Method of making chip mountings and assemblies
    41.
    发明授权
    Method of making chip mountings and assemblies 失效
    制造芯片安装和组件的方法

    公开(公告)号:US5994222A

    公开(公告)日:1999-11-30

    申请号:US845786

    申请日:1997-04-25

    IPC分类号: H01L23/31 H01L21/00

    摘要: A bonding component for electrically connecting a semiconductor chip or wafer to a support substrate includes a dielectric layer having a central region, elongated slots defining the central region, and a peripheral region surrounding the slots. Metallic bonding pads are arranged on the central region, and leads extend from the bonding pads to the edge of the central region and extending partially across the elongated slots. The leads are detached from the peripheral region of the dielectric layer on the side of the slots opposite the central region. The leads are adapted to be deformed during bonding to a semiconductor chip or wafer. To form the bonding component, a dielectric layer is first provided having a central region, slots and a peripheral region. A metallic structure is also provided having bonding pads on the central region, and leads electrically connected to the bonding pads and to a plating bus disposed in the peripheral region. A resist is applied to the metallic structure in zones separating the leads, the metallic structure is plated in regions outside the zones with an etch resistant metal, the resist is removed and the leads are etched so as to form gaps in the metallic structure over the elongated slots.

    摘要翻译: 用于将半导体芯片或晶片电连接到支撑衬底的接合部件包括具有中心区域的介电层,限定中心区域的细长槽和围绕槽的周边区域。 金属接合焊盘布置在中心区域上,并且引线从焊盘延伸到中心区域的边缘并且部分延伸穿过细长槽。 引线与介质层的与中心区域相对的一侧的外围区域分离。 引线适于在与半导体芯片或晶片接合期间变形。 为了形成接合部件,首先提供具有中心区域,槽和周边区域的电介质层。 还提供了一种金属结构,在中心区域具有接合焊盘,并且引线电连接到接合焊盘和设置在周边区域中的电镀母线。 在分离引线的区域中将金属结构施加抗蚀剂,金属结构用耐蚀刻金属镀在区域外的区域中,去除抗蚀剂并蚀刻引线以在金属结构上形成间隙 细长的槽。

    Curved lead configurations
    50.
    发明授权
    Curved lead configurations 失效
    弯曲导线配置

    公开(公告)号:US5859472A

    公开(公告)日:1999-01-12

    申请号:US927601

    申请日:1997-09-12

    摘要: A microelectronic assembly includes first and second microelectronic elements having confronting surfaces that are spaced apart from one another. Vertically extensive flexible lead elements interconnect electrical connections on the microelectronic elements. Each of the flexible lead elements may include a plurality of curved conductors that are electrically connected and parallel to one another. The lead elements may initially be formed on a lead bearing surface, and have a terminal end for connection to the first microelectronic element, and a tip end for connection to the second microelectronic element. The terminal end is disposed on the lead bearing surface and fixed to it, while the tip end is releasably connected to the lead bearing surface, and spaced apart from the terminal end on an offset axis. Curved leads interconnect the tip end and the terminal end.

    摘要翻译: 微电子组件包括具有彼此间隔开的相对表面的第一和第二微电子元件。 垂直广泛的柔性引线元件互连微电子元件上的电连接。 每个柔性引线元件可以包括电连接并彼此平行的多个弯曲导体。 引线元件可以最初形成在引线轴承表面上,并且具有用于连接到第一微电子元件的终端和用于连接到第二微电子元件的末端。 终端设置在引导轴承表面上并固定在其上,而前端可释放地连接到引导轴承表面,并且在偏移轴线上与终端间隔开。 弯曲导线将尖端和终端互连。