CMOS TECHNOLOGY INTEGRATION
    3.
    发明申请
    CMOS TECHNOLOGY INTEGRATION 审中-公开
    CMOS技术集成

    公开(公告)号:US20150001631A1

    公开(公告)日:2015-01-01

    申请号:US14109203

    申请日:2013-12-17

    Abstract: Complementary metal oxide semiconductor (CMOS) devices include input/output (I/O) devices and core function devices. A method includes forming first conduction type wells for the I/O devices and the core function devices with a well mask. Such a method also includes creating at least one baseline device of a first conduction type, at least one first threshold voltage device of the first conduction type, and at least one second threshold device of the first conduction type by tuning a conduction type drive current ratio with a threshold voltage mask. The method also includes controlling a gate critical dimension for the first conduction type devices and/or at least one second conduction type device using a gate mask.

    Abstract translation: 互补金属氧化物半导体(CMOS)器件包括输入/​​输出(I / O)器件和核心功能器件。 一种方法包括用于具有良好掩模的I / O设备和核心功能设备的第一导电型阱。 这种方法还包括通过调谐传导类型的驱动电流比率来产生第一导电类型的至少一个基线装置,第一导电类型的至少一个第一阈值电压装置和第一导电类型的至少一个第二阈值装置 具有阈值电压掩模。 该方法还包括使用栅极掩模来控制第一导电类型器件和/或至少一个第二导电型器件的栅极临界尺寸。

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