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    Analyser arrangement for particle spectrometer
    151.
    发明授权
    Analyser arrangement for particle spectrometer 有权
    分析仪布置用于粒子光谱仪

    公开(公告)号：US09437408B2

    公开(公告)日：2016-09-06

    申请号：US14363405

    申请日：2012-03-06

    Applicant: Björn Wannberg

    Inventor： Björn Wannberg

    IPC: H01J37/05 ,  H01J49/00 ,  H01J49/06 ,  H01J49/48

    CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

    Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample. The method comprises guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

    Abstract translation: 本发明涉及一种用于确定与从发射颗粒发射的样品发射的带电粒子有关的至少一个参数的方法。 该方法包括通过透镜系统将带电粒子束引导到测量区域的入口，以及在测量区域内检测指示所述至少一个参数的粒子的位置。 此外，该方法包括在粒子束进入测量区域之前将粒子束在相同坐标方向上偏转至少两次。 因此，能够以在某种程度上消除对样品的物理操作的需要的方式来控制测量区域入口处的粒子束的位置和方向。 这反过来允许样品被有效地冷却，从而能够提高能量测量中的能量分辨率。

    Method and Compound System for Inspecting and Reviewing Defects
    152.
    发明申请
    Method and Compound System for Inspecting and Reviewing Defects 有权
    检查和检查缺陷的方法和复合系统

    公开(公告)号：US20160163502A1

    公开(公告)日：2016-06-09

    申请号：US14964316

    申请日：2015-12-09

    Applicant: Hermes Microvision Inc.

    Inventor： Shuai Li

    IPC: H01J37/22 ,  H01J37/28 ,  H01J37/05 ,  H01J37/285

    CPC classification number: H01J37/28 ,  H01J37/04 ,  H01J37/05 ,  H01J37/222 ,  H01J37/265 ,  H01J37/285 ,  H01J2237/2449 ,  H01J2237/2817

    Abstract: The present invention provides an improved electron-optical apparatus for the inspection and review of the specimen, and for the defect inspection, an inspection mode of operation is performed to generate inspection data, wherein the large beam current is formed by a magnetic immersion lens to scan the specimen, and preferably the objective lens system, a swing objective retarding immersion lens, focuses the beam current and generates the large scanning field, and for the defect review, the review mode of operation is performed to analyze the defects, wherein the large beam current is abandoned and the small beam current is adopted to examine the specimen without a large scanning field, and in order to properly select and detect signal charged particles excited from the specimen, a first Wien filter is utilized to select the acquired signal particles and a second Wien filter is used to compensate the aberrations induced when the signal particles pass through the first Wien filter.

    Abstract translation: 本发明提供了一种用于检查和检查样本的改进的电子光学装置，并且为了进行缺陷检查，执行检查操作模式以产生检查数据，其中大的光束电流由磁性浸没透镜形成 扫描样本，优选物镜系统，摆动物镜延迟浸没透镜，聚焦光束电流并产生大扫描场，为了进行缺陷检查，执行审查操作模式以分析缺陷，其中大 射束电流被放弃，采用小束电流检测样本，而没有大的扫描场，为了适当地选择和检测从样品激发的信号带电粒子，使用第一维恩滤波器来选择所获取的信号粒子， 第二维恩滤波器用于补偿信号粒子通过第一维恩滤波器时所引起的像差。

    Electron microscope and method of adjusting monochromator
    153.
    发明授权
    Electron microscope and method of adjusting monochromator 有权
    电子显微镜和调光单色仪的方法

    公开(公告)号：US09362082B2

    公开(公告)日：2016-06-07

    申请号：US14823141

    申请日：2015-08-11

    Applicant: JEOL Ltd.

    Inventor： Masaki Mukai

    IPC: H01J47/00 ,  H01J37/05 ,  H01J37/21

    CPC classification number: H01J37/05 ,  H01J37/21 ,  H01J37/26 ,  H01J2237/057 ,  H01J2237/24535

    Abstract: An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy filter (22) for dispersing the beam (EB) according to energy and a slit plate (24) disposed on an energy dispersive plane. The slit plate (24) is provided with plural energy-selecting slits (25) which are different in width taken in a direction where the beam (EB) is dispersed. The microscope (100) further includes a lens system (30) on which the beam impinges after being monochromatized by the monochromator (20), a first measuring section (50) for measuring the intensity of the beam (EB) emitted from an electron beam source (10), a second measuring section (60) for measuring the intensity of the beam (EB) that has passed through an active one (25-L) of the energy-selecting slits (25), and a slit identifying portion (72) for identifying the active energy-selecting slit (25-L) from the plural energy-selecting slits (25) on the basis of the results of measurements made by the first and second measuring sections (50, 60).

    Abstract translation: 提供了一种可以方便调整单色仪的电子显微镜。 电子显微镜（100）包括具有用于根据能量分散光束（EB）的能量过滤器（22）和设置在能量分散平面上的狭缝板（24）的单色仪（20）。 狭缝板（24）设置有多个能量选择狭缝（25），其沿着分散光束（EB）的方向而具有不同的宽度。 所述显微镜（100）还包括透镜系统（30），所述透镜系统（30）在由所述单色仪（20）单色化之后入射到所述透镜系统（30）上;第一测量部分（50），用于测量从电子束 源极（10），用于测量已经穿过能量选择狭缝（25）的有源（25-L）的光束（EB）的强度的第二测量部分（60）和狭缝识别部分 72），用于基于由第一和第二测量部（50,60）进行的测量结果，从多个能量选择缝（25）识别活动能量选择缝（25-L）。

    Method of performing spectroscopy in a Transmission Charged-Particle Microscope
    155.
    发明申请
    Method of performing spectroscopy in a Transmission Charged-Particle Microscope 有权
    在透射带电粒子显微镜中进行光谱的方法

    公开(公告)号：US20160071689A1

    公开(公告)日：2016-03-10

    申请号：US14844778

    申请日：2015-09-03

    Applicant: FEI Company

    Inventor： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

    IPC: H01J37/22 ,  H01J37/147 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/226 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/2007 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2802

    Abstract: A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising: a specimen holder; a source, for producing a beam of charged particles; an illuminator, for directing said beam so as to irradiate the specimen; an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams, the method comprising: using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array; providing; using a radiation sensor in said flux upstream of said aperture device to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector; using a sensing result from said sensor to adjust a detection result from said detector.

    Abstract translation: 一种在透射带电粒子显微镜中进行光谱的方法，包括：样品架; 用于产生带电粒子束的源; 照明器，用于引导所述光束以照射所述样本; 一种成像系统，用于将通过样本传输的带电粒子的通量引导到分光装置上，该分光装置包括用于将所述通量分散到光谱子束的能量分辨阵列中的分散装置，所述方法包括：使用可调节孔径装置来允许 所述阵列的第一部分到达检测器，同时阻挡所述阵列的第二部分; 提供; 在所述孔设备上游的所述通量中使用辐射传感器，以在阵列的所述第二部分的选定区域中进行局部辐射感测，同时由所述检测器检测所述第一部分; 使用来自所述传感器的感测结果来调整来自所述检测器的检测结果。

    ELECTRON BEAM IMAGING WITH DUAL WIEN-FILTER MONOCHROMATOR
    157.
    发明申请
    ELECTRON BEAM IMAGING WITH DUAL WIEN-FILTER MONOCHROMATOR 有权
    电子束成像与双扫描单色显影

    公开(公告)号：US20150340200A1

    公开(公告)日：2015-11-26

    申请号：US14711607

    申请日：2015-05-13

    Applicant: KLA-Tencor Corporation

    Inventor： Xinrong JIANG ,  Liqun HAN

    IPC: H01J37/26 ,  H01J37/10 ,  H01J37/06

    CPC classification number: H01J37/26 ,  H01J37/05 ,  H01J37/06 ,  H01J37/10 ,  H01J37/28 ,  H01J2237/057

    Abstract: One embodiment relates to a dual Wien-filter monochromator. A first Wien filter focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane. A slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range. A second Wien filter focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane. Other embodiments, aspects and features are also disclosed.

    Abstract translation: 一个实施例涉及双维尼滤波器单色仪。 第一维恩滤波器将电子束聚焦在第一平面中，同时使电子束在第二平面中平行。 狭缝开口允许具有能量范围内的能量的电子束的电子通过，同时阻挡具有能量范围外的能量的电子束的电子。 第二维恩滤波器将电子束聚焦成在第一平面中平行，同时使电子束在第二平面中平行。 还公开了其它实施例，方面和特征。

    ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATION METHOD
    159.
    发明申请
    ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATION METHOD 有权
    离子植入装置，最终能量过滤器和离子植入方法

    公开(公告)号：US20150279612A1

    公开(公告)日：2015-10-01

    申请号：US14670173

    申请日：2015-03-26

    Applicant: SEN Corporation

    Inventor： Takanori Yagita

    IPC: H01J37/147 ,  H01J37/30 ,  H01J37/317

    CPC classification number: H01J37/147 ,  H01J37/05 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/057

    Abstract: A final energy filter includes a first adjustment electrode portion, an intermediate electrode portion, and a second adjustment electrode portion. The final energy filter further includes a power supply unit. The power supply unit is configured such that it applies the voltages separately to the first adjustment electrode portion, the intermediate electrode portion, and the second adjustment electrode portion. The power supply unit applies voltages to an upstream auxiliary electrode portion, a deflection electrode portion and a downstream auxiliary electrode portion, respectively, such that the energy range of ion beam in a first region between the upstream auxiliary electrode portion and the deflection electrode portion is approximately equal to that in a second region between the deflection electrode portion and the downstream auxiliary electrode portion.

    Abstract translation: 最终能量过滤器包括第一调整电极部分，中间电极部分和第二调节电极部分。 最终能量过滤器还包括电源单元。 电源单元被构造成使得其分别施加电压到第一调整电极部分，中间电极部分和第二调节电极部分。 电源单元分别向上游辅助电极部分，偏转电极部分和下游辅助电极部分施加电压，使得上游辅助电极部分和偏转电极部分之间的第一区域中的离子束的能量范围为 大致等于偏转电极部分和下游辅助电极部分之间的第二区域中的位置。

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