Particle detection apparatus and particle detection method

    公开(公告)号:US09638622B2

    公开(公告)日:2017-05-02

    申请号:US14652433

    申请日:2013-10-15

    Abstract: A particle detection apparatus and a particle detection method capable of accurately detecting scattered light are provided. A scattered light detection unit of the particle detection apparatus having at least a light illumination unit for illuminating a particle with light and the scattered light detection unit for detecting scattered light emitted from the particle illuminated with light is provided with a first detection portion for detecting scattered light, a second detection portion for detecting illumination light onto a particle, and a signal processing unit for removing a noise component from a signal detected in the first detection portion based on a signal detected in the second detection portion.

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