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公开(公告)号:US11514954B2
公开(公告)日:2022-11-29
申请号:US17335520
申请日:2021-06-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Boram Im , Hongsoo Kim , Jongkook Park , Hose Choi , Hyunju Sung
Abstract: An integrated circuit memory device includes a plurality of row selection transistors and a dummy row selection transistor, on a substrate. A plurality of word lines and a plurality of dummy word lines are also provided on the substrate. A plurality of memory cells are provided, which are electrically connected to corresponding ones of the plurality of word lines. A plurality of dummy memory cells are provided, which are electrically connected to corresponding ones of the plurality of dummy word lines. A first wiring structure is provided, which electrically connects a first one of the plurality of word lines to a first one of the plurality of row selection transistors, and a second wiring structure is provided, which electrically connects the plurality of dummy word lines together and to the dummy row selection transistor.
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2.
公开(公告)号:US20180358408A1
公开(公告)日:2018-12-13
申请号:US15828937
申请日:2017-12-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kilho LEE , Gwanhyeob Koh , Hongsoo Kim , Junhee Lim , Chang-Hoon Jeon
CPC classification number: H01L27/228 , G11C5/025 , G11C11/005 , G11C11/161 , G11C11/1659 , G11C13/0002 , G11C13/0004 , G11C2213/79 , H01L27/11573 , H01L27/11582 , H01L27/224 , H01L27/2436 , H01L27/2463 , H01L28/20 , H01L43/08 , H01L45/04 , H01L45/06 , H01L45/1233
Abstract: Integrated circuit devices may include a substrate including a flash memory region and a variable resistance memory region, a flash memory cell transistor including a cell gate electrode that overlaps the flash memory region of the substrate, a variable resistance element that overlaps the variable resistance memory region of the substrate, and a select transistor including a select source/drain region that is disposed in the variable resistance memory region of the substrate. The select source/drain region may be electrically connected to the variable resistance element. The substrate may include an upper surface facing the cell gate electrode and the variable resistance element, and the upper surface of the substrate may continuously extend from the flash memory region to the variable resistance memory region.
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3.
公开(公告)号:US20250056799A1
公开(公告)日:2025-02-13
申请号:US18596764
申请日:2024-03-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kumhyo Kang , Hongsoo Kim , Jeon Il Lee , Hyun-Mook Choi
Abstract: A semiconductor memory device, and a semiconductor package and an electronic system including the same are provided. The semiconductor memory device includes a substrate including a plurality of mat regions and a mat separation region between ones of the mat regions, a peripheral circuit structure on the substrate and including peripheral circuits, a cell array structure on the peripheral circuit structure, a first through-via extending into the substrate in the mat separation region, and a second through-via extending into the cell array structure on the mat separation region and electrically connected to the first through-via, wherein the second through-via overlaps the first through-via.
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公开(公告)号:US10032787B2
公开(公告)日:2018-07-24
申请号:US15652411
申请日:2017-07-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yoocheol Shin , Hongsoo Kim , Jaesung Sim
IPC: H01L27/115 , H01L27/11556 , H01L27/11575 , H01L27/11573 , H01L27/11548 , G11C16/04 , H01L27/11582 , H01L27/11531 , H01L27/105
Abstract: A three-dimensional semiconductor memory device includes stacked structures, vertical semiconductor patterns, common source regions, and well pickup regions. The stacked structures are disposed on a semiconductor layer of a first conductivity type. Each stacked structure includes electrodes vertically stacked on each other and is extended in a first direction. The vertical semiconductor patterns penetrate the stacked structures. The common source regions of a second conductivity type are disposed in the semiconductor layer. At least one common source region is disposed between two adjacent stacked structures. The at least one common source region is extended in the first direction. The well pickup regions of the first conductivity type are disposed in the semiconductor layer. At least one well pickup region is adjacent to both ends of at least one stacked structure.
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公开(公告)号:US10886288B2
公开(公告)日:2021-01-05
申请号:US16454914
申请日:2019-06-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongsoo Kim , Hyunmog Park , Joongshik Shin
IPC: H01L27/11551 , H01L27/11582 , H01L29/66 , H01L29/792 , H01L27/06 , H01L27/11578 , H01L21/822 , H01L27/11563 , H01L27/11568 , H01L27/11565 , H01L27/1157 , H01L27/11575 , H01L27/11521 , H01L27/11556 , H01L27/11514
Abstract: A vertical memory device structure can include a vertical channel structure that vertically penetrates through an upper structure and a lower structure of a stack structure in a cell array region of the device. The vertical channel structure can have a side wall with a stepped profile at a level in the vertical channel structure where the upper structure meets the lower structure. A vertical dummy structure can vertically penetrate through a staircase structure that is defined by the upper structure and the lower structure in a connection region of the device, and the vertical dummy structure can have a side wall with a planar profile at the level where the upper structure meets the lower structure.
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公开(公告)号:US10546869B2
公开(公告)日:2020-01-28
申请号:US15800545
申请日:2017-11-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taekeun Cho , Hongsoo Kim , Jong-Kook Park , TaeHee Lee
IPC: H01L27/11573 , H01L27/11519 , H01L27/11529 , H01L27/11524 , H01L23/522 , H01L27/11578 , H01L27/11565 , H01L27/11575 , H01L27/11582
Abstract: A semiconductor device comprises a plurality of stack structures that include gate electrodes sequentially stacked on a substrate and are disposed along a first direction, and a plurality of separating insulation layers each of which is disposed between the stack structures. A plurality of vertical pillars penetrate each of the stack structures and are connected to the substrate. A plurality of bit lines are disposed on the vertical pillars and run across the stack structures in the first direction. A plurality of bit line contact structures connect the vertical pillars to the bit lines. A plurality of first cell dummy lines are disposed on the plurality of separating insulation layers and extend in a second direction crossing the first direction.
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7.
公开(公告)号:US10438998B2
公开(公告)日:2019-10-08
申请号:US15828937
申请日:2017-12-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kilho Lee , Gwanhyeob Koh , Hongsoo Kim , Junhee Lim , Chang-Hoon Jeon
IPC: G11C5/02 , H01L27/24 , G11C11/00 , H01L45/00 , H01L27/11573 , G11C13/00 , H01L27/22 , G11C11/16 , H01L43/08 , H01L49/02 , H01L27/11582
Abstract: Integrated circuit devices may include a substrate including a flash memory region and a variable resistance memory region, a flash memory cell transistor including a cell gate electrode that overlaps the flash memory region of the substrate, a variable resistance element that overlaps the variable resistance memory region of the substrate, and a select transistor including a select source/drain region that is disposed in the variable resistance memory region of the substrate. The select source/drain region may be electrically connected to the variable resistance element. The substrate may include an upper surface facing the cell gate electrode and the variable resistance element, and the upper surface of the substrate may continuously extend from the flash memory region to the variable resistance memory region.
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公开(公告)号:US10373653B2
公开(公告)日:2019-08-06
申请号:US15854551
申请日:2017-12-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kilho Lee , Gwanhyeob Koh , Junhee Lim , Hongsoo Kim , Chang-hoon Jeon
IPC: G11C5/06 , G11C16/04 , G11C11/16 , H01L25/18 , H01L27/22 , H01L27/11573 , H01L43/10 , H01L27/1157 , H01L27/11582
Abstract: A first memory section is disposed on a substrate. A second memory section is vertically stacked on the first memory section. The first memory section is provided between the substrate and the second memory section. The first memory section includes a flash memory cell structure, and the second memory section includes a variable resistance memory cell structure. The flash memory cell structure includes at least one cell string comprising a plurality of first memory cells connected in series to each other and a bit line on the substrate connected to the at least one cell string. The bit line is interposed vertically between the at least one cell string and the second memory section and connected to the second memory section.
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公开(公告)号:US20180261616A1
公开(公告)日:2018-09-13
申请号:US15800545
申请日:2017-11-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taekeun Cho , Hongsoo Kim , Jong-Kook Park , TaeHee Lee
IPC: H01L27/11573 , H01L27/11519 , H01L27/11529 , H01L27/11524 , H01L27/11578 , H01L23/522
CPC classification number: H01L27/11573 , H01L23/522 , H01L27/11519 , H01L27/11524 , H01L27/11529 , H01L27/11565 , H01L27/11575 , H01L27/11578 , H01L27/11582
Abstract: A semiconductor device comprises a plurality of stack structures that include gate electrodes sequentially stacked on a substrate and are disposed along a first direction, and a plurality of separating insulation layers each of which is disposed between the stack structures. A plurality of vertical pillars penetrate each of the stack structures and are connected to the substrate. A plurality of bit lines are disposed on the vertical pillars and run across the stack structures in the first direction. A plurality of bit line contact structures connect the vertical pillars to the bit lines. A plurality of first cell dummy lines are disposed on the plurality of separating insulation layers and extend in a second direction crossing the first direction.
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公开(公告)号:US09559116B2
公开(公告)日:2017-01-31
申请号:US14695051
申请日:2015-04-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hongsoo Kim , HunKook Lee , Jeehoon Hwang
IPC: H01L27/115
CPC classification number: H01L27/11582 , H01L27/11565 , H01L27/1157
Abstract: A semiconductor device may include an insulating layer provided in one body on a substrate, a first gate electrode and a second gate electrode disposed on the insulating layer, the first and second gate electrodes extending in a first direction parallel to a top surface of the substrate, a first channel structure penetrating the first gate electrode and the insulating layer so as to be connected to the substrate, a second channel structure penetrating the second gate electrode and the insulating layer so as to be connected to the substrate, and a contact penetrating the insulating layer between the first gate electrode and the second gate electrode. The contact may be connected to a common source region formed in the substrate, and the common source region may have a first conductivity type. Further, the first gate electrode and the second gate electrode may be spaced apart from each other in a second direction at the same level from the substrate, wherein the second direction intersects the first direction and is parallel to the top surface of the substrate.
Abstract translation: 半导体器件可以包括设置在基板上的一个主体中的绝缘层,设置在绝缘层上的第一栅电极和第二栅电极,第一和第二栅电极沿平行于基板顶表面的第一方向延伸 贯穿第一栅极电极和绝缘层以连接到基板的第一通道结构,穿过第二栅极电极和绝缘层的第二通道结构以连接到基板,以及穿过第二通道结构 第一栅极电极和第二栅极电极之间的绝缘层。 接触可以连接到形成在基板中的公共源极区域,并且公共源极区域可以具有第一导电类型。 此外,第一栅极电极和第二栅极电极可以在与基板相同的第二方向上彼此间隔开,其中第二方向与第一方向相交并且平行于基板的顶表面。
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