RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, ACID GENERATOR AND COMPOUND
    9.
    发明申请
    RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, ACID GENERATOR AND COMPOUND 有权
    辐射敏感性树脂组合物,抗蚀剂图案形成方法,酸发生器和化合物

    公开(公告)号:US20140342288A1

    公开(公告)日:2014-11-20

    申请号:US14282270

    申请日:2014-05-20

    申请人: JSR CORPORATION

    IPC分类号: G03F7/027 G03F7/20

    摘要: The present invention provides a radiation-sensitive resin composition that contains a polymer having a structural unit that includes an acid-labile group; and an acid generator, wherein the acid generator includes a compound including a sulfonate anion having SO3−, wherein a hydrogen atom or an electron-donating group bonds to an α carbon atom with respect to SO3−, and an electron-withdrawing group bonds to a β carbon atom with respect to SO3−; and a radiation-degradable onium cation. The compound preferably has a group represented by the following formula (1-1) or (1-2). In the following formulae (1-1) and (1-2), R1 and R2 each independently represent a hydrogen atom or a monovalent electron-donating group. R3 represent a monovalent electron-withdrawing group. R4 represents a hydrogen atom or a monovalent hydrocarbon group.

    摘要翻译: 本发明提供了含有具有包含酸不稳定基团的结构单元的聚合物的辐射敏感性树脂组合物, 和酸发生剂,其中酸产生剂包括包含具有SO 3 - 的磺酸根阴离子的化合物,其中氢原子或给电子基团相对于SO 3键与α碳原子键合,并且吸电子基团与 一个 碳原子相对于SO3-; 和辐射可降解的鎓阳离子。 该化合物优选具有下式(1-1)或(1-2)表示的基团。 在下式(1-1)和(1-2)中,R 1和R 2各自独立地表示氢原子或一价给电子基团。 R3表示一价吸电子基团。 R4表示氢原子或一价烃基。