- 专利标题: VERTICAL PHASE CHANGE SWITCH DEVICES AND METHODS
-
申请号: US17851036申请日: 2022-06-28
-
公开(公告)号: US20230422644A1公开(公告)日: 2023-12-28
- 发明人: Kuo-Pin Chang , Yu-Wei Ting , Tsung-Hao Yeh , Kuo-Ching Huang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A phase change device includes a substrate with a top surface. A heater structure is disposed on the substrate. The heater structure has first and second sidewalls on opposite sides of the heater structure. A phase change element is disposed over the heater structure. The phase change element includes three connected portions. A first portion is disposed over the heater structure. A second portion is disposed over the first sidewall of the heater structure. A third portion is over a first portion of the top surface of the substrate adjacent to and spaced apart from the first sidewall of the heater structure.
信息查询
IPC分类: