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    Systems and methods for cooling and removing reactants from a substrate processing chamber
    6.
    发明授权
    Systems and methods for cooling and removing reactants from a substrate processing chamber 有权
    用于从基板处理室冷却和除去反应物的系统和方法

    公开(公告)号：US09453614B2

    公开(公告)日：2016-09-27

    申请号：US14215910

    申请日：2014-03-17

    Applicant: LAM RESEARCH CORPORATION

    Inventor： Colin F. Smith

    IPC: H01L21/67 ,  F17D3/16

    CPC classification number: F17D3/16 ,  H01L21/00 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/6719 ,  Y10T137/0402 ,  Y10T137/794 ,  Y10T137/87587 ,  Y10T137/87627

    Abstract: A cooling and reactant removal system includes first and second gate valves. An outlet of the first gate valve is arranged in fluid communication with the process volume of the processing chamber. A filter is arranged in fluid communication with an inlet of the first gate valve. An inlet of the second gate valve is arranged in fluid communication with the process volume of the processing chamber. A gas amplifier has a first inlet, a second inlet, an outlet and at least one Coanda surface. Compressed gas received at the first inlet of the gas amplifier is directed across the Coanda surface. The second inlet of the gas amplifier is in fluid communication with the outlet of the second gate valve. The outlet of the gas amplifier is in fluid communication with a scrubbed exhaust system.

    Abstract translation: 冷却和反应物去除系统包括第一和第二闸阀。 第一闸阀的出口布置成与处理室的处理容积流体连通。 过滤器布置成与第一闸阀的入口流体连通。 第二闸阀的入口布置成与处理室的处理容积流体连通。 气体放大器具有第一入口，第二入口，出口和至少一个柯恩达表面。 在气体放大器的第一个入口处接收的压缩气体被引导穿过科恩达表面。 气体放大器的第二入口与第二闸阀的出口流体连通。 气体放大器的出口与洗涤的排气系统流体连通。

    TOOL AND METHOD FOR REMOVING GAS HYDRATES FROM THE SURFACE OF SUBSEA OIL AND GAS EXPLORATION AND PRODUCTION EQUIPMENT THROUGH LASER RADIATION
    7.
    发明申请
    TOOL AND METHOD FOR REMOVING GAS HYDRATES FROM THE SURFACE OF SUBSEA OIL AND GAS EXPLORATION AND PRODUCTION EQUIPMENT THROUGH LASER RADIATION 审中-公开
    通过激光辐射从后置油表面除去气体水合物和气体探测和生产设备的工具和方法

    公开(公告)号：US20160167168A1

    公开(公告)日：2016-06-16

    申请号：US14436553

    申请日：2013-10-18

    Applicant: Leone Pereira Masiero

    Inventor： Leone Pereira Masiero

    IPC: B23K26/122 ,  B23K26/046 ,  B23K26/00 ,  B23K26/36

    CPC classification number: B23K26/122 ,  B08B7/0042 ,  B08B7/0071 ,  B08B9/023 ,  B23K26/046 ,  B23K26/1224 ,  B23K26/16 ,  B23K26/36 ,  B23K26/50 ,  E21B36/00 ,  E21B41/0007 ,  F17D1/05 ,  F17D3/16

    Abstract: A tool and related method for removing unwanted gas hydrates from the surface of equipment used in subsea exploration and production. The tool includes a main vessel and a power cable linked together by a connector. Inside the vessel a laser device is connected to an adjustable focus collimator by a cable, with the wavelength emitted by the laser being between 200 nm and 930 nm. When the radiation reaches the subsea exploration equipment it causes the heating thereof, which in turn heats the hydrate through conduction, breaking down the hydrate formation from the inside out. The front lid of the tools includes a window fitted with anti-reflection film that forms an interface between the vessel and the aqueous medium.

    Abstract translation: 用于从海底勘探和生产中使用的设备表面去除不需要的天然气水合物的工具和相关方法。 该工具包括通过连接器连接在一起的主容器和电力电缆。 在容器内部，激光装置通过电缆连接到可调节聚焦准直仪，激光发射的波长在200nm和930nm之间。 当辐射到达海底勘探设备时，它会导致其加热，从而进一步通过传导加热水合物，从而将水合物形成从内向外分解。 工具的前盖包括一个装有抗反射膜的窗口，该防反射膜在容器和水介质之间形成界面。

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