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公开(公告)号:US20230402241A1
公开(公告)日:2023-12-14
申请号:US17834944
申请日:2022-06-08
发明人: Yu-Wei Ting , Kuo-Pin Chang , Hung-Ju Li , Kuo-Ching Huang
摘要: A semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate, and a heater element on the semiconductor substrate, the heater element configured to generate heat in response to a current flowing therethrough. The semiconductor device also includes a conductor material having a programmable conductivity, and an insulator layer between the heater element and the conductor material, where the conductor material is configured to be programmed by applying one or more voltage differences to one or more of the heater element and the conductor material, and where a capacitance between the conductor material and the heater element is configured to be controlled by the voltage differences such that the capacitance is lower while the conductor material is being programmed than while the conductor material is not being programmed.
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公开(公告)号:US10535629B2
公开(公告)日:2020-01-14
申请号:US16229585
申请日:2018-12-21
发明人: Alexander Kalnitsky , Yi-Yang Lei , Hsi-Ching Wang , Cheng-Yu Kuo , Tsung Lung Huang , Ching-Hua Hsieh , Chung-Shi Liu , Chen-Hua Yu , Chin-Yu Ku , De-Dui Liao , Kuo-Chio Liu , Kai-Di Wu , Kuo-Pin Chang , Sheng-Pin Yang , Isaac Huang
IPC分类号: H01L21/683 , H01L23/00 , H01L21/78
摘要: A method of manufacturing a semiconductor structure includes receiving a first substrate including an IMD layer disposed over the first substrate and a plurality of conductive bumps disposed in the IMD layer; receiving a second substrate; disposing a patterned adhesive over the first substrate, wherein at least a portion of the IMD layer is exposed through the patterned adhesive; and bonding the first substrate with the second substrate, wherein a top surface of the at least portion of the IMD layer is exposed through the patterned adhesive after bonding the first substrate with the second substrate.
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公开(公告)号:US20240341204A1
公开(公告)日:2024-10-10
申请号:US18298132
申请日:2023-04-10
发明人: Kuo-Pin Chang , Hung-Ju Li , Yu-Wei Ting , Kuo-Ching Huang
CPC分类号: H10N70/231 , H10N70/011 , H10N70/823 , H10N70/8413 , H10N70/8828
摘要: A semiconductor device includes a first film, a second film, and a third film that each include a phase change material (PCM) and are arranged with respect to one another along a first lateral direction. The semiconductor device includes a first metal pad, a second metal pad, a third metal pad, and a fourth metal pad. The first and second metal pads are disposed over ends of the first film, respectively, the second and third metal pads are disposed over ends of the second film, respectively, and the third and fourth metal pads are disposed over ends of the third film, respectively. The semiconductor device includes a first heater, a second heater, and a third heater, respectively disposed below the first film, the second film, and the third film.
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公开(公告)号:US20230422644A1
公开(公告)日:2023-12-28
申请号:US17851036
申请日:2022-06-28
发明人: Kuo-Pin Chang , Yu-Wei Ting , Tsung-Hao Yeh , Kuo-Ching Huang
IPC分类号: H01L45/00
CPC分类号: H01L45/1293 , H01L45/06 , H01L45/1226 , H01L45/126 , H01L45/144 , H01L45/1666
摘要: A phase change device includes a substrate with a top surface. A heater structure is disposed on the substrate. The heater structure has first and second sidewalls on opposite sides of the heater structure. A phase change element is disposed over the heater structure. The phase change element includes three connected portions. A first portion is disposed over the heater structure. A second portion is disposed over the first sidewall of the heater structure. A third portion is over a first portion of the top surface of the substrate adjacent to and spaced apart from the first sidewall of the heater structure.
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公开(公告)号:US20230309325A1
公开(公告)日:2023-09-28
申请号:US17701144
申请日:2022-03-22
发明人: Kuo-Pin Chang , Yu-Wei Ting , Kuo-Ching Huang
IPC分类号: H01L27/24 , H01L45/00 , H01L23/528
CPC分类号: H01L27/2481 , H01L27/2436 , H01L45/1233 , H01L45/16 , H01L23/5283
摘要: Some embodiments relate to an embedded memory device with vertically stacked source, drain and gate connections. The semiconductor memory device includes a substrate and a pillar of channel material extending in a first direction. A bit line is disposed over the pillar of channel material and is coupled to the pillar of channel material, and extends in a second direction that is perpendicular to the first direction. Word lines are on opposite sides of the pillar of channel material and extend in a third direction. The third direction is perpendicular to the second direction. A dielectric layer separates the word lines from the pillar of channel material. Source lines extend in the third direction over the substrate, directly beneath the word lines. Variable resistance memory layers are between the source lines and an outer sidewall of the dielectric layer, laterally surrounding the sidewalls of the pillar of channel material.
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公开(公告)号:US11069652B2
公开(公告)日:2021-07-20
申请号:US16742349
申请日:2020-01-14
发明人: Alexander Kalnitsky , Yi-Yang Lei , Hsi-Ching Wang , Cheng-Yu Kuo , Tsung Lung Huang , Ching-Hua Hsieh , Chung-Shi Liu , Chen-Hua Yu , Chin-Yu Ku , De-Dui Liao , Kuo-Chio Liu , Kai-Di Wu , Kuo-Pin Chang , Sheng-Pin Yang , Isaac Huang
IPC分类号: H01L21/76 , H01L23/00 , H01L21/683 , H01L21/78
摘要: A method of manufacturing a semiconductor structure is provided. The method includes providing a first substrate including a plurality of conductive bumps disposed over the first substrate; providing a second substrate; disposing a patterned adhesive over the first substrate, wherein at least a portion of the plurality of conductive bumps is exposed through the patterned adhesive; bonding the first substrate with the second substrate; and singulating a chip from the first substrate.
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公开(公告)号:US20230209836A1
公开(公告)日:2023-06-29
申请号:US17725013
申请日:2022-04-20
发明人: Kuo-Pin Chang , Chien Hung Liu
IPC分类号: H01L27/1159 , H01L27/11597
CPC分类号: H01L27/1159 , H01L27/11597
摘要: A memory device having a 3D structure provides MFMIS-FET memory cells with a high chip area density. The memory device includes a stack of memory cell layers interleaved with insulating layers. Channel vias penetrate through the stack. Channels of the memory cells are disposed in the channel vias. MFM portions of memory cells are sandwiched between the insulating layers in areas lateral to the channel vias. The MFM portions may be radially distributed from the channel vias and include a floating gate, a ferroelectric layer, and a gate electrode. The gate electrodes associated with a plurality of MFM structures may be united into a word line gate. The ferroelectric layer may wrap around the word line gate, whereby the ferroelectric layer is disposed above and below the word line gate as well as between the word line gate and each of the floating gates.
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公开(公告)号:US09799625B2
公开(公告)日:2017-10-24
申请号:US14738109
申请日:2015-06-12
发明人: Alexander Kalnitsky , Yi-Yang Lei , Hsi-Ching Wang , Cheng-Yu Kuo , Tsung Lung Huang , Ching-Hua Hsieh , Chung-Shi Liu , Chen-Hua Yu , Chin-Yu Ku , De-Dui Liao , Kuo-Chio Liu , Kai-Di Wu , Kuo-Pin Chang , Sheng-Pin Yang , Isaac Huang
CPC分类号: H01L24/83 , H01L21/6835 , H01L21/78 , H01L24/03 , H01L24/73 , H01L24/92 , H01L24/94 , H01L2221/68318 , H01L2221/68327 , H01L2221/6834 , H01L2224/03002 , H01L2224/0401 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/06181 , H01L2224/131 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/2919 , H01L2224/73204 , H01L2224/83201 , H01L2224/8385 , H01L2224/921 , H01L2224/94 , H01L2924/06 , H01L2924/07025 , H01L2224/03 , H01L2924/00014 , H01L2924/014
摘要: A method of manufacturing a semiconductor structure, comprising: receiving a first substrate including a first surface, a second surface opposite to the first surface and a plurality of conductive bumps disposed over the first surface; receiving a second substrate; disposing an adhesive over the first substrate or the second substrate; heating the adhesive in a first ambiance; bonding the first substrate with the second substrate by applying a force of less than about 10,000N upon the first substrate or the second substrate and heating the adhesive in a second ambiance; and thinning down a thickness of the first substrate from the second surface.
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公开(公告)号:US20230380194A1
公开(公告)日:2023-11-23
申请号:US17751638
申请日:2022-05-23
发明人: Kuo-Pin Chang , Kuo-Ching Huang
CPC分类号: H01L27/249 , H01L27/2436 , H01L45/06 , G11C5/063 , H01L45/1608
摘要: A cell array of a memory device includes: a first deck of memory cells arranged in a first row and a second row extending in a first horizontal direction and a plurality of columns extending in a second horizontal direction, wherein the memory cells in the second row in the first deck is displaced in the first horizontal direction with respect to the memory cells in the first row in the first deck; a first common word line metal track extending in the first horizontal direction, wherein both the memory cells in the first row and the memory cells in the second row are disposed on the first common word line metal track; and a plurality of first bit line metal tracks extending in the second horizontal direction, wherein each of the plurality of first bit line metal tracks is disposed on one of the first deck of memory cells.
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公开(公告)号:US10163849B2
公开(公告)日:2018-12-25
申请号:US15790749
申请日:2017-10-23
发明人: Alexander Kalnitsky , Yi-Yang Lei , Hsi-Ching Wang , Cheng-Yu Kuo , Tsung Lung Huang , Ching-Hua Hsieh , Chung-Shi Liu , Chen-Hua Yu , Chin-Yu Ku , De-Dui Liao , Kuo-Chio Liu , Kai-Di Wu , Kuo-Pin Chang , Sheng-Pin Yang , Isaac Huang
IPC分类号: H01L21/78 , H01L23/00 , H01L21/683
摘要: A method of manufacturing a semiconductor structure, including receiving a first substrate including a plurality of conductive bumps disposed over the first substrate; receiving a second substrate; disposing an adhesive over the first substrate; removing a portion of the adhesive to expose at least one of the plurality of conductive bumps; and bonding the first substrate with the second substrate.
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