outside; a first outer wall disposed on the substrate and including a main wall surrounding at least some outer portions of the sensing area; at least one wire patterned and disposed on the substrate and configured to connect the sensing area and the terminal portion to each other; and a cover disposed on the first outer wall to correspond to the sensing area. Part of the main wall is disposed between the sensing area and the terminal portion, and the main wall includes an opening through which the at least one wire passes.

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