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    ILLUMINATION SYSTEM FOR RECOGNIZING MATERIAL AND METHOD OF RECOGNIZING MATERIAL USING THE SAME
    1.
    发明申请
    ILLUMINATION SYSTEM FOR RECOGNIZING MATERIAL AND METHOD OF RECOGNIZING MATERIAL USING THE SAME 审中-公开

    公开(公告)号：US20190120759A1

    公开(公告)日：2019-04-25

    申请号：US16229356

    申请日：2018-12-21

    申请人： DeeDiim Sensors Inc.

    发明人： Jang-Il SER

    IPC分类号： G01N21/47 ,  G01N21/55

    CPC分类号： G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N2021/4716 ,  G01N2021/4733 ,  G01N2021/556 ,  G01N2201/0626 ,  G01N2201/0634 ,  G01N2201/0638 ,  G01N2201/0655

    摘要： An illumination system includes a measurement stage on which a measurement target is located, a light-providing part having illumination sections providing multi-directional incident lights to the measurement target, a light-receiving part receiving single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights, and a processing part that performs acquiring a first distribution of intensities the single-directional reflection lights with respect to the multi-directional incident lights, acquiring, from the first distribution, a second distribution of intensities of multi-directional reflections lights with respect to a single-directional incident light, and determining material of the measurement target based on parameters of the second distribution. A method of recognizing material using the illumination system and a computer readable non-transitory recording medium recording a program embodying the method are provided.

    Scattered light measurement system
    7.
    发明授权
    Scattered light measurement system 有权
    散射光测量系统

    公开(公告)号：US09518930B2

    公开(公告)日：2016-12-13

    申请号：US13964399

    申请日：2013-08-12

    申请人： KLA-Tencor Corporation

    发明人： Neil Judell ,  Ian T. Kohl ,  Songping Gao ,  Richard E. Bills

    IPC分类号： G01N21/88 ,  G01N21/21 ,  G01N21/47 ,  G01N21/55 ,  G01N21/95 ,  G01N21/956 ,  G06T7/00

    CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

    摘要： An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit. The collector output slit has a width that is selected to be proportional to the scanned spot size, so as to allow passage of the focused scattered light associated with the scanned spot, and exclude the focused scattered light associated with the workpiece regions other than the desired spot. A collector output varying subsystem varies the collector output slit so as to at least one of minimize passage of Rayleigh light scatter through the collector output slit or optimize a signal to air-scatter-noise ratio.

    摘要翻译： 一种用于表面检查系统中用于检查工件表面的光学收集和检测系统。 表面检查系统具有通过背面四分之一球并且朝向表面上的期望位置投射的入射光束，其是具有已知扫描光斑尺寸的扫描点。 入射光束撞击在表面上以产生由收集器模块收集的散射光。 收集器模块包括用于收集和聚焦散射光以形成聚焦散射光的收集光学器件。 收集器输出狭缝位于收集器模块的输出处，收集光学器件通过该收集器模块聚焦散射光。 与扫描点相关联的散射光在收集器输出狭缝处形成成像点。 集电极输出狭缝具有被选择成与扫描光斑尺寸成比例的宽度，以便允许与扫描光点相关联的聚焦散射光的通过，并且排除与除了所需的以外的工件区域相关联的聚焦散射光 点。 集电极输出变化子系统使收集器输出狭缝变化，以便使瑞利光散射通过集电极输出狭缝的最小化通道中的至少一个或将信号优化为空气散射噪声比。

    Optical sensor and image forming device incorporating the same
    8.
    发明授权
    Optical sensor and image forming device incorporating the same 有权
    光学传感器和包含该光学传感器的图像形成装置

    公开(公告)号：US09513218B2

    公开(公告)日：2016-12-06

    申请号：US14199056

    申请日：2014-03-06

    申请人： Yoshihiro Ohba ,  Satoru Sugawara ,  Toshihiro Ishii ,  Fumikazu Hoshi

    发明人： Yoshihiro Ohba ,  Satoru Sugawara ,  Toshihiro Ishii ,  Fumikazu Hoshi

    IPC分类号： G01N21/47 ,  G03G15/00 ,  H01J3/14 ,  G01J1/42 ,  G01N21/55 ,  G01N21/21

    CPC分类号： G01N21/55 ,  G01N21/21 ,  G01N21/474 ,  G01N2021/556 ,  G03G15/50 ,  G03G15/5029 ,  G03G2215/00616 ,  G03G2215/00738 ,  G03G2215/0132

    摘要： An optical sensor includes a light source to illuminate a linear polarization in a first direction, a first optical detector disposed on a path of a light illuminated from the light source and specularly reflected by an object, a first optical element to separate the light reflected by the object into a linear polarization in the first direction and a linear polarization in a second direction orthogonal to the first direction, a second optical detector to receive the linear polarization in the second direction separated by the first optical element, and a processor to obtain an amount of the light specularly reflected by the object on the basis of an output signal of the first optical detector and an output signal of the second optical detector.

    摘要翻译： 光学传感器包括：照射第一方向的线偏振光的光源;设置在从光源照射并被物体镜面反射的光的路径上的第一光学检测器;第一光学元件，用于将由 所述物体在所述第一方向上成线偏振，并且在与所述第一方向正交的第二方向上的线偏振，在所述第二方向上接收由所述第一光学元件分离的所述线偏振的第二光检测器，以及处理器， 基于第一光学检测器的输出信号和第二光学检测器的输出信号被物体镜面反射的光量。

    Gloss Evaluation Method And Gloss Evaluation Device
    10.
    发明申请
    Gloss Evaluation Method And Gloss Evaluation Device 审中-公开
    光泽评估方法和光泽评估装置

    公开(公告)号：US20160258865A1

    公开(公告)日：2016-09-08

    申请号：US15033733

    申请日：2014-09-16

    申请人： KONICA MINOLTA, INC.

    发明人： Toshio KAWANO ,  Yushi NOBUMOTO

    IPC分类号： G01N21/57 ,  G01N21/55

    CPC分类号： G01N21/57 ,  G01J3/50 ,  G01N21/27 ,  G01N21/55 ,  G01N2021/556

    摘要： In a gloss evaluation method and a gloss evaluation apparatus according to the present invention, an intensity P of specular light obtained by illuminating an object to be measured with illumination light of spectral irradiance emitted from the reference machine is obtained from an intensity of specular light obtained by illuminating the object to be measured with first illumination light of spectral irradiance from a relevant machine, based on an intensity b of dispersed reflected light obtained by illuminating the object to be measured with the first illumination light, and a spectral reflectance of diffuse reflection light obtained by illuminating the object to be measured with predetermined second illumination light from a different illuminating angle.

    摘要翻译： 在根据本发明的光泽评估方法和光泽评估装置中，从获得的镜面光的强度获得通过用从参考机器发射的光谱辐照度的照明光照射待测物体所获得的镜面光的强度P 基于通过用第一照明光照射被测量物体获得的分散的反射光的强度b和漫反射光的光谱反射率，通过用来自相关机器的光谱辐照度的第一照明光照射待测量对象 通过用不同的照明角度的预定的第二照明光照射被测量物体获得。