PLANAR DOUBLE GATE SEMICONDUCTOR DEVICE
    52.
    发明申请

    公开(公告)号:US20190051750A1

    公开(公告)日:2019-02-14

    申请号:US15676494

    申请日:2017-08-14

    Abstract: Certain aspects of the present disclosure generally relate to a semiconductor device. The semiconductor device generally includes a substrate, a channel disposed above the substrate, and a first dielectric layer disposed adjacent to a first side of the channel. The semiconductor device may also include a first non-insulative region disposed between the first dielectric layer and the substrate, and a second dielectric layer disposed adjacent to a second side of the channel, wherein the first dielectric layer and the second dielectric layer comprise high-k layers. In certain aspects, a second non-insulative region may be disposed above the second dielectric layer, and a third non-insulative region may be disposed adjacent to a third side of the channel.

    MRAM INTEGRATION TECHNIQUES FOR TECHNOLOGY
    56.
    发明申请
    MRAM INTEGRATION TECHNIQUES FOR TECHNOLOGY 有权
    MRAM技术集成技术

    公开(公告)号:US20150171314A1

    公开(公告)日:2015-06-18

    申请号:US14109200

    申请日:2013-12-17

    Abstract: A magnetoresistive random-access memory (MRAM) integration compatible with shrinking device technologies includes a magnetic tunnel junction (MTJ) formed in a common interlayer metal dielectric (IMD) layer with one or more logic elements. The MTJ is connected to a bottom metal line in a bottom IMD layer and a top via connected to a top IMD layer. The MTJ substantially extends between one or more bottom cap layers configured to separate the common IMD layer and the bottom IMD layer and one or more top cap layers configured to separate the common IMD layer and the top IMD layer. The MTJ can include a top electrode to connect to the top via or be directly connected to the top via through a hard mask for smaller device technologies. The logic elements include vias, metal lines, and semiconductor devices.

    Abstract translation: 兼容收缩器件技术的磁阻随机存取存储器(MRAM)集成包括形成在具有一个或多个逻辑元件的公共层间金属电介质(IMD)层中的磁性隧道结(MTJ)。 MTJ连接到底部IMD层中的底部金属线和连接到顶部IMD层的顶部通孔。 MTJ基本上在配置成分离公共IMD层和底部IMD层的一个或多个底盖层之间延伸,以及被配置为分离公共IMD层和顶部IMD层的一个或多个顶盖层。 MTJ可以包括顶部电极,以连接到顶部通孔,或者通过用于较小器件技术的硬掩模直接连接到顶部通孔。 逻辑元件包括通孔,金属线和半导体器件。

    CMOS TECHNOLOGY INTEGRATION
    58.
    发明申请
    CMOS TECHNOLOGY INTEGRATION 审中-公开
    CMOS技术集成

    公开(公告)号:US20150001631A1

    公开(公告)日:2015-01-01

    申请号:US14109203

    申请日:2013-12-17

    Abstract: Complementary metal oxide semiconductor (CMOS) devices include input/output (I/O) devices and core function devices. A method includes forming first conduction type wells for the I/O devices and the core function devices with a well mask. Such a method also includes creating at least one baseline device of a first conduction type, at least one first threshold voltage device of the first conduction type, and at least one second threshold device of the first conduction type by tuning a conduction type drive current ratio with a threshold voltage mask. The method also includes controlling a gate critical dimension for the first conduction type devices and/or at least one second conduction type device using a gate mask.

    Abstract translation: 互补金属氧化物半导体(CMOS)器件包括输入/​​输出(I / O)器件和核心功能器件。 一种方法包括用于具有良好掩模的I / O设备和核心功能设备的第一导电型阱。 这种方法还包括通过调谐传导类型的驱动电流比率来产生第一导电类型的至少一个基线装置,第一导电类型的至少一个第一阈值电压装置和第一导电类型的至少一个第二阈值装置 具有阈值电压掩模。 该方法还包括使用栅极掩模来控制第一导电类型器件和/或至少一个第二导电型器件的栅极临界尺寸。

    MULTI-LAYER DIELECTRIC GATE SPACER FOR FIN FIELD EFFECT TRANSISTORS (FINFET) AND GATE-ALL-AROUND (GAA) DEVICES

    公开(公告)号:US20250107200A1

    公开(公告)日:2025-03-27

    申请号:US18473803

    申请日:2023-09-25

    Abstract: An electronic device having one or more non-planar transistors is disclosed. At least one of the non-planar transistors comprises: one or more gate structures; and one or more gate spacers associated with each of the one or more gate structures, at least one gate spacer of the one or more gate spacers having a multi-layer dielectric structure comprising an interior wall disposed next to a respective gate structure of the one or more gate structures, wherein the interior wall is formed from a first dielectric material, an exterior wall spaced apart from the interior wall, wherein the exterior wall is formed from a second dielectric material, and a third dielectric material disposed between the interior wall and the exterior wall, wherein a dielectric constant of the third dielectric material is lower than both the dielectric constants of the first and second dielectric materials.

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