Method of manufacturing an inductor for a microelectronic device
    8.
    发明授权
    Method of manufacturing an inductor for a microelectronic device 有权
    制造微电子器件的电感器的方法

    公开(公告)号:US08621744B2

    公开(公告)日:2014-01-07

    申请号:US13215458

    申请日:2011-08-23

    Abstract: A method of manufacturing an inductor for a microelectronic device comprises providing a substrate (610), forming a first plurality of inductor windings (111, 211, 411, 620, 2030) over the substrate, forming a magnetic inductor core (112, 212, 412, 810) over the first plurality of inductor windings, and forming a second plurality of inductor windings (113, 213, 413, 1010) over the magnetic inductor core. In another embodiment, the method comprises forming the inductor on a sacrificial substrate (1610) such that the inductor can subsequently be mounted onto a carrier tape (1810). In yet another embodiment, a method of manufacturing a substrate for a microelectronic device comprises forming an inductor within a build-up layer (101, 102, 103, 104) of a substrate.

    Abstract translation: 制造用于微电子器件的电感器的方法包括提供衬底(610),在衬底上形成第一组多个电感器绕组(111,211,411,620,2030),形成磁感应芯(112,212, 在第一组多个电感器绕组上方形成第二多个电感器绕组(113,213,413,1010),并在磁感应器芯上形成第二多个电感器绕组(113,213,413,1010)。 在另一个实施例中,该方法包括在牺牲衬底(1610)上形成电感器,使得电感器可以随后安装在载带(1810)上。 在另一个实施例中,制造微电子器件的衬底的方法包括在衬底的堆积层(101,102,103,104)内形成电感器。

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