Invention Grant
- Patent Title: DRAM with nanofin transistors
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Application No.: US13357347Application Date: 2012-01-24
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Publication No.: US09087730B2Publication Date: 2015-07-21
- Inventor: Leonard Forbes
- Applicant: Leonard Forbes
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/108 ; B82Y10/00 ; H01L21/8234 ; H01L29/78

Abstract:
One aspect of the present subject matter relates to a memory. A memory embodiment includes a nanofin transistor having a first source/drain region, a second source/drain region above the first source/drain region, and a vertically-oriented channel region between the first and second source/drain regions. The nanofin transistor also has a surrounding gate insulator around the nanofin structure and a surrounding gate surrounding the channel region and separated from the nanofin channel by the surrounding gate insulator. The memory includes a data-bit line connected to the first source/drain region, at least one word line connected to the surrounding gate of the nanofin transistor, and a stacked capacitor above the nanofin transistor and connected between the second source/drain region and a reference potential. Other aspects are provided herein.
Public/Granted literature
- US20120119279A1 DRAM WITH NANOFIN TRANSISTORS Public/Granted day:2012-05-17
Information query
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