公开(公告)号：US11946601B2

公开(公告)日：2024-04-02

申请号：US17445892

申请日：2021-08-25

Applicant: DISCO CORPORATION

Inventor： Tsuyoshi Kasai ,  Ken Uehara ,  Satoshi Takahashi

IPC: G01N33/00 ,  B01D46/00 ,  B01D46/42 ,  B01D46/46 ,  F17D3/16 ,  H01L21/67

CPC classification number: F17D3/16 ,  B01D46/0086 ,  B01D46/4272 ,  B01D46/46 ,  G01N33/0047 ,  H01L21/67092

Abstract: An apparatus that utilizes high-pressure air therein includes a main body, an air pipe configured to be supplied with high-pressure air from a high-pressure air supply source and supply the high-pressure air into the main body, a filter configured to remove oil contained in the high-pressure air flowing through the air pipe, a gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the filter, and a reporting unit configured to report, when the gas detector detects the organic gas contained in the high-pressure air, that the high-pressure air is mixed with the oil.

公开(公告)号：US20180333895A1

公开(公告)日：2018-11-22

申请号：US15985844

申请日：2018-05-22

Applicant: DISCO CORPORATION

Inventor： Satoshi Sawaki ,  Ken Uehara ,  Tsuyoshi Kasai

IPC: B28D5/00 ,  H01L21/687 ,  B28D5/02 ,  H01L21/67

CPC classification number: B28D5/0064 ,  B28D5/024 ,  H01L21/67092 ,  H01L21/68764

Abstract: A cutting blade detecting mechanism is provided in a cutting apparatus including a chuck table for holding a workpiece and a cutting blade having an annular cutting edge for cutting the workpiece held on the chuck table while the workpiece is being cutting-fed in an X-axis direction. The cutting blade detecting mechanism has a blade detecting unit configured to detect the state of the cutting edge of the cutting blade. The blade detecting unit includes an image capturing unit configured to capture an image of the cutting edge in the X-axis direction, a light emitter disposed in a position opposite the image capturing unit and facing the cutting edge, and a decision unit configured to determine the state of the shape of a tip end of the cutting edge from the image of the cutting edge which has been captured by the image capturing unit.