公开(公告)号：US20240177974A1

公开(公告)日：2024-05-30

申请号：US18432159

申请日：2024-02-05

申请人： FERROTEC MATERIAL TECHNOLOGIES CORPORATION

发明人： Wataru YAMAGISHI ,  Kazumasa MORI ,  Hitoshi KOUNO ,  Shunichi ETO

IPC分类号： H01J37/32 ,  C04B35/48 ,  C04B35/581 ,  C04B35/583 ,  C04B35/584 ,  H01L21/683

CPC分类号： H01J37/32477 ,  C04B35/48 ,  C04B35/581 ,  C04B35/583 ,  C04B35/584 ,  H01J37/32715 ,  H01L21/6833 ,  C04B2235/3244 ,  C04B2235/3826 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/3873 ,  C04B2235/94

摘要： A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.

公开(公告)号：US11964919B2

公开(公告)日：2024-04-23

申请号：US17054978

申请日：2019-08-14

申请人： ZONE INFINITY CO., LTD.

发明人： Inchul Cho

IPC分类号： B28B11/08 ,  C04B35/581 ,  C04B35/584 ,  C04B35/587 ,  C04B35/622 ,  C04B35/63 ,  C04B35/634 ,  C04B35/638 ,  C04B35/64 ,  C04B37/02

CPC分类号： C04B37/023 ,  B28B11/0818 ,  C04B35/581 ,  C04B35/587 ,  C04B35/62218 ,  C04B35/6303 ,  C04B35/6342 ,  C04B35/638 ,  C04B35/64 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/3229 ,  C04B2235/3865 ,  C04B2235/3878 ,  C04B2235/6025 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/658 ,  C04B2235/6582 ,  C04B2237/124 ,  C04B2237/125 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/407 ,  C04B2237/52 ,  C04B2237/60

摘要： A method for manufacturing active metal-brazed a nitride ceramics substrate having excellent joining strength, includes: a step of preparing a mixed raw material; a step of forming a green sheet of the mixed raw material by a tape casting method; a step of removing a binder by performing degreasing; a step of performing sintering; a step of forming an aluminum nitride sintered substrate by performing gradual cooling; and a step of printing a conductive wiring pattern with active metal paste on the aluminum nitride sintered substrate.

公开(公告)号：US11958118B2

公开(公告)日：2024-04-16

申请号：US18003317

申请日：2021-06-23

申请人： KYOCERA CORPORATION

发明人： Futoshi Isobe ,  Hiroyuki Nanahara ,  Yusuke Nagaoka

IPC分类号： C04B35/5831 ,  B23B27/14 ,  C22C29/16

CPC分类号： B23B27/148 ,  C04B35/5831 ,  C22C29/16 ,  B23B2226/125 ,  C04B2235/3217 ,  C04B2235/3865

摘要： An insert includes a cBN sintered compact including cBN particles and a binder phase binding the cBN particles. The cBN particles occupy 60% or more of the cross-sectional area of the cBN sintered compact. The binder phase contains Al compound particles containing at least one of AlN or Al2O3. A particle distribution of the Al compound particles in a cumulative distribution based on the number of the Al compound particles in a cross section of the cBN sintered compact is as follows. The proportion of the Al compound particles with the particle diameter of 0.3 μm or larger is 5% or more, and the proportion of the Al compound particles with the particle diameter of 0.5 μm or larger is less than 5%.

公开(公告)号：US20240007023A1

公开(公告)日：2024-01-04

申请号：US18467882

申请日：2023-09-15

申请人： NGK INSULATORS, LTD.

发明人： Yusuke OGISO

IPC分类号： H02N13/00 ,  C04B35/581 ,  C04B41/00 ,  C04B41/53 ,  B23K26/352

CPC分类号： H02N13/00 ,  C04B35/581 ,  C04B41/0036 ,  C04B41/5346 ,  B23K26/352 ,  C04B2235/3865 ,  C04B2235/3225

摘要： A member for semiconductor manufacturing apparatus of the present invention includes an AlN ceramic substrate with a surface provided with projections for wafer placement. At least part of an area, provided with no projection, of the AlN ceramic substrate has a surface layer region from the surface to a predetermined depth, and a base material region below the surface layer region. The predetermined depth is 5 μm or less. The oxygen content rate of the surface layer region is higher than the oxygen content rate of the base material region.

公开(公告)号：US20190202746A1

公开(公告)日：2019-07-04

申请号：US16079562

申请日：2017-02-24

申请人： KYOCERA Corporation

发明人： Kiyotaka NAKAMURA ,  Masayuki MORIYAMA

IPC分类号： C04B37/00 ,  B32B18/00

CPC分类号： C04B37/003 ,  B32B18/00 ,  C04B35/581 ,  C04B37/005 ,  C04B2235/3208 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3865 ,  C04B2235/442 ,  C04B2235/95 ,  C04B2235/96 ,  C04B2237/064 ,  C04B2237/366 ,  C04B2237/58 ,  C04B2237/595 ,  C04B2237/708 ,  C04B2237/78 ,  C04B2237/80 ,  C04B2237/88

摘要： A ceramic bonded body may include a first member, a second member, a joining layer between the first member and the second member, and a covering layer which covers the joining layer and is located over the first member and the second member. The first member and the second member may include aluminum nitride-based ceramic. The joining layer and the covering layer may include at least aluminum, calcium, yttrium, and oxygen where, in 100 mass % of all of the constituents configuring the joining layer and the covering layer, the aluminum is 21 mass % or more converted to oxides, the calcium is 21 mass % or more converted to oxides, and the sum of the aluminum and the calcium converted to oxides is 86 mass % or more. The covering layer has a content of yttrium converted to oxides greater than that of the joining layer.

公开(公告)号：US20190077718A1

公开(公告)日：2019-03-14

申请号：US16030145

申请日：2018-07-09

申请人： Advanced Ceramic Fibers, LLC

发明人： John E. Garnier

IPC分类号： C04B35/80 ,  C04B35/573 ,  C04B35/591 ,  C04B37/00

CPC分类号： C04B35/806 ,  C04B35/571 ,  C04B35/573 ,  C04B35/589 ,  C04B35/591 ,  C04B35/62863 ,  C04B35/62865 ,  C04B35/62868 ,  C04B35/62897 ,  C04B37/005 ,  C04B38/00 ,  C04B2111/00362 ,  C04B2111/00431 ,  C04B2111/00793 ,  C04B2111/00801 ,  C04B2111/0081 ,  C04B2111/00862 ,  C04B2235/383 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/3882 ,  C04B2235/524 ,  C04B2235/5244 ,  C04B2235/5248 ,  C04B2235/526 ,  C04B2235/5264 ,  C04B2235/5292 ,  C04B2235/5296 ,  C04B2235/5436 ,  C04B2235/767 ,  C04B2235/80 ,  C04B2235/9607 ,  C04B38/0061 ,  C04B38/0074

摘要： Ceramic composite materials that are reinforced with carbide fibers can exhibit ultra-high temperature resistance. For example, such materials may exhibit very low creep at temperatures of up to 2700° F. (1480° C.). The present composites are specifically engineered to exhibit matched thermodynamically stable crystalline phases between the materials included within the composite. In other words, the reinforcing fibers, a debonding interface layer disposed over the reinforcing fibers, and the matrix material of the composite may all be of the same crystalline structural phase (all hexagonal), for increased compatibility and improved properties. Such composite materials may be used in numerous applications.

公开(公告)号：US20190077717A1

公开(公告)日：2019-03-14

申请号：US16189581

申请日：2018-11-13

申请人： KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS

发明人： Abbas Saeed HAKEEM ,  Tahar Laoui ,  Muhammad Ali Ehsan ,  Bilal Anjumn Ahmed

IPC分类号： C04B35/626 ,  C04B35/645 ,  C04B35/628 ,  C04B35/597

CPC分类号： C04B35/62635 ,  C04B35/597 ,  C04B35/62615 ,  C04B35/62625 ,  C04B35/62842 ,  C04B35/645 ,  C04B2235/3206 ,  C04B2235/3418 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/3878 ,  C04B2235/405 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/666 ,  C04B2235/762 ,  C04B2235/766 ,  C04B2235/767 ,  C04B2235/80 ,  C04B2235/96

摘要： A method for producing a composite of cubic boron nitride dispersed in a SiAlON ceramic. This method involves mixing silicon nitride nanoparticles, aluminum nitride nanoparticles, silica nanoparticles, calcium oxide nanoparticles, and cubic boron nitride microparticles to produce a mixture. The cubic boron nitride may be coated with nickel. The mixture is sintered to produce the composite, and this sintering may involve spark plasma sintering and/or sintering at a relatively low temperature. The composite may comprise a mixture of Ca-α-SiAlON and β-SiAlON ceramic reinforced by boron nitride in either or both cubic and hexagonal phases.

公开(公告)号：US20190077716A1

公开(公告)日：2019-03-14

申请号：US16189517

申请日：2018-11-13

申请人： KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS

发明人： Abbas Saeed Hakeem ,  Tahar Laoui ,  Muhammad Ali Ehsan ,  Bilal Anjum Ahmed

IPC分类号： C04B35/626 ,  C04B35/645 ,  C04B35/628 ,  C04B35/597

CPC分类号： C04B35/62635 ,  C04B35/597 ,  C04B35/62615 ,  C04B35/62625 ,  C04B35/62842 ,  C04B35/645 ,  C04B2235/3206 ,  C04B2235/3418 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/3878 ,  C04B2235/405 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/666 ,  C04B2235/762 ,  C04B2235/766 ,  C04B2235/767 ,  C04B2235/80 ,  C04B2235/96

摘要： A method for producing a composite of cubic boron nitride dispersed in a SiAlON ceramic. This method involves mixing silicon nitride nanoparticles, aluminum nitride nanoparticles, silica nanoparticles, calcium oxide nanoparticles, and cubic boron nitride microparticles to produce a mixture. The cubic boron nitride may be coated with nickel. The mixture is sintered to produce the composite, and this sintering may involve spark plasma sintering and/or sintering at a relatively low temperature. The composite may comprise a mixture of Ca-α-SiAlON and β-SiAlON ceramic reinforced by boron nitride in either or both cubic and hexagonal phases.

公开(公告)号：US10081577B2

公开(公告)日：2018-09-25

申请号：US15538604

申请日：2015-12-24

申请人： TUNGALOY CORPORATION

发明人： Yusuke Hirano ,  Kentaro Shiro

IPC分类号： C04B35/5831 ,  B23B27/18 ,  C04B41/87 ,  B23B27/14 ,  B23B27/20 ,  C04B41/89 ,  C04B35/63 ,  C04B41/00 ,  C04B41/50 ,  C04B35/119 ,  C04B35/626 ,  C04B35/645 ,  C23C14/18

CPC分类号： C04B35/5831 ,  B23B27/14 ,  B23B27/18 ,  B23B27/20 ,  C04B35/119 ,  C04B35/6262 ,  C04B35/62685 ,  C04B35/6303 ,  C04B35/645 ,  C04B41/009 ,  C04B41/5063 ,  C04B41/5068 ,  C04B41/87 ,  C04B41/89 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3244 ,  C04B2235/3246 ,  C04B2235/3813 ,  C04B2235/3826 ,  C04B2235/3839 ,  C04B2235/386 ,  C04B2235/3865 ,  C04B2235/3886 ,  C04B2235/402 ,  C04B2235/5436 ,  C04B2235/6581 ,  C04B2235/785 ,  C04B2235/786 ,  C04B2235/80 ,  C23C14/18 ,  C04B41/4529 ,  C04B41/5061 ,  C04B41/5066 ,  C04B41/5062

摘要： A cBN sintered body has 40%-85% cBN by volume and 15% to 60% binder phase by volume. and inevitable impurities. The binder phase has an Al compound including Al and at least one element selected from N, O and B, and a Zr compound including Zr and at least one element selected from C, N, O and B. The Zr compound includes ZrO, or ZrO and ZrO2. In an X-ray diffraction, where a peak intensity of a (111) plane of the ZrO is I1, a peak intensity of a (101) plane of tetragonal ZrO2 is I2t and a peak intensity of a (111) plane of cubic ZrO2 is I2c, a ratio of the intensity of I1 to total intensities of I1, I2t and I2c is 0.6-1.0, and an average grain size of the Al compound is 80 nm-300 nm.

公开(公告)号：US20180222764A1

公开(公告)日：2018-08-09

申请号：US15748323

申请日：2016-07-26

申请人： CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS (CSIC) ,  VARMOXZ

发明人： Felix Antonio LOPEZ GOMEZ ,  Francisco Jose ALGUACIL PRIEGO ,  Jose Ramon GONZALEZ GRACIA ,  Mario Sergio Ramirez Zablah

IPC分类号： C01F7/16 ,  C22B7/04 ,  C22B21/04 ,  C22B21/00

CPC分类号： C01F7/164 ,  C01P2002/32 ,  C01P2004/61 ,  C04B5/00 ,  C04B7/32 ,  C04B35/22 ,  C04B35/44 ,  C04B35/62204 ,  C04B35/62615 ,  C04B35/62645 ,  C04B35/64 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/322 ,  C04B2235/3222 ,  C04B2235/3267 ,  C04B2235/3272 ,  C04B2235/3279 ,  C04B2235/3281 ,  C04B2235/3284 ,  C04B2235/3418 ,  C04B2235/3445 ,  C04B2235/3454 ,  C04B2235/3865 ,  C04B2235/5436 ,  C04B2235/661 ,  C04B2235/80 ,  C21C7/0645 ,  C21C7/076 ,  C22B7/04 ,  C22B21/0069 ,  C22B21/04 ,  Y02P10/218 ,  Y02P10/242

摘要： The present invention relates to a method for obtaining calcium aluminates for metallurgical use from non-saline aluminum slags by means of reactive grinding and thermal treatment.