TFT DEVICE
    7.
    发明公开
    TFT DEVICE 审中-公开

    公开(公告)号:US20230411532A1

    公开(公告)日:2023-12-21

    申请号:US17814519

    申请日:2022-07-24

    发明人: Qunfang Liang

    IPC分类号: H01L29/786

    CPC分类号: H01L29/78696 H01L29/78609

    摘要: A thin film transistor (TFT) device is provided. The TFT device includes a substrate, a semiconductor channel layer, an ohmic contact layer, and a source-drain layer that are sequentially arranged on one side of the substrate. In the channel region, a compensation pattern is disposed on a surface of the semiconductor channel layer away from the substrate. The compensation pattern and the semiconductor channel layer are different types of semiconductors. By disposing the compensation pattern on the surface of the semiconductor channel layer away from the substrate, the compensation pattern and the semiconductor channel layer are different types of semiconductors, the compensation pattern can further improve a conductivity of a PNP structure, or the compensation pattern can further reduce a leakage current of a NPN structure.