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41.发明申请公开(公告)号：US20170293812A1
公开(公告)日：2017-10-12
申请号：US15471050
申请日：2017-03-28
发明人： TATSUO ITOH , KOICHI KUSUKAME
CPC分类号： G06K9/00798 , B60W40/06 , G01N21/21 , G01N21/314 , G01N21/3554 , G01N2021/4792 , G01N2201/0216 , G01N2201/105 , G01S7/411 , G02B27/283 , G06K9/00805 , G08B19/02 , H04N5/2256 , H04N5/33
摘要： A detection device includes: a light source that emits, toward an object, light of a first wavelength band, and light of a second wavelength band that is less readily absorbed by water than the light of the first wavelength band; a polarization splitter that splits at least one of S-polarized light and P-polarized light from light that has been reflected or scattered at the object; a photoreceptor that receives light reflected or scattered at the object via the polarization splitter; and a control unit that determines a state of the object from information based on light received by the photoreceptor. The light emitted by the light source is random polarized light where the ratio of P-polarized light and S-polarized light is generally uniform.
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公开(公告)号：US20170269000A1
公开(公告)日：2017-09-21
申请号：US15616995
申请日：2017-06-08
申请人： OLYMPUS CORPORATION
发明人： Yoshioki KANEKO
CPC分类号： G01N21/6458 , A61B1/00186 , A61B1/043 , A61B5/0071 , A61B5/0084 , G01N2021/6478 , G01N2201/0636 , G01N2201/105 , G02B3/0006 , G02B21/0032 , G02B21/0044 , G02B21/0048 , G02B21/0076 , G02B21/361
摘要： Provided is a system for observing an object that emits fluorescence when irradiated with excitation light. The system includes: a hole unit having holes on a plane perpendicular to an optical axis of the objective lens to allow the excitation light to pass through the holes in a direction parallel to the optical axis; and an imaging unit including: an imaging lens configured to focus the fluorescence; a microlens array having microlenses arranged on a plane perpendicular to an optical axis of the imaging lens; and an image sensor having pixels configured to: receive the fluorescence via the objective lens, at least one of the holes, and the microlens array, the fluorescence being emitted when the object is irradiated with the excitation light having passed through at least one of the holes and the objective lens; and output an image signal in accordance with an intensity of the received fluorescence.
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公开(公告)号：US09708730B1
公开(公告)日：2017-07-18
申请号：US15488342
申请日：2017-04-14
申请人： SUMCO CORPORATION
发明人： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Masami Ohara
CPC分类号： H01J37/32935 , C30B15/00 , C30B15/10 , C30B15/14 , C30B29/06 , C30B35/002 , G01N21/3563 , G01N21/65 , G01N21/68 , G01N21/95 , G01N2021/8477 , G01N2201/105 , G01N2201/12
摘要： A quality-evaluated vitreous silica crucible for pulling silicon single crystal is provided, wherein an inner surface of the vitreous silica crucible has regions where surface defects including brown rings are to be generated when pulling silicon single crystal. The regions are distinguished using an infrared absorption spectrum or a Raman shift of the regions, wherein a position of each region and/or a density of the regions are/is specified.
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公开(公告)号：US20170088973A1
公开(公告)日：2017-03-30
申请号：US15377963
申请日：2016-12-13
申请人： SUMCO CORPORATION
发明人： Toshiaki SUDO , Tadahiro SATO , Ken KITAHARA , Masami OHARA
CPC分类号： H01J37/32935 , C30B15/00 , C30B15/10 , C30B15/14 , C30B29/06 , C30B35/002 , G01N21/3563 , G01N21/65 , G01N21/68 , G01N21/95 , G01N2021/8477 , G01N2201/105 , G01N2201/12
摘要： A method of manufacturing a vitreous silica crucible includes an inspection method comprising: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether a surface defect region is generated or not in the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.
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公开(公告)号：US09557265B2
公开(公告)日：2017-01-31
申请号：US14373928
申请日：2013-01-24
申请人： TOMRA SORTING AS
发明人： Dirk Balthasar , Ole Onsrud
CPC分类号： G01N21/55 , G01N21/84 , G01N2021/845 , G01N2201/105 , G02B26/105
摘要： An apparatus for detecting matter, the apparatus including: a first light source adapted to emit a first light beam; a second light source adapted to emit a second light beam, wherein the apparatus is arranged such that the first and second light beams converge towards a scanning element; the scanning element adapted to redirect the converging first and second light beams towards the matter to be detected; and a detector adapted to receive light reflected by the matter via the scanning element. Also, a system and method of detecting matter.
摘要翻译： 一种用于检测物质的装置，所述装置包括：适于发射第一光束的第一光源; 适于发射第二光束的第二光源，其中所述设备被布置成使得所述第一和第二光束朝向扫描元件会聚; 所述扫描元件适于将所述会聚的第一和第二光束朝向待检测的物体重定向; 以及检测器，适于接收经由扫描元件反射的光。 另外，检测物质的系统和方法。
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公开(公告)号：US09518932B2
公开(公告)日：2016-12-13
申请号：US14517751
申请日：2014-10-17
发明人： Allen Park , Craig MacNaughton , Ellis Chang
CPC分类号： G01N21/93 , G01B11/06 , G01B11/0675 , G01B2210/56 , G01N21/9501 , G01N21/956 , G01N2201/061 , G01N2201/105 , G01N2201/11 , G01N2201/125 , G03F7/705 , G03F7/70616
摘要： Methods and systems for determining one or more parameters of a wafer inspection process are provided. One method includes acquiring metrology data for a wafer generated by a wafer metrology system. The method also includes determining one or more parameters of a wafer inspection process for the wafer or another wafer based on the metrology data.
摘要翻译： 提供了用于确定晶片检查过程的一个或多个参数的方法和系统。 一种方法包括获取由晶片计量系统产生的晶片的度量数据。 该方法还包括基于测量数据确定晶片或另一晶片的晶片检查过程的一个或多个参数。
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公开(公告)号：US09518930B2
公开(公告)日：2016-12-13
申请号：US13964399
申请日：2013-08-12
发明人： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit. The collector output slit has a width that is selected to be proportional to the scanned spot size, so as to allow passage of the focused scattered light associated with the scanned spot, and exclude the focused scattered light associated with the workpiece regions other than the desired spot. A collector output varying subsystem varies the collector output slit so as to at least one of minimize passage of Rayleigh light scatter through the collector output slit or optimize a signal to air-scatter-noise ratio.
摘要翻译： 一种用于表面检查系统中用于检查工件表面的光学收集和检测系统。 表面检查系统具有通过背面四分之一球并且朝向表面上的期望位置投射的入射光束，其是具有已知扫描光斑尺寸的扫描点。 入射光束撞击在表面上以产生由收集器模块收集的散射光。 收集器模块包括用于收集和聚焦散射光以形成聚焦散射光的收集光学器件。 收集器输出狭缝位于收集器模块的输出处，收集光学器件通过该收集器模块聚焦散射光。 与扫描点相关联的散射光在收集器输出狭缝处形成成像点。 集电极输出狭缝具有被选择成与扫描光斑尺寸成比例的宽度，以便允许与扫描光点相关联的聚焦散射光的通过，并且排除与除了所需的以外的工件区域相关联的聚焦散射光 点。 集电极输出变化子系统使收集器输出狭缝变化，以便使瑞利光散射通过集电极输出狭缝的最小化通道中的至少一个或将信号优化为空气散射噪声比。
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公开(公告)号：US09488591B2
公开(公告)日：2016-11-08
申请号：US14525647
申请日：2014-10-28
IPC分类号： G01N21/00 , G01N21/88 , G01N21/21 , G01N21/47 , G01N21/55 , G01N21/95 , G01N21/956 , G06T7/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
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公开(公告)号：US20160265749A1
公开(公告)日：2016-09-15
申请号：US15060583
申请日：2016-03-03
发明人： YASUHISA INADA
CPC分类号： F21V9/30 , F21V9/00 , F21V14/02 , G01N21/59 , G01N2201/105 , G03B21/204
摘要： a light-emitting device including: a photoluminescent layer that contains a photoluminescent material and emits light including first light having a wavelength λa in air; and a light-transmissive layer located on or near the photoluminescent layer. At least one periodic structure is defined on at least one of the photoluminescent layer and the light-transmissive layer. The at least one periodic structure has projections or recesses or both. A distance Dint between two adjacent projections or two adjacent recesses and a refractive index nwav-a of the photoluminescent layer for the first light satisfy λa/nwav-a
摘要翻译： 发光装置，包括：含有光致发光材料并发射包括空气中波长λa的第一光的光的光致发光层; 以及位于光致发光层上或附近的透光层。 在光致发光层和透光层中的至少一个上限定至少一个周期性结构。 所述至少一个周期性结构具有突起或凹槽或两者。 在两个相邻的突起或两个相邻凹部之间的距离Dint和用于第一光的光致发光层的折射率nwav-a满足λa/ nwav-a
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公开(公告)号：US09429513B2
公开(公告)日：2016-08-30
申请号：US14454052
申请日：2014-08-07
申请人： RICOH COMPANY, LTD.
发明人： Kazuhiko Adachi , Yoshihiro Oba , Toshihiro Ishii , Fumikazu Hoshi , Sunao Chubachi , Yoshihiro Misaka
CPC分类号： G01N21/21 , G01B11/06 , G01G9/00 , G01N21/4738 , G01N21/59 , G01N2201/06113 , G01N2201/062 , G01N2201/0691 , G01N2201/105 , G03G15/5029 , G03G2215/00616 , G03G2215/00738 , G03G2215/00742
摘要： A sensor apparatus includes an irradiation system with a light source configured to emit linearly polarized light of a first polarization direction onto a sheet-like object, in a direction oblique to a direction orthogonal to a surface of the object, a first photodetector arranged on an optical path of light that is emitted from the irradiation system and then is reflected at the object by regular reflection, a first optical element, arranged on an optical path of light reflected by diffuse reflection from an incidence plane of the object, configured to transmit linearly polarized light of a second polarization direction that is orthogonal to the first polarization direction, a second photodetector configured to receive light that has passed through the first optical element, and a detection unit configured to detect at least one of basis weight and thickness of the object.
摘要翻译： 一种传感器装置，包括具有光源的照射系统，被配置为沿与物体的表面正交的方向倾斜的方向将第一偏振方向的线偏振光发射到片状物体上;第一光电检测器， 从照射系统发射的光的光路，然后通过规则反射在物体处反射;第一光学元件，布置在从物体的入射平面漫反射反射的光的光路上，被配置为线性地透射 与第一偏振方向正交的第二偏振方向的偏振光，被配置为接收通过第一光学元件的光的第二光电检测器，以及检测单元，被配置为检测物体的基重和厚度中的至少一个 。
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