Plasma-resistant member
    46.
    发明授权
    Plasma-resistant member 有权
    等离子体成员

    公开(公告)号:US08865291B2

    公开(公告)日:2014-10-21

    申请号:US13469219

    申请日:2012-05-11

    申请人: Yoshinobu Goto

    发明人: Yoshinobu Goto

    摘要: A plasma-resistant member according to the present invention includes a base member formed of a silicon nitride sintered body, an aluminum nitride sintered body, an alumina sintered body, or a silicon carbide sintered body; and a thin film formed on a surface of the base member and composed of an yttrium compound or a spinel, wherein the thin film has, in a surface of the thin film, a plurality of projections for supporting a wafer, and a ratio a2/a1 of a film thickness a2 of portions of the thin film that include the projections to a film thickness a1 of portions of the thin film that do not include the projections satisfies 1

    摘要翻译: 根据本发明的等离子体阻挡构件包括由氮化硅烧结体,氮化铝烧结体,氧化铝烧结体或碳化硅烧结体形成的基底构件; 以及形成在所述基底构件的表面上并由钇化合物或尖晶石构成的薄膜,其中所述薄膜在所述薄膜的表面中具有用于支撑晶片的多个突起,并且比率a2 / 将不包括突起的薄膜部分的膜厚a1的突起部分的薄膜部分的膜厚度a1的a1分别满足1

    GLASS-CERAMICS COMPOSITE MATERIAL
    48.
    发明申请
    GLASS-CERAMICS COMPOSITE MATERIAL 有权
    玻璃陶瓷复合材料

    公开(公告)号:US20140206522A1

    公开(公告)日:2014-07-24

    申请号:US14221717

    申请日:2014-03-21

    IPC分类号: C03C10/00

    摘要: An easily-administered technology which demonstrates the intrinsic thermal conductivity improvement effect by addition of non-oxide system compound crystal phase (filler particles) and makes it possible to sufficiently raise the thermal conductivity of a glass-ceramics composite material is provided. In the glass phase which constitutes a glass-ceramics composite material, the quantity of aluminum oxide (Al2O3) component is increased under a condition where at least either of zinc oxide (ZnO) component or magnesium oxide (MgO) component exists in a predetermined quantity or more. Thereby, the unintended reaction between a non-oxide system compound crystal phase and a glass phase can be suppressed, and the intrinsic thermal conductivity improvement effect by addition of non-oxide system compound crystal phase (filler particles) can be demonstrated.

    摘要翻译: 提供了通过添加非氧化物系化合物结晶相(填料粒子)表现出固有导热性提高效果的易于施用的技术,并且可以充分提高玻璃 - 陶瓷复合材料的热导率。 在构成玻璃 - 陶瓷复合材料的玻璃相中,在氧化锌(ZnO)成分或氧化镁(MgO)成分中的至少任一种以规定量存在的条件下,氧化铝(Al 2 O 3)成分的量增加 或者更多。 因此,可以抑制非氧化物系化合物结晶相与玻璃相之间的非预期反应,并且可以证明通过添加非氧化物系化合物结晶相(填料颗粒)的固有导热性改善效果。