Invention Application
- Patent Title: MIM ACTUATOR WITH THICK PZT FILM AND HAPTIC DEVICE WITH SUCH AN ACTUATOR
-
Application No.: US18722621Application Date: 2022-12-20
-
Publication No.: US20250048933A1Publication Date: 2025-02-06
- Inventor: Emmanuel DEFAY , Sebastjan GLINSEK , Song LONGFEI
- Applicant: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Applicant Address: LU Esch-sur-Alzette
- Assignee: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Current Assignee: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Current Assignee Address: LU Esch-sur-Alzette
- Priority: LULU501047 20211221
- International Application: PCT/EP2022/086910 WO 20221220
- Main IPC: H10N30/078
- IPC: H10N30/078 ; H10N30/853
Abstract:
A process for manufacturing a MIM structure with a thick film of PZT material. The PZT material is deposited on a substrate by alternative deposition between a PZT slurry and a PZT solution. Additionally, a haptic device comprising a MIM actuator manufactured with such a process.
Information query
