STRUCTURE AND METHOD FOR MRAM DEVICES
    2.
    发明公开

    公开(公告)号:US20240365564A1

    公开(公告)日:2024-10-31

    申请号:US18768995

    申请日:2024-07-10

    摘要: Semiconductor device and methods of forming the same are provided. A semiconductor device according to one embodiment includes a first source/drain feature and a second source/drain feature, a first metal line disposed in a first dielectric layer and electrically connected to the first source/drain feature, a second metal line disposed in the first dielectric layer and electrically connected to the second source/drain feature, and a first memory element disposed over the first dielectric layer and electrically connected to the first source/drain feature by way of the first metal line. A width of the first metal line is different from a width of the second metal line. By changing the widths of the first metal line and the second metal line, a source line series resistance of a semiconductor device can be advantageously reduced without changing a pitch of two metal lines.

    Doped sidewall spacer/etch stop layer for memory

    公开(公告)号:US12127483B2

    公开(公告)日:2024-10-22

    申请号:US17388484

    申请日:2021-07-29

    IPC分类号: H10N50/80 H10B61/00 H10N50/01

    CPC分类号: H10N50/80 H10B61/00 H10N50/01

    摘要: Various embodiments of the present disclosure are directed towards an integrated circuit (IC) chip comprising a memory cell with a sidewall spacer, and/or an etch stop layer, doped to reduce charge accumulation at an interface between the sidewall spacer and the etch stop layer. The memory cell comprises a bottom electrode, a data storage element overlying the bottom electrode, and a top electrode overlying the data storage element. The sidewall spacer overlies the bottom electrode on a common sidewall formed by the data storage element and the top electrode, and the etch stop layer lines the sidewall spacer. The sidewall spacer and the etch stop layer directly contact at the interface and form an electric dipole at the interface. The doping to reduce charge accumulation reduces an electric field produced by the electric dipole, thereby reducing the effect of the electric field on the memory cell.

    METHOD FOR MANUFACTURING SPIN WAVE EXCITATION/DETECTION STRUCTURE

    公开(公告)号:US20240341198A1

    公开(公告)日:2024-10-10

    申请号:US18292218

    申请日:2022-07-25

    IPC分类号: H10N50/01 H10N50/20 H10N50/85

    CPC分类号: H10N50/01 H10N50/20 H10N50/85

    摘要: A method for manufacturing a spin wave excitation/detection structure to excite and detect a spin wave. The method includes: forming an insulating magnetic film on a donor substrate, producing a bonded substrate by bonding a surface of the insulating magnetic film on the donor substrate to a surface of a support substrate via a conductive film, removing the donor substrate from the bonded substrate, and forming a conductive line on the insulating magnetic film. The spin wave excitation/detection structure includes the support substrate, the conductive film provided on the support substrate, the insulating magnetic film provided on the conductive film, and the conductive line provided on the insulating magnetic film. This provides the method that can manufacture the spin wave excitation/detection structure, having a structure with high strength, the spin wave that can be excited with high intensity, and the spin wave that can be excited with broad frequency bandwidth.