公开(公告)号：US09327324B2

公开(公告)日：2016-05-03

申请号：US13777044

申请日：2013-02-26

Applicant: Applied Materials Israel Ltd.

Inventor： Lior Segev ,  Irit Ruach Nir ,  Guy Eitan

IPC: B08B6/00 ,  B08B7/00 ,  H01J37/02 ,  H01J37/20 ,  H01J37/32

CPC classification number: B08B7/00 ,  H01J37/02 ,  H01J37/20 ,  H01J37/32862 ,  H01J2237/006 ,  H01J2237/022

Abstract: A system and method are described, for use in cleaning of a vacuum chamber. The method comprising connecting a vacuum chamber to a plasma generating unit via a plasma connection port and connecting the vacuum chamber to a high vacuum pumping unit via a pumping port. A flow conductance through the plasma connection port to the vacuum chamber is controlled to limit passage of charged particles and cleaning substances produced in the plasma generating unit, to thereby maintain a working pressure inside the vacuum chamber while cleaning the vacuum chamber by said cleaning substances.

Abstract translation: 描述了用于清洁真空室的系统和方法。 该方法包括通过等离子体连接端口将真空室连接到等离子体产生单元，并通过泵送端口将真空室连接到高真空泵送单元。 控制通过等离子体连接端口到真空室的流动传导，以限制带电粒子和等离子体发生单元中产生的清洁物质的通过，从而在通过所述清洁物质清洁真空室的同时保持真空室内的工作压力。

公开(公告)号：US20160104599A1

公开(公告)日：2016-04-14

申请号：US14973424

申请日：2015-12-17

Applicant: FEI Company

Inventor： Gregory A. Schwind ,  N. William Parker

IPC: H01J37/21 ,  H01J37/08

CPC classification number: H01J37/21 ,  H01J27/205 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082 ,  H01J2237/0827 ,  H01J2237/31749

Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.

Abstract translation: 具有气室的高亮度离子源包括多个通道，其中多个通道各自具有不同的气体。 电子束通过一个通道以提供某种物质的离子用于处理样品。 可以通过将电子引导到具有不同气体种类的另一个通道并用第二种离子的离子处理样品来快速改变离子种类。 偏转板用于将电子束对准气体室，从而允许聚焦离子束中的气体物质快速切换。

公开(公告)号：US20160071702A1

公开(公告)日：2016-03-10

申请号：US14773573

申请日：2013-10-29

Applicant: Shimadzu Corporation

Inventor： Masayasu SUZUKI ,  Yosuke MORIMOTO

IPC: H01J37/32

CPC classification number: H01J37/32669 ,  C23C14/325 ,  H01J37/32055 ,  H01J37/32357 ,  H01J37/32568 ,  H01J37/32596 ,  H01J37/3266 ,  H01J37/32899 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/06375 ,  H01J2237/152 ,  H01J2237/162 ,  H01J2237/327 ,  H01J2237/3326

Abstract: An arc-plasma film formation device includes a film formation chamber in which a substrate to be treated is stored, a plasma chamber in which at least a part of a target is stored, the plasma chamber being configured to be connected to the film formation chamber, and a plurality of hollow coils configured to generate a continuous line of magnetic force between the target and the film formation chamber and having at least one curved section, the plurality of hollow coils being arrange in the plasma chamber and covered by an outer coat made of a non-magnetic metal. Plasma containing ions derived from the target material and generated in the plasma chamber as a result of arc discharge is transported from the target to the substrate by passing an inside of the plurality of hollow coils.

Abstract translation: 电弧等离子体成膜装置包括：成膜室，其中存储有待处理的基板;等离子体室，其中存储有至少一部分靶;等离子体室被配置为连接到成膜室 以及多个中空线圈，其被配置为在所述靶和成膜室之间产生连续的磁力线，并且具有至少一个弯曲部分，所述多个中空线圈布置在所述等离子体室中并被外部涂层覆盖 的非磁性金属。 通过使多个中空线圈的内部通过，从目标材料产生并在等离子体室中产生的由于电弧放电而产生的等离子体从目标物传送到基板。

公开(公告)号：US09269530B2

公开(公告)日：2016-02-23

申请号：US14496555

申请日：2014-09-25

Applicant: FEI Company

Inventor： Aurélien Philippe Jean Maclou Botman ,  Cameron James Zachreson

IPC: H01J37/22 ,  G01N21/64 ,  G01N23/225 ,  H01J37/26

CPC classification number: H01J37/226 ,  G01N21/64 ,  G01N21/6458 ,  G01N2021/6439 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/006

Abstract: Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.

Abstract translation: 在样品表面局部提供蒸气，以允许荧光标记在真空室中的荧光。 例如，纳米毛细管可以分配感兴趣区域附近的液体，液体蒸发以增加荧光标记附近的蒸气压。 荧光标记物上的蒸气压的增加优选足够大，以防止失活或重新激活荧光标记物，而真空室中的总体压力优选足够低以允许带电粒子束操作很少或不需要额外的抽真空泵送。

公开(公告)号：US20160042909A1

公开(公告)日：2016-02-11

申请号：US14815265

申请日：2015-07-31

Applicant: TEL Epion Inc.

Inventor： Matthew C. Gwinn ,  Avrum Freytsis ,  Robert K. Becker

IPC: H01J37/08 ,  H01J37/305

CPC classification number: H01J37/08 ,  H01J37/305 ,  H01J2237/006 ,  H01J2237/0206 ,  H01J2237/061 ,  H01J2237/0812 ,  H01J2237/0822 ,  H01J2237/3151

Abstract: A nozzle assembly used for performing gas cluster ion beam (GCIB) etch processing of various materials is described. In particular, the nozzle assembly includes two or more conical nozzles that are aligned such that they are both used to generate the same GCIB. The first conical nozzle may include the throat that initially forms the GCIB and the second nozzle may form a larger conical cavity that may be appended to the first conical nozzle. A transition region may be disposed between the two conical nozzles that may substantially cylindrical and slightly larger than the largest diameter of the first conical nozzle.

Abstract translation: 描述了用于进行各种材料的气体簇离子束（GCIB）蚀刻处理的喷嘴组件。 特别地，喷嘴组件包括两个或更多个锥形喷嘴，其被对准，使得它们都用于产生相同的GCIB。 第一锥形喷嘴可以包括最初形成GCIB的喉部，并且第二喷嘴可以形成可以附着到第一锥形喷嘴的更大的锥形空腔。 过渡区域可以设置在两个锥形喷嘴之间，其可以基本上圆柱形并稍微大于第一锥形喷嘴的最大直径。

公开(公告)号：US09165773B2

公开(公告)日：2015-10-20

申请号：US14287840

申请日：2014-05-27

Applicant: Ashwini K. Sinha ,  Lloyd A. Brown

Inventor： Ashwini K. Sinha ,  Lloyd A. Brown

IPC: H01L21/265 ,  H01L21/67 ,  H01J37/08 ,  H01J37/317

CPC classification number: H01L21/265 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01L21/67017 ,  Y10T137/86348 ,  Y10T137/88054

Abstract: A novel method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected with sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process.

Abstract translation: 提供了一种使用铝掺杂剂组合物的新方法和系统。 选择铝掺杂剂组合物的组合物具有足够的蒸汽压力和最小的碳含量，从而使得能够容易地输送到离子注入工艺，并且在Al离子注入期间显着降低碳沉积。 源材料优选地从次大气压储存和输送装置储存和递送，以在Al离子注入工艺期间提高安全性和可靠性。

公开(公告)号：US20150287575A1

公开(公告)日：2015-10-08

申请号：US14742402

申请日：2015-06-17

Applicant: MKS Instruments, Inc.

Inventor： Chaolin Hu ,  Xing Chen

IPC: H01J37/32

CPC classification number: H01J37/32449 ,  C23C16/45587 ,  C23C16/45591 ,  C23C16/50 ,  F17D1/04 ,  G21B1/17 ,  H01J37/32009 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32513 ,  H01J37/32807 ,  H01J2237/006 ,  H05H1/12 ,  Y02E30/122 ,  Y02E30/126 ,  Y10T137/0318 ,  Y10T137/8376

Abstract: An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

Abstract translation: 用于调节气体流动模式和气体 - 等离子体相互作用的组件，包括环形等离子体室。 环形等离子体室具有全部连接的注入构件，输出构件，第一侧构件和第二侧构件。 第一侧构件在第一侧构件的至少一部分中具有第一内横截面面积，在第一侧构件的至少另一部分中具有第二内横截面积，其中第一内横截面积和 第二内截面积不同。 第二侧构件在第二侧构件的至少一部分中具有第三内截面面积，在第二侧构件的至少另一部分中具有第四内横截面积，其中第三内横截面积和 第四内截面面积不同。

公开(公告)号：US09123507B2

公开(公告)日：2015-09-01

申请号：US14385802

申请日：2013-03-20

Applicant: MAPPER LITHOGRAPHY IP B.V.

Inventor： Pieter Kruit ,  Marc Smits

IPC: H01J37/02 ,  H01J37/317 ,  G03F7/20 ,  B82Y10/00 ,  B82Y40/00 ,  F15D1/02 ,  H01J9/38 ,  H01J37/32

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  F15D1/025 ,  G03F7/70925 ,  G21K2201/06 ,  H01J9/38 ,  H01J37/3007 ,  H01J37/3177 ,  H01J37/32862 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/327 ,  Y10T137/2082 ,  Y10T137/87571

Abstract: The invention relates to an arrangement for transporting radicals. The arrangement includes a plasma generator and a guiding body. The plasma generator includes a chamber (2) in which a plasma may be formed. The chamber has an inlet (5) for receiving an input gas, and one or more outlets (6) for removal of at least one of the plasma and radicals created therein. The guiding body is hollow and is arranged for guiding radicals formed in the plasma towards an area or volume at which contaminant deposition is to be removed. The chamber inlet is coupled to a pressure device (40) for providing a pulsed pressure into the chamber so as to create a flow in the guiding body.

Abstract translation: 本发明涉及一种输送自由基的装置。 该装置包括等离子体发生器和引导体。 等离子体发生器包括可以形成等离子体的腔室（2）。 腔室具有用于接收输入气体的入口（5）和用于去除其中产生的至少一种等离子体和自由基的一个或多个出口（6）。 引导体是中空的，并且被布置成用于将形成在等离子体中的自由基引导到要去除污染物沉积的区域或体积。 腔室入口联接到压力装置（40），用于向腔室提供脉冲压力，以便在引导体中产生流动。

公开(公告)号：US09097625B2

公开(公告)日：2015-08-04

申请号：US13864362

申请日：2013-04-17

Applicant: Omniprobe, Inc.

Inventor： Rocky Kruger ,  Aaron Smith ,  Cheryl Hartfield

IPC: C23C16/00 ,  G01N1/28 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  H01J37/02

CPC classification number: H01J37/08 ,  C23C16/448 ,  C23C16/48 ,  C23C16/52 ,  C23C16/56 ,  G01N1/28 ,  H01J37/02 ,  H01J2237/006 ,  H01J2237/317 ,  Y10T137/0329 ,  Y10T137/0352

Abstract: A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.

Abstract translation: 一种用于具有真空室的能量束仪器的气体注入系统。 该系统具有一个包含化学物质的药筒，作为输出气体的来源，被输送到真空室中。 药筒具有容纳化学物质的储存器，其在给定时间上升到具有由储存器中存在的化学物质量限定的水平的填充管线。 储存器的出口通过出口阀联接到输出通道，并且构造成使得当系统倾斜时，出口保持在填充线的水平面上方。 实施例包括隔离阀，允许筒被断开而不破坏系统真空。

公开(公告)号：US09076631B2

公开(公告)日：2015-07-07

申请号：US14302221

申请日：2014-06-11

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: H01J40/00 ,  H01J37/28 ,  H01J37/20 ,  H01J37/301

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。