Imprint method, method of manufacturing semiconductor device, and imprint device

    公开(公告)号:US12072622B2

    公开(公告)日:2024-08-27

    申请号:US17897030

    申请日:2022-08-26

    IPC分类号: G03F7/00 H01L21/02

    CPC分类号: G03F7/0002 H01L21/02348

    摘要: According to one embodiment, an imprint method for a substrate having a plurality of shot regions includes performing a first process on each target shot region in the plurality of shot regions and performing a second process on a non-target shot region in the plurality of shot regions. The first process includes pressing a template against resin in the target shot region to transfer a pattern to the resin, curing the resin, and releasing the template from the cured resin while supplying inert gas towards the substrate from an outer edge side of the template. The second process includes causing the template to approach the non-target shot region without coming into contact with resin in the non-target shot region, and moving the template away from the resin in the non-target shot region while supplying inert gas towards the substrate from the outer edge side of the template.

    LIBRARY CREATION DEVICE, LIBRARY CREATION METHOD, ANALYSIS DEVICE, AND ANALYSIS METHOD

    公开(公告)号:US20240281580A1

    公开(公告)日:2024-08-22

    申请号:US18582447

    申请日:2024-02-20

    发明人: Atsushi NAKAYAMA

    IPC分类号: G06F30/3308 G06F30/3323

    CPC分类号: G06F30/3308 G06F30/3315

    摘要: A library creation device for creating a library for circuit analysis of a semiconductor integrated circuit, includes a storage device, and a processor configured to: using a computer model corresponding to the integrated circuit, execute a simulation multiple times for calculating an expected value indicating an electrical characteristic of the integrated circuit and a variation of the expected value, for each of a plurality of sets of input parameters; and generate a library including the expected value and the variation for each of the sets of input parameters and statistical processing information indicating a condition of the executed simulation, and store the generated library in the storage device.

    Magnetic memory
    59.
    发明授权

    公开(公告)号:US12069962B2

    公开(公告)日:2024-08-20

    申请号:US17196737

    申请日:2021-03-09

    IPC分类号: H10N50/80 H10B61/00 H10N50/01

    CPC分类号: H10N50/80 H10B61/22 H10N50/01

    摘要: A magnetic memory according to an embodiment includes: a first wiring and a second wiring; a nonmagnetic conductor extending in a first direction; a first magnetic member including a first portion electrically connected to the first wiring and a second portion electrically connected to the second wiring, the first magnetic member extending in the first direction from the first portion to the second portion to surround the nonmagnetic conductor; an insulation portion disposed between the nonmagnetic conductor and the first magnetic member; and a controller electrically connected to the nonmagnetic conductor, the first wiring, and the second wiring.