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11 条记录 (耗时 0.029 秒)

    System With Polarized Scattered Light
    6.
    发明申请
    System With Polarized Scattered Light 有权
    带有偏振散射光的系统

    公开(公告)号：US20130342833A1

    公开(公告)日：2013-12-26

    申请号：US13964399

    申请日：2013-08-12

    申请人： KLA-Tencor Corporation

    发明人： Neil Judell ,  Ian T. Kohl ,  Songping Gao ,  Richard E. Bills

    IPC分类号： G01N21/95

    CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

    摘要： An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit. The collector output slit has a width that is selected to be proportional to the scanned spot size, so as to allow passage of the focused scattered light associated with the scanned spot, and exclude the focused scattered light associated with the workpiece regions other than the desired spot. A collector output varying subsystem varies the collector output slit so as to at least one of minimize passage of Rayleigh light scatter through the collector output slit or optimize a signal to air-scatter-noise ratio.

    摘要翻译： 一种用于表面检查系统中用于检查工件表面的光学收集和检测系统。 表面检查系统具有通过背面四分之一球并且朝向表面上的期望位置投射的入射光束，其是具有已知扫描光斑尺寸的扫描点。 入射光束撞击在表面上以产生由收集器模块收集的散射光。 收集器模块包括用于收集和聚焦散射光以形成聚焦散射光的收集光学器件。 收集器输出狭缝位于收集器模块的输出处，收集光学器件通过该收集器模块聚焦散射光。 与扫描点相关联的散射光在收集器输出狭缝处形成成像点。 集电极输出狭缝具有被选择成与扫描光斑尺寸成比例的宽度，以便允许与扫描光点相关联的聚焦散射光的通过，并且排除与除了所需的以外的工件区域相关联的聚焦散射光 点。 集电极输出变化子系统使收集器输出狭缝变化，以便使瑞利光散射通过集电极输出狭缝的最小化通道中的至少一个或将信号优化为空气散射噪声比。

    Scattered light measurement system
    9.
    发明授权
    Scattered light measurement system 有权
    散射光测量系统

    公开(公告)号：US09518930B2

    公开(公告)日：2016-12-13

    申请号：US13964399

    申请日：2013-08-12

    申请人： KLA-Tencor Corporation

    发明人： Neil Judell ,  Ian T. Kohl ,  Songping Gao ,  Richard E. Bills

    IPC分类号： G01N21/88 ,  G01N21/21 ,  G01N21/47 ,  G01N21/55 ,  G01N21/95 ,  G01N21/956 ,  G06T7/00

    CPC分类号： G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

    摘要： An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit. The collector output slit has a width that is selected to be proportional to the scanned spot size, so as to allow passage of the focused scattered light associated with the scanned spot, and exclude the focused scattered light associated with the workpiece regions other than the desired spot. A collector output varying subsystem varies the collector output slit so as to at least one of minimize passage of Rayleigh light scatter through the collector output slit or optimize a signal to air-scatter-noise ratio.

    摘要翻译： 一种用于表面检查系统中用于检查工件表面的光学收集和检测系统。 表面检查系统具有通过背面四分之一球并且朝向表面上的期望位置投射的入射光束，其是具有已知扫描光斑尺寸的扫描点。 入射光束撞击在表面上以产生由收集器模块收集的散射光。 收集器模块包括用于收集和聚焦散射光以形成聚焦散射光的收集光学器件。 收集器输出狭缝位于收集器模块的输出处，收集光学器件通过该收集器模块聚焦散射光。 与扫描点相关联的散射光在收集器输出狭缝处形成成像点。 集电极输出狭缝具有被选择成与扫描光斑尺寸成比例的宽度，以便允许与扫描光点相关联的聚焦散射光的通过，并且排除与除了所需的以外的工件区域相关联的聚焦散射光 点。 集电极输出变化子系统使收集器输出狭缝变化，以便使瑞利光散射通过集电极输出狭缝的最小化通道中的至少一个或将信号优化为空气散射噪声比。