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公开(公告)号:CN102651334B
公开(公告)日:2014-12-10
申请号:CN201210028789.2
申请日:2012-02-09
Applicant: 富士通株式会社
IPC: H01L21/768 , H01L21/335 , H01L23/538 , H01L29/778 , H03F1/32
CPC classification number: H03F1/3247 , H01L21/4825 , H01L23/49524 , H01L23/49558 , H01L23/49562 , H01L24/36 , H01L24/40 , H01L24/84 , H01L2224/40245 , H01L2224/83801 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01047 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10329 , H01L2924/12032 , H01L2924/1306 , H01L2924/13064 , H01L2924/181 , H03F3/189 , H03F3/24 , H03F2200/204 , H03F2200/451 , H01L2924/00 , H01L2924/00012 , H01L2224/37099 , H01L2224/84
Abstract: 本发明提供一种半导体装置、用于制造半导体装置的方法和电子电路。该用于制造半导体装置的方法包括:将包括连接导电膜的密封层放置在表面上,使得连接导电膜与半导体元件的电极和引线相接触;通过连接导电膜使所述电极与所述引线电耦接;以及通过密封层密封所述半导体元件。
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公开(公告)号:CN102651352B
公开(公告)日:2014-11-19
申请号:CN201210034475.3
申请日:2012-02-15
Applicant: 富士通株式会社
IPC: H01L23/31 , H01L23/367 , H01L23/48 , H01L21/56 , H01L21/60
CPC classification number: H01L24/83 , H01L21/78 , H01L23/13 , H01L23/142 , H01L23/3121 , H01L23/367 , H01L23/3737 , H01L23/49822 , H01L23/66 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/29 , H01L24/32 , H01L24/33 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/92 , H01L2224/0345 , H01L2224/03452 , H01L2224/04026 , H01L2224/04042 , H01L2224/05554 , H01L2224/05558 , H01L2224/0558 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/06155 , H01L2224/06181 , H01L2224/29109 , H01L2224/29111 , H01L2224/29113 , H01L2224/29116 , H01L2224/29118 , H01L2224/2912 , H01L2224/29139 , H01L2224/29147 , H01L2224/2929 , H01L2224/29339 , H01L2224/29344 , H01L2224/32225 , H01L2224/3224 , H01L2224/32245 , H01L2224/33183 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/45164 , H01L2224/48091 , H01L2224/48227 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/48666 , H01L2224/48699 , H01L2224/48724 , H01L2224/48744 , H01L2224/48747 , H01L2224/48755 , H01L2224/48764 , H01L2224/48766 , H01L2224/48799 , H01L2224/48824 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/48866 , H01L2224/49175 , H01L2224/73265 , H01L2224/83191 , H01L2224/83192 , H01L2224/8384 , H01L2224/83851 , H01L2224/92247 , H01L2224/94 , H01L2924/01029 , H01L2924/0103 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01051 , H01L2924/01082 , H01L2924/01083 , H01L2924/10161 , H01L2924/10253 , H01L2924/1026 , H01L2924/1033 , H01L2924/10344 , H01L2924/1047 , H01L2924/12032 , H01L2924/12042 , H01L2924/13064 , H01L2924/142 , H01L2924/15153 , H01L2924/00012 , H01L2924/00014 , H01L2224/03 , H01L2924/00
Abstract: 本发明提供一种半导体装置、用于制造半导体装置的方法以及电子器件,所述半导体装置包括:包括第一电极的半导体器件;包括第二电极和凹部的衬底;和散热粘合材料,该散热粘合材料将半导体器件固定在凹部中,以将第一电极布置为靠近第二电极,其中第一电极耦接到第二电极,并且散热粘合材料覆盖半导体器件的底表面和侧表面的至少一部分。
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公开(公告)号:CN101483144B
公开(公告)日:2013-08-28
申请号:CN200910006680.7
申请日:2003-04-22
Applicant: 富士通株式会社
IPC: H01L21/60
CPC classification number: H01L24/83 , H01L21/4853 , H01L24/11 , H01L24/29 , H01L24/45 , H01L2224/1134 , H01L2224/1184 , H01L2224/13099 , H01L2224/13144 , H01L2224/13147 , H01L2224/16145 , H01L2224/29298 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/73104 , H01L2224/749 , H01L2224/75 , H01L2224/75252 , H01L2224/83191 , H01L2224/838 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/15788 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2224/29099
Abstract: 本发明使半导体基板(1)的背面(1b)吸附在基板支承台(11)的支承面(11a)上而使其固定。这时,由于对背面(1b)的平整化处理,成为半导体基板(1)的厚度一定的状态,背面(1b)由于向支承面(11a)吸附而被强制性地成为没有起伏的状态,这样,背面(1b)成为表面(1a)的平整化的基准面。在该状态下,使用刀具(10)对表面(1a)中的各Au突起(2)和抗蚀剂掩膜(12)的表层进行切削加工,进行平整化处理,使得各Au突起(2)和抗蚀剂掩膜(12)的表面连续且平整。这样,取代CMP,能够廉价且高速地使形成在基板上的微细的凸块的表面平整化。
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公开(公告)号:CN102044413B
公开(公告)日:2012-11-21
申请号:CN201010526085.9
申请日:2003-04-22
Applicant: 富士通株式会社
CPC classification number: H01L24/83 , H01L21/4853 , H01L24/11 , H01L24/29 , H01L24/45 , H01L2224/1134 , H01L2224/1184 , H01L2224/13099 , H01L2224/13144 , H01L2224/13147 , H01L2224/16145 , H01L2224/29298 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/73104 , H01L2224/749 , H01L2224/75 , H01L2224/75252 , H01L2224/83191 , H01L2224/838 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/15788 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2224/29099
Abstract: 本发明使半导体基板(1)的背面(1b)吸附在基板支承台(11)的支承面(11a)上而使其固定。这时,由于对背面(1b)的平整化处理,成为半导体基板(1)的厚度一定的状态,背面(1b)由于向支承面(11a)吸附而被强制性地成为没有起伏的状态,这样,背面(1b)成为表面(1a)的平整化的基准面。在该状态下,使用刀具(10)对表面(1a)中的各Au突起(2)和抗蚀剂掩膜(12)的表层进行切削加工,进行平整化处理,使得各Au突起(2)和抗蚀剂掩膜(12)的表面连续且平整。这样,取代CMP,能够廉价且高速地使形成在基板上的微细的凸块的表面平整化。
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公开(公告)号:CN102651351A
公开(公告)日:2012-08-29
申请号:CN201210016429.0
申请日:2012-01-18
Applicant: 富士通株式会社
IPC: H01L23/31 , H01L23/29 , H01L29/778 , H01L21/56
CPC classification number: H01L29/7787 , H01L23/3107 , H01L23/4952 , H01L23/49562 , H01L24/06 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/85 , H01L29/41766 , H01L29/66462 , H01L2224/04042 , H01L2224/05553 , H01L2224/05554 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/0603 , H01L2224/45014 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48247 , H01L2224/48257 , H01L2224/48472 , H01L2224/48599 , H01L2224/48699 , H01L2224/49 , H01L2224/8592 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01049 , H01L2924/01073 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10329 , H01L2924/1033 , H01L2924/10344 , H01L2924/1306 , H01L2924/13064 , H01L2924/181 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
Abstract: 本发明提供一种半导体器件,其包括:具有电极的半导体芯片;与所述电极对应的引线;将所述电极耦接到所述引线的金属线;覆盖所述金属线与所述电极之间的耦接部分以及所述金属线与所述引线之间的耦接部分的第一树脂部分;和覆盖所述金属线、所述第一树脂部分和所述半导体芯片的第二树脂部分。本发明还提供一种制造半导体器件的方法。
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公开(公告)号:CN102637650B
公开(公告)日:2015-12-16
申请号:CN201210026467.4
申请日:2012-02-07
Applicant: 富士通株式会社
IPC: H01L23/29 , H01L23/31 , H01L29/778 , H01L21/56 , H01L21/335 , H02M7/217 , H02M3/155
Abstract: 本发明涉及一种半导体装置、一种用于制造半导体装置的方法以及一种电源。本发明的半导体装置包括:半导体芯片,包括氮化物半导体分层结构,该氮化物半导体分层结构包括载流子输运层和载流子供给层;覆盖在半导体芯片的表面上的第一树脂层,该第一树脂层包括偶联剂;覆盖在第一树脂层的表面上的第二树脂层,该第二树脂层包括表面活性剂;以及密封树脂层,用于利用第一树脂层和第二树脂层对半导体芯片进行密封。
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公开(公告)号:CN102651334A
公开(公告)日:2012-08-29
申请号:CN201210028789.2
申请日:2012-02-09
Applicant: 富士通株式会社
IPC: H01L21/768 , H01L21/335 , H01L23/538 , H01L29/778 , H03F1/32
CPC classification number: H03F1/3247 , H01L21/4825 , H01L23/49524 , H01L23/49558 , H01L23/49562 , H01L24/36 , H01L24/40 , H01L24/84 , H01L2224/40245 , H01L2224/83801 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01047 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10329 , H01L2924/12032 , H01L2924/1306 , H01L2924/13064 , H01L2924/181 , H03F3/189 , H03F3/24 , H03F2200/204 , H03F2200/451 , H01L2924/00 , H01L2924/00012 , H01L2224/37099 , H01L2224/84
Abstract: 本发明提供一种半导体装置、用于制造半导体装置的方法和电子电路。该用于制造半导体装置的方法包括:将包括连接导电膜的密封层放置在表面上,使得连接导电膜与半导体元件的电极和引线相接触;通过连接导电膜使所述电极与所述引线电耦接;以及通过密封层密封所述半导体元件。
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公开(公告)号:CN102646609A
公开(公告)日:2012-08-22
申请号:CN201210031859.X
申请日:2012-02-13
Applicant: 富士通株式会社
IPC: H01L21/60 , H01L21/335 , H01L23/488 , H01L29/778 , H02M7/217 , H02M3/155
CPC classification number: H01L23/48 , H01L23/3128 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/04026 , H01L2224/05005 , H01L2224/05082 , H01L2224/05155 , H01L2224/05166 , H01L2224/05169 , H01L2224/05541 , H01L2224/05573 , H01L2224/05644 , H01L2224/0603 , H01L2224/26175 , H01L2224/2745 , H01L2224/2746 , H01L2224/29019 , H01L2224/29036 , H01L2224/29109 , H01L2224/29111 , H01L2224/29113 , H01L2224/2912 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/29155 , H01L2224/2919 , H01L2224/2929 , H01L2224/29339 , H01L2224/29499 , H01L2224/32225 , H01L2224/32245 , H01L2224/325 , H01L2224/32502 , H01L2224/32506 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48245 , H01L2224/48247 , H01L2224/48644 , H01L2224/48744 , H01L2224/4903 , H01L2224/73265 , H01L2224/83193 , H01L2224/83194 , H01L2224/83801 , H01L2224/83851 , H01L2924/00013 , H01L2924/01029 , H01L2924/01322 , H01L2924/13064 , H01L2924/15311 , H01L2924/181 , H01L2224/83439 , H01L2924/00014 , H01L2924/00012 , H01L2924/0132 , H01L2924/01047 , H01L2924/0105 , H01L2924/0665 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/00
Abstract: 本发明涉及半导体器件、半导体器件的制造方法、以及电源器件。一种制造半导体器件的方法,包括:在支撑板的半导体芯片安装区域和半导体芯片的背表面中的一个上形成具有第一金属的层和具有第二金属的层中的一个;在半导体芯片安装区域和半导体芯片的背表面中的另一个的与其中具有第一金属的层和具有第二金属的层中的一个的区域的一部分对应的区域上,形成具有第一金属的层和具有第二金属的层中的另一个;以及在半导体芯片安装区域中定位半导体芯片之后,形成包括具有第一金属和第二金属的合金的层以将半导体芯片与半导体芯片安装区域接合。
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公开(公告)号:CN102044413A
公开(公告)日:2011-05-04
申请号:CN201010526085.9
申请日:2003-04-22
Applicant: 富士通株式会社
CPC classification number: H01L24/83 , H01L21/4853 , H01L24/11 , H01L24/29 , H01L24/45 , H01L2224/1134 , H01L2224/1184 , H01L2224/13099 , H01L2224/13144 , H01L2224/13147 , H01L2224/16145 , H01L2224/29298 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/73104 , H01L2224/749 , H01L2224/75 , H01L2224/75252 , H01L2224/83191 , H01L2224/838 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/15788 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2224/29099
Abstract: 本发明使半导体基板(1)的背面(1b)吸附在基板支承台(11)的支承面(11a)上而使其固定。这时,由于对背面(1b)的平整化处理,成为半导体基板(1)的厚度一定的状态,背面(1b)由于向支承面(11a)吸附而被强制性地成为没有起伏的状态,这样,背面(1b)成为表面(1a)的平整化的基准面。在该状态下,使用刀具(10)对表面(1a)中的各Au突起(2)和抗蚀剂掩膜(12)的表层进行切削加工,进行平整化处理,使得各Au突起(2)和抗蚀剂掩膜(12)的表面连续且平整。这样,取代CMP,能够廉价且高速地使形成在基板上的微细的凸块的表面平整化。
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公开(公告)号:CN102646609B
公开(公告)日:2014-12-03
申请号:CN201210031859.X
申请日:2012-02-13
Applicant: 富士通株式会社
IPC: H01L21/60 , H01L21/335 , H01L23/488 , H01L29/778 , H02M7/217 , H02M3/155
CPC classification number: H01L23/48 , H01L23/3128 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/04026 , H01L2224/05005 , H01L2224/05082 , H01L2224/05155 , H01L2224/05166 , H01L2224/05169 , H01L2224/05541 , H01L2224/05573 , H01L2224/05644 , H01L2224/0603 , H01L2224/26175 , H01L2224/2745 , H01L2224/2746 , H01L2224/29019 , H01L2224/29036 , H01L2224/29109 , H01L2224/29111 , H01L2224/29113 , H01L2224/2912 , H01L2224/29139 , H01L2224/29144 , H01L2224/29147 , H01L2224/29155 , H01L2224/2919 , H01L2224/2929 , H01L2224/29339 , H01L2224/29499 , H01L2224/32225 , H01L2224/32245 , H01L2224/325 , H01L2224/32502 , H01L2224/32506 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48245 , H01L2224/48247 , H01L2224/48644 , H01L2224/48744 , H01L2224/4903 , H01L2224/73265 , H01L2224/83193 , H01L2224/83194 , H01L2224/83801 , H01L2224/83851 , H01L2924/00013 , H01L2924/01029 , H01L2924/01322 , H01L2924/13064 , H01L2924/15311 , H01L2924/181 , H01L2224/83439 , H01L2924/00014 , H01L2924/00012 , H01L2924/0132 , H01L2924/01047 , H01L2924/0105 , H01L2924/0665 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599 , H01L2924/00
Abstract: 本发明涉及半导体器件、半导体器件的制造方法、以及电源器件。一种制造半导体器件的方法,包括:在支撑板的半导体芯片安装区域和半导体芯片的背表面中的一个上形成具有第一金属的层和具有第二金属的层中的一个;在半导体芯片安装区域和半导体芯片的背表面中的另一个的与其中具有第一金属的层和具有第二金属的层中的一个的区域的一部分对应的区域上,形成具有第一金属的层和具有第二金属的层中的另一个;以及在半导体芯片安装区域中定位半导体芯片之后,形成包括具有第一金属和第二金属的合金的层以将半导体芯片与半导体芯片安装区域接合。
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