发明申请
- 专利标题: Back Quartersphere Scattered Light Analysis
- 专利标题(中): Back Quartersphere散射光分析
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申请号: US13709493申请日: 2012-12-10
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公开(公告)号: US20130094023A1公开(公告)日: 2013-04-18
- 发明人: Richard E. Bills , Neil Judell
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-TENCOR CORPORATION
- 当前专利权人: KLA-TENCOR CORPORATION
- 当前专利权人地址: US CA Milpitas
- 主分类号: G01N21/88
- IPC分类号: G01N21/88
摘要:
An optical collection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a location on the surface of the workpiece to impinge on the surface. This forms a reflected beam that extends along a light channel axis in a front quartersphere, and forms scattered light having a haze scatter portion. The incident beam and the light channel axis form an incident plane. The optical collection system includes back collectors that are positioned in the back quartersphere for collecting the scattered light, where each of the back collectors is disposed in the back quartersphere outside the incident plane, and at a relative minimum in the Rayleigh scatter.
公开/授权文献
- US08553215B2 Back quartersphere scattered light analysis 公开/授权日:2013-10-08
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