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公开(公告)号：US20210243876A1
公开(公告)日：2021-08-05
申请号：US17237913
申请日：2021-04-22
Applicant: MKS Instruments, Inc.
Inventor： Xing Chen , Ilya Pokidov , Atul Gupta
Abstract: A plasma chamber of a plasma processing system is provided. The plasma chamber defines a plasma channel having a first side and a second side oppositely disposed along a length of the plasma channel. The plasma chamber comprises a first section and a second section constructed from a dielectric material and an interface that bonds together the first and second sections at between a first flange of the first section and a third flange of the second section and between a second flange of the first section and a fourth flange of the second section.
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公开(公告)号：US10940635B2
公开(公告)日：2021-03-09
申请号：US16101370
申请日：2018-08-10
Applicant: MKS Instruments, Inc.
Inventor： Xing Chen , David Lam , Kevin W. Wenzel , Ilya Pokidov
Abstract: Methods and systems are provided for heating a dielectric preform material. An exemplary method includes inserting the preform material into a microwave cavity along a longitudinal axis of the microwave cavity and supplying the microwave cavity with microwave power having a frequency that corresponds to an axial wavelength along the longitudinal axis of the microwave cavity. The axial wavelength is greater than a length of the preform material along the longitudinal axis. The method includes heating the preform material within the microwave cavity by the microwave power and determining temperatures of the preform material at one or more locations on a surface of the preform material. The method further includes adjusting, based on the temperatures of the preform material, the microwave frequency to achieve substantially uniform heating at least on a sidewall of the preform material along the longitudinal axis.
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公开(公告)号：US20180345569A1
公开(公告)日：2018-12-06
申请号：US16101370
申请日：2018-08-10
Applicant: MKS Instruments, Inc.
Inventor： Xing Chen , David Lam , Kevin W. Wenzel , Ilya Pokidov
CPC classification number: B29C49/64 , B29B13/024 , B29B13/08 , B29C35/0805 , B29C49/6418 , B29C2035/0855 , B29K2067/003 , B29L2031/712 , H05B6/6402 , H05B6/707
Abstract: Methods and systems are provided for heating a dielectric preform material. An exemplary method includes inserting the preform material into a microwave cavity along a longitudinal axis of the microwave cavity and supplying the microwave cavity with microwave power having a frequency that corresponds to an axial wavelength along the longitudinal axis of the microwave cavity. The axial wavelength is greater than a length of the preform material along the longitudinal axis. The method includes heating the preform material within the microwave cavity by the microwave power and determining temperatures of the preform material at one or more locations on a surface of the preform material. The method further includes adjusting, based on the temperatures of the preform material, the microwave frequency to achieve substantially uniform heating at least on a sidewall of the preform material along the longitudinal axis.
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公开(公告)号：US20170309456A1
公开(公告)日：2017-10-26
申请号：US15646017
申请日：2017-07-10
Applicant: MKS Instruments, Inc.
Inventor： Chaolin Hu , Xing Chen
CPC classification number: H01J37/32449 , C23C16/45587 , C23C16/45591 , C23C16/50 , F17D1/04 , G21B1/17 , H01J37/32009 , H01J37/321 , H01J37/32357 , H01J37/32513 , H01J37/32807 , H01J2237/006 , H05H1/12 , Y02E30/122 , Y02E30/126 , Y10T137/0318 , Y10T137/8376
Abstract: An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.
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公开(公告)号：US20160181063A1
公开(公告)日：2016-06-23
申请号：US15056330
申请日：2016-02-29
Applicant: MKS Instruments, Inc.
Inventor： Ken Tran , Feng Tian , Xing Chen , Franklin Lee
IPC: H01J37/248 , C01B13/11
CPC classification number: H01J37/248 , C01B13/115 , C01B2201/90
Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
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Patent Agency Ranking
6.发明授权公开(公告)号：US08704171B2
公开(公告)日：2014-04-22
申请号：US13682379
申请日：2012-11-20
Applicant: MKS Instruments, Inc.
Inventor： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC: G01N27/62
CPC classification number: G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
Abstract translation: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子种类的质量和峰值强度值。
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7.发明申请公开(公告)号：US20130203180A1
公开(公告)日：2013-08-08
申请号：US13682379
申请日：2012-11-20
Applicant: MKS INSTRUMENTS, INC.
Inventor： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC: G01N27/62
CPC classification number: G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
Abstract: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
Abstract translation: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。
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公开(公告)号：US20220214321A1
公开(公告)日：2022-07-07
申请号：US17583712
申请日：2022-01-25
Applicant: MKS Instruments, Inc.
Inventor： Johannes Chiu , Xing Chen , Chiu-Ying Tai , Michael Harris , Atul Aupta
IPC: G01N33/00 , G01K17/06 , G01N27/12 , G01N21/3504
Abstract: The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the compound stream flowing within the sampling tube based on the measured temperature change of the sampling tube.
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公开(公告)号：US11019715B2
公开(公告)日：2021-05-25
申请号：US16035551
申请日：2018-07-13
Applicant: MKS Instruments, Inc.
Inventor： Xing Chen , Ilya Pokidov , Atul Gupta
Abstract: A plasma chamber of a plasma processing system is provided. The plasma chamber defines a plasma channel having a first side and a second side oppositely disposed along a length of the plasma channel. The plasma chamber comprises a first section and a second section constructed from a dielectric material and an interface that bonds together the first and second sections at between a first flange of the first section and a third flange of the second section and between a second flange of the first section and a fourth flange of the second section.
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公开(公告)号：US09865426B2
公开(公告)日：2018-01-09
申请号：US15056330
申请日：2016-02-29
Applicant: MKS Instruments, Inc.
Inventor： Ken Tran , Feng Tian , Xing Chen , Franklin Lee
IPC: C01B13/11 , H01J37/248
CPC classification number: H01J37/248 , C01B13/115 , C01B2201/90
Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
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