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公开(公告)号:US08503186B2
公开(公告)日:2013-08-06
申请号:US12841981
申请日:2010-07-22
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H05K7/02
CPC分类号: H01L23/481 , H01L21/76898 , H01L23/3128 , H01L23/5389 , H01L23/60 , H01L24/16 , H01L24/24 , H01L24/45 , H01L24/48 , H01L24/82 , H01L24/94 , H01L24/96 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L25/50 , H01L27/0251 , H01L2224/05139 , H01L2224/05144 , H01L2224/05147 , H01L2224/05155 , H01L2224/05166 , H01L2224/05171 , H01L2224/05181 , H01L2224/05184 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05666 , H01L2224/05681 , H01L2224/13099 , H01L2224/16225 , H01L2224/24145 , H01L2224/24225 , H01L2224/32225 , H01L2224/45124 , H01L2224/45139 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/73204 , H01L2224/73257 , H01L2224/73265 , H01L2224/9202 , H01L2225/06513 , H01L2225/06541 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01042 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/09701 , H01L2924/10253 , H01L2924/10329 , H01L2924/12042 , H01L2924/1305 , H01L2924/1306 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/15747 , H01L2924/15787 , H01L2924/15788 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/3511 , H01L2924/00014 , H01L2924/00 , H01L2924/00012 , H01L2924/00011 , H01L2924/013
摘要: System-in packages, or multichip modules, are described which can include multi-layer chips and multi-layer dummy substrates over a carrier, multiple through vias blindly or completely through the multi-layer chips and completely through the multi-layer dummy substrates, multiple metal plugs in the through vias, and multiple metal interconnects, connected to the metal plugs, between the multi-layer chips. The multi-layer chips can be connected to each other or to an external circuit or structure, such as mother board, ball grid array (BGA) substrate, printed circuit board, metal substrate, glass substrate, or ceramic substrate, through the metal plugs and the metal interconnects.
摘要翻译: 描述了系统包装或多芯片模块,其可以包括载体上的多层芯片和多层虚拟衬底,多个通孔盲目或完全穿过多层芯片并完全通过多层虚拟衬底, 通孔中的多个金属插头以及连接到金属插头的多层芯片之间的多个金属互连。 多层芯片可以通过金属插头彼此连接或外部电路或结构,例如母板,球栅阵列(BGA)基板,印刷电路板,金属基板,玻璃基板或陶瓷基板 和金属互连。
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公开(公告)号:US20120228681A1
公开(公告)日:2012-09-13
申请号:US13475820
申请日:2012-05-18
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H01L27/144
CPC分类号: H01L31/0203 , H01L24/45 , H01L27/14618 , H01L27/14621 , H01L27/14627 , H01L27/14632 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/73265 , H01L2224/8592 , H01L2924/01015 , H01L2924/01047 , H01L2924/12042 , H01L2924/13091 , H01L2924/1461 , H01L2924/181 , H01L2924/00014 , H01L2924/00 , H01L2924/20751 , H01L2924/00012
摘要: An image or light sensor chip package includes an image or light sensor chip having a non-photosensitive area and a photosensitive area surrounded by the non-photosensitive area. In the photosensitive area, there are light sensors, a layer of optical or color filter array over the light sensors and microlenses over the layer of optical or color filter array. In the non-photosensitive area, there are an adhesive polymer layer and multiple metal structures having a portion in the adhesive polymer layer. A transparent substrate is formed on a top surface of the adhesive polymer layer and over the microlenses. The image or light sensor chip package also includes wirebonded wires or a flexible substrate bonded with the metal structures of the image or light sensor chip.
摘要翻译: 图像或光传感器芯片封装包括具有非感光区域和由非感光区域包围的感光区域的图像或光传感器芯片。 在感光区域中有光传感器,光学或彩色滤光片阵列在光传感器和光学或彩色滤光片阵列上的微透镜之上。 在非感光区域中,粘合聚合物层和粘合聚合物层中具有一部分的多个金属结构体。 在粘合聚合物层的顶表面上并在微透镜上形成透明基底。 图像或光传感器芯片封装还包括引线键合线或与图像或光传感器芯片的金属结构接合的柔性基板。
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公开(公告)号:US07985653B2
公开(公告)日:2011-07-26
申请号:US12276419
申请日:2008-11-24
申请人: Wen-Chieh Lee , Mou-Shiung Lin , Chien-Kang Chou , Yi-Cheng Liu , Chiu-Ming Chou , Jin-Yuan Lee
发明人: Wen-Chieh Lee , Mou-Shiung Lin , Chien-Kang Chou , Yi-Cheng Liu , Chiu-Ming Chou , Jin-Yuan Lee
IPC分类号: H01L21/20 , H01L21/8222 , H01L21/8234 , H01L21/4763 , H01L21/8238
CPC分类号: H01L23/3114 , H01L23/5227 , H01L23/525 , H01L24/05 , H01L24/10 , H01L24/13 , H01L24/48 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/04073 , H01L2224/05624 , H01L2224/13 , H01L2224/13099 , H01L2224/48463 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01009 , H01L2924/01011 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01022 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01041 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/09701 , H01L2924/10329 , H01L2924/1305 , H01L2924/14 , H01L2924/15787 , H01L2924/15788 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2224/45099 , H01L2924/00
摘要: A method for fabricating a circuitry component includes providing a semiconductor substrate, a first coil over said semiconductor substrate, a passivation layer over said first coil; and depositing a second coil over said passivation layer and over said first coil. Said second coil may be deposited by forming a first metal layer over said passivation layer, forming a pattern defining layer over said first metal layer, a first opening in said pattern defining layer exposing said first metal layer, forming a second metal layer over said first metal layer exposed by said first opening, removing said pattern defining layer, and removing said first metal layer not under said second metal layer.
摘要翻译: 一种用于制造电路部件的方法包括提供半导体衬底,在所述半导体衬底上的第一线圈,在所述第一线圈上方的钝化层; 以及在所述钝化层上并在所述第一线圈上方沉积第二线圈。 所述第二线圈可以通过在所述钝化层上形成第一金属层而形成,在所述第一金属层上形成图案限定层,所述图案限定层中的第一开口暴露所述第一金属层,在所述第一金属层上形成第二金属层 由所述第一开口暴露的金属层,去除所述图案限定层,以及去除不在所述第二金属层下方的所述第一金属层。
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公开(公告)号:US07902067B2
公开(公告)日:2011-03-08
申请号:US11906840
申请日:2007-10-04
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H01L21/4763
CPC分类号: H01L23/60 , H01L21/768 , H01L21/76801 , H01L21/76838 , H01L23/5222 , H01L23/5223 , H01L23/5227 , H01L23/5283 , H01L23/5286 , H01L23/5329 , H01L23/53295 , H01L23/62 , H01L24/05 , H01L27/0248 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/3011 , H01L2924/00
摘要: A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.
摘要翻译: 提供了一种创建互连线的方法。 细线互连提供在已经在衬底的表面中或其上形成的半导体电路的第一绝缘层中。 钝化层沉积在电介质层上,在钝化层的表面上形成厚的第二层电介质。 在厚的第二层电介质中产生厚而宽的互连线。 也可以消除第一层电介质,在已经沉积在衬底的表面上的钝化层的表面上产生宽厚的互连网络。
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公开(公告)号:US07524759B2
公开(公告)日:2009-04-28
申请号:US11856083
申请日:2007-09-17
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H01L21/4763
CPC分类号: H01L23/60 , H01L21/768 , H01L21/76801 , H01L21/76838 , H01L23/5222 , H01L23/5223 , H01L23/5227 , H01L23/5283 , H01L23/5286 , H01L23/5329 , H01L23/53295 , H01L23/62 , H01L24/05 , H01L27/0248 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/3011 , H01L2924/00
摘要: A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.
摘要翻译: 提供了一种创建互连线的方法。 细线互连提供在已经在衬底的表面中或其上形成的半导体电路的第一绝缘层中。 钝化层沉积在电介质层上,在钝化层的表面上形成厚的第二层电介质。 在厚的第二层电介质中产生厚而宽的互连线。 也可以消除第一层电介质,在已经沉积在衬底的表面上的钝化层的表面上产生宽厚的互连网络。
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86.
公开(公告)号:US07521812B2
公开(公告)日:2009-04-21
申请号:US11678598
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/485 , H01L23/49
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
摘要翻译: 提供了一种方法和结构,以在集成电路管芯上形成的有源和/或无源器件和/或低k电介质上实现引线接合连接。 提供了具有有源和/或无源器件的半导体衬底,其中在有源和/或无源器件上形成互连金属化。 提供了形成在互连金属化之上的钝化层,其中在钝化层中形成开口以形成互连金属化的上金属层。 柔性金属焊盘形成在钝化层上方,其中柔性金属接合焊盘通过开口连接到上金属层,并且其中柔性金属接合焊盘基本上形成在有源和/或无源器件的上方。 顺应性金属接合焊盘可以由复合金属结构形成。
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公开(公告)号:US07446031B2
公开(公告)日:2008-11-04
申请号:US11927719
申请日:2007-10-30
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H01L21/4763
CPC分类号: H01L23/60 , H01L21/768 , H01L21/76801 , H01L21/76838 , H01L23/5222 , H01L23/5223 , H01L23/5227 , H01L23/5283 , H01L23/5286 , H01L23/5329 , H01L23/53295 , H01L23/62 , H01L24/05 , H01L27/0248 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/3011 , H01L2924/00
摘要: A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.
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公开(公告)号:US07439626B2
公开(公告)日:2008-10-21
申请号:US11856075
申请日:2007-09-17
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H01L23/48
CPC分类号: H01L23/60 , H01L21/768 , H01L21/76801 , H01L21/76838 , H01L23/5222 , H01L23/5223 , H01L23/5227 , H01L23/5283 , H01L23/5286 , H01L23/5329 , H01L23/53295 , H01L23/62 , H01L24/05 , H01L27/0248 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/3011 , H01L2924/00
摘要: A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.
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公开(公告)号:US20080246154A1
公开(公告)日:2008-10-09
申请号:US12138453
申请日:2008-06-13
申请人: Mou-Shiung Lin , Jin-Yuan Lee
发明人: Mou-Shiung Lin , Jin-Yuan Lee
IPC分类号: H01L23/52
CPC分类号: H01L21/768 , H01L21/76804 , H01L21/76807 , H01L21/76838 , H01L23/522 , H01L23/5222 , H01L23/5223 , H01L23/5225 , H01L23/5227 , H01L23/5228 , H01L23/525 , H01L23/5283 , H01L23/5286 , H01L23/5329 , H01L23/53295 , H01L23/60 , H01L24/11 , H01L24/12 , H01L27/0676 , H01L27/08 , H01L28/10 , H01L28/20 , H01L2224/0231 , H01L2224/02311 , H01L2224/02313 , H01L2224/0401 , H01L2224/1148 , H01L2224/13099 , H01L2224/16225 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01018 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01046 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/12044 , H01L2924/14 , H01L2924/15174 , H01L2924/15184 , H01L2924/15192 , H01L2924/15311 , H01L2924/15787 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2924/351 , H01L2924/00
摘要: The present invention adds one or more thick layers of polymer dielectric and one or more layers of thick, wide metal lines on top of a finished semiconductor wafer, post-passivation. The thick, wide metal lines may be used for long signal paths and can also be used for power buses or power planes, clock distribution networks, critical signal, and re-distribution of I/O pads for flip chip applications. Photoresist defined electroplating, sputter/etch, or dual and triple damascene techniques are used for forming the metal lines and via fill.
摘要翻译: 本发明在完成的半导体晶片的顶部上添加一层或多层厚的聚合物电介质和一层或多层厚的宽金属线,后钝化。 厚的宽金属线路可用于长信号路径,也可用于电源总线或电源平面,时钟分配网络,关键信号和用于倒装芯片应用的I / O焊盘的重新分配。 光刻胶定义的电镀,溅射/蚀刻或双重和三重镶嵌技术用于形成金属线和通孔填充。
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公开(公告)号:US20080080113A1
公开(公告)日:2008-04-03
申请号:US11864938
申请日:2007-09-29
申请人: Mou-Shiung Lin , Jin-Yuan Lee , Chien-Kang Chou
发明人: Mou-Shiung Lin , Jin-Yuan Lee , Chien-Kang Chou
IPC分类号: H02H9/00
CPC分类号: H01L23/552 , H01L21/76816 , H01L21/76873 , H01L23/5283 , H01L23/5286 , H01L23/53238 , H01L23/5329 , H01L24/05 , H01L24/11 , H01L24/45 , H01L24/48 , H01L24/73 , H01L27/0251 , H01L2224/02166 , H01L2224/0231 , H01L2224/0401 , H01L2224/04042 , H01L2224/05572 , H01L2224/05624 , H01L2224/05647 , H01L2224/05664 , H01L2224/1148 , H01L2224/13022 , H01L2224/13099 , H01L2224/16145 , H01L2224/32225 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48463 , H01L2224/48624 , H01L2224/48647 , H01L2224/48664 , H01L2224/48724 , H01L2224/48747 , H01L2224/48764 , H01L2224/48824 , H01L2224/48847 , H01L2224/48864 , H01L2224/73257 , H01L2224/73265 , H01L2924/00014 , H01L2924/0002 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01072 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/01322 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/05042 , H01L2924/09701 , H01L2924/10253 , H01L2924/1305 , H01L2924/13091 , H01L2924/14 , H01L2924/15311 , H01L2924/15787 , H01L2924/15788 , H01L2924/19041 , H01L2924/19043 , H01L2924/30105 , H01L2924/01039 , H01L2924/00 , H01L2224/05552
摘要: An integrated circuit chip includes a silicon substrate, a first circuit in or over said silicon substrate, a second circuit device in or over said silicon substrate, a dielectric structure over said silicon substrate, a first interconnecting structure in said dielectric structure, a first pad connected to said first node of said voltage regulator through said first interconnecting structure, a second interconnecting structure in said dielectric structure, a second pad connected to said first node of said internal circuit through said second interconnecting structure, a passivation layer over said dielectric structure, wherein multiple opening in said passivation layer exposes said first and second pads, and a third interconnecting structure over said passivation layer and over said first and second pads.
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