MEMORY DEVICES
    10.
    发明公开
    MEMORY DEVICES 审中-公开

    公开(公告)号:US20240315152A1

    公开(公告)日:2024-09-19

    申请号:US18669541

    申请日:2024-05-21

    IPC分类号: H10N70/00 H10B63/00 H10N70/20

    摘要: A method of forming a memory device includes the following operations. A first conductive plug is formed within a first dielectric layer over a substrate. A treating process is performed to transform a portion of the first conductive plug into a buffer layer, and the buffer layer caps the remaining portion of the first conductive plug. A phase change layer and a top electrode are sequentially formed over the buffer layer. A second dielectric layer is formed to encapsulate the top electrode and the underlying phase change layer. A second conductive plug is formed within the second dielectric layer and in physical contact with the top electrode. A filamentary bottom electrode is formed within the buffer layer.