ZrAlON films
    3.
    发明授权
    ZrAlON films 有权
    ZrAlON膜

    公开(公告)号:US08993455B2

    公开(公告)日:2015-03-31

    申请号:US12790598

    申请日:2010-05-28

    Abstract: Atomic layer deposition (ALD) can be used to form a dielectric layer of zirconium aluminum oxynitride (ZrAlON) for use in a variety of electronic devices. Forming the dielectric layer may include depositing zirconium oxide using atomic layer deposition and precursor chemicals, followed by depositing aluminum nitride using precursor chemicals, and repeating. The dielectric layer may be used as the gate insulator of a MOSFET, a capacitor dielectric, and a tunnel gate insulator in flash memories.

    Abstract translation: 原子层沉积(ALD)可用于形成用于各种电子器件的锆铝氮氧化物(ZrAlON)的介电层。 形成介电层可以包括使用原子层沉积和前体化学品沉积氧化锆,然后使用前体化学品沉积氮化铝并重复。 介质层可以用作闪存中的MOSFET,电容器电介质和隧道栅极绝缘体的栅极绝缘体。

    Memory with metal-insulator-metal tunneling program and erase
    4.
    发明授权
    Memory with metal-insulator-metal tunneling program and erase 有权
    记忆与金属绝缘体金属隧道程序和擦除

    公开(公告)号:US08686489B2

    公开(公告)日:2014-04-01

    申请号:US11472785

    申请日:2006-06-22

    Applicant: Leonard Forbes

    Inventor: Leonard Forbes

    CPC classification number: H01L29/42324 H01L21/28273

    Abstract: The flash memory cell comprises a sense transistor that has a pair of source/drain lines and a control gate. A coupling metal-insulator-metal capacitor is created between the floating gate and a read wordline. A tunneling metal-insulator-metal capacitor is created between the floating gate and a write/erase bit line. In one embodiment, the insulator is a metal oxide.

    Abstract translation: 闪存单元包括具有一对源极/漏极线和控制栅极的检测晶体管。 在浮动栅极和读取字线之间产生耦合金属 - 绝缘体 - 金属电容器。 在浮动栅极和写/擦除位线之间产生隧道式金属 - 绝缘体 - 金属电容器。 在一个实施例中,绝缘体是金属氧化物。

    Semiconductor-On-Insulator Devices and Associated Methods
    8.
    发明申请
    Semiconductor-On-Insulator Devices and Associated Methods 审中-公开
    半导体绝缘体器件及相关方法

    公开(公告)号:US20130168803A1

    公开(公告)日:2013-07-04

    申请号:US13621737

    申请日:2012-09-17

    Abstract: Semiconductor-on-insulator (SOI) devices and associated methods are provided. In one aspect, for example, a method for making a SOI device can include forming a device layer on a front side of a semiconductor layer, bonding a first substrate to the front side of the device layer, processing the semiconductor layer on a back side opposite the device layer to form a processed surface, and bonding a second substrate to the processed surface. In some aspects, the method can further include removing the first substrate from the front side to expose the device layer. In one aspect, forming the device layer can include forming optoelectronic circuitry at the front side of the semiconductor layer.

    Abstract translation: 提供绝缘体上半导体(SOI)器件及相关方法。 一方面,例如,制造SOI器件的方法可以包括在半导体层的正面形成器件层,将第一衬底接合到器件层的前侧,在后侧处理半导体层 与所述器件层相对以形成经处理的表面,以及将第二衬底接合到所述经处理的表面。 在一些方面,该方法还可以包括从前侧去除第一衬底以暴露器件层。 一方面,形成器件层可以包括在半导体层的前侧形成光电子电路。

Patent Agency Ranking